TWI569864B - 氬氣之純化方法及純化裝置 - Google Patents

氬氣之純化方法及純化裝置 Download PDF

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Publication number
TWI569864B
TWI569864B TW102117621A TW102117621A TWI569864B TW I569864 B TWI569864 B TW I569864B TW 102117621 A TW102117621 A TW 102117621A TW 102117621 A TW102117621 A TW 102117621A TW I569864 B TWI569864 B TW I569864B
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TW
Taiwan
Prior art keywords
argon gas
hydrogen
reaction
oxygen
gas
Prior art date
Application number
TW102117621A
Other languages
English (en)
Chinese (zh)
Other versions
TW201406446A (zh
Inventor
山本守彥
中谷光利
岸井充
志摩康一
Original Assignee
住友精化股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 住友精化股份有限公司 filed Critical 住友精化股份有限公司
Publication of TW201406446A publication Critical patent/TW201406446A/zh
Application granted granted Critical
Publication of TWI569864B publication Critical patent/TWI569864B/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
    • B01J20/10—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising silica or silicate
    • B01J20/16—Alumino-silicates
    • B01J20/18—Synthetic zeolitic molecular sieves
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/151—Reduction of greenhouse gas [GHG] emissions, e.g. CO2

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
TW102117621A 2012-08-09 2013-05-17 氬氣之純化方法及純化裝置 TWI569864B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012176848A JP5896467B2 (ja) 2012-08-09 2012-08-09 アルゴンガスの精製方法および精製装置

Publications (2)

Publication Number Publication Date
TW201406446A TW201406446A (zh) 2014-02-16
TWI569864B true TWI569864B (zh) 2017-02-11

Family

ID=50042791

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102117621A TWI569864B (zh) 2012-08-09 2013-05-17 氬氣之純化方法及純化裝置

Country Status (4)

Country Link
JP (1) JP5896467B2 (enExample)
KR (1) KR102035870B1 (enExample)
CN (1) CN103569979B (enExample)
TW (1) TWI569864B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015159094A (ja) 2014-02-25 2015-09-03 矢崎総業株式会社 接続端子
JP6304089B2 (ja) * 2015-03-24 2018-04-04 信越半導体株式会社 アルゴンガスの精製方法及びアルゴンガスの回収精製装置
KR101954809B1 (ko) * 2018-04-30 2019-06-11 티이엠씨 주식회사 혼합가스로부터 고순도 네온 회수 방법 및 장치
CN108557787A (zh) * 2018-06-29 2018-09-21 上海联风能源科技有限公司 一种回收粗氩气再提纯方法
JP7453781B2 (ja) * 2019-12-13 2024-03-21 三菱重工業株式会社 製造装置用ガス供給装置、アトマイズ装置、３ｄ積層造形装置、及び積層造形システム
CN115432678B (zh) * 2021-04-21 2023-12-29 上海联风能源科技有限公司 一种高纯度氩气的制备方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61163106A (ja) * 1985-01-11 1986-07-23 Hitachi Ltd 不活性ガスの回収方法および装置
CN102153057A (zh) * 2010-02-10 2011-08-17 住友精化株式会社 氩气的纯化方法及纯化装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5488893A (en) * 1977-12-26 1979-07-14 Nippon Oxygen Co Ltd Method of purifying inert gas
KR910001996B1 (ko) * 1985-02-09 1991-03-30 가부시기가이샤 히다찌 세이사꾸쇼 불활성 가스의 회수방법 및 장치
JP3496079B2 (ja) * 1993-11-17 2004-02-09 日本酸素株式会社 アルゴンガスの精製方法及び装置
JPH1183309A (ja) * 1997-09-04 1999-03-26 Nippon Air Rikiide Kk アルゴン精製方法及び装置
JP3737900B2 (ja) * 1999-02-10 2006-01-25 エア・ウォーター株式会社 単結晶製造炉からの排ガスアルゴンの精製方法
US7645431B2 (en) * 2007-10-23 2010-01-12 Air Products And Chemicals, Inc. Purification of noble gases using online regeneration of getter beds
US7862645B2 (en) * 2008-02-01 2011-01-04 Air Products And Chemicals, Inc. Removal of gaseous contaminants from argon
JP2009234868A (ja) * 2008-03-27 2009-10-15 Nippon Steel Corp アルゴンガスの精製装置およびその精製方法
TWI478761B (zh) * 2010-02-25 2015-04-01 Sumitomo Seika Chemicals 氬氣之純化方法及純化裝置
JP2012106904A (ja) * 2010-10-29 2012-06-07 Sumitomo Seika Chem Co Ltd アルゴンガスの精製方法および精製装置
JP5500650B2 (ja) * 2010-11-10 2014-05-21 住友精化株式会社 アルゴンガスの精製方法および精製装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61163106A (ja) * 1985-01-11 1986-07-23 Hitachi Ltd 不活性ガスの回収方法および装置
CN102153057A (zh) * 2010-02-10 2011-08-17 住友精化株式会社 氩气的纯化方法及纯化装置

Also Published As

Publication number Publication date
CN103569979B (zh) 2017-08-04
JP5896467B2 (ja) 2016-03-30
JP2014034493A (ja) 2014-02-24
CN103569979A (zh) 2014-02-12
TW201406446A (zh) 2014-02-16
KR20140020723A (ko) 2014-02-19
KR102035870B1 (ko) 2019-10-23

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