CN103009813B - 喷墨记录头、记录元件基板及制造该记录头和基板的方法 - Google Patents

喷墨记录头、记录元件基板及制造该记录头和基板的方法 Download PDF

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Publication number
CN103009813B
CN103009813B CN201310001140.6A CN201310001140A CN103009813B CN 103009813 B CN103009813 B CN 103009813B CN 201310001140 A CN201310001140 A CN 201310001140A CN 103009813 B CN103009813 B CN 103009813B
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CN
China
Prior art keywords
recording element
element substrate
substrate
ink jet
print head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201310001140.6A
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English (en)
Chinese (zh)
Other versions
CN103009813A (zh
Inventor
宫崎浩孝
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Canon Inc
Original Assignee
Canon Inc
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Publication date
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Publication of CN103009813A publication Critical patent/CN103009813A/zh
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Publication of CN103009813B publication Critical patent/CN103009813B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/20—Modules
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
CN201310001140.6A 2008-12-17 2009-12-16 喷墨记录头、记录元件基板及制造该记录头和基板的方法 Expired - Fee Related CN103009813B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008-320928 2008-12-17
JP2008320928 2008-12-17

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN2009102527649A Division CN101746136B (zh) 2008-12-17 2009-12-16 喷墨记录头、记录元件基板及制造该记录头和基板的方法

Publications (2)

Publication Number Publication Date
CN103009813A CN103009813A (zh) 2013-04-03
CN103009813B true CN103009813B (zh) 2015-04-22

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CN201310001140.6A Expired - Fee Related CN103009813B (zh) 2008-12-17 2009-12-16 喷墨记录头、记录元件基板及制造该记录头和基板的方法
CN2009102527649A Expired - Fee Related CN101746136B (zh) 2008-12-17 2009-12-16 喷墨记录头、记录元件基板及制造该记录头和基板的方法

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Country Status (3)

Country Link
US (4) US9782970B2 (enExample)
JP (2) JP5404331B2 (enExample)
CN (2) CN103009813B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5440411B2 (ja) * 2010-06-21 2014-03-12 コニカミノルタ株式会社 ラインヘッドモジュールおよびインクジェット記録装置
JP5516122B2 (ja) * 2010-06-22 2014-06-11 コニカミノルタ株式会社 ラインヘッドおよびインクジェット記録装置
JP6223006B2 (ja) 2013-06-12 2017-11-01 キヤノン株式会社 液体吐出ヘッドチップ及びその製造方法
JP6128991B2 (ja) 2013-06-28 2017-05-17 キヤノン株式会社 液体吐出ヘッドの製造方法
JP6463034B2 (ja) * 2013-09-24 2019-01-30 キヤノン株式会社 液体吐出ヘッド
EP3186086A1 (en) 2014-08-26 2017-07-05 OCE-Technologies B.V. Multi-chip print head
JP6806457B2 (ja) * 2016-04-05 2021-01-06 キヤノン株式会社 液体吐出ヘッドおよび液体吐出ヘッドの製造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0367541B1 (en) * 1988-10-31 1994-10-05 Canon Kabushiki Kaisha Method of manufacturing an ink jet head
EP0677387A2 (en) * 1994-04-14 1995-10-18 Canon Kabushiki Kaisha Ink jet head substrate and ink jet head using same
US5888333A (en) * 1994-10-31 1999-03-30 Canon Kabushiki Kaisha Ink jet head production method, ink jet head, and ink jet recording apparatus
CN1628982A (zh) * 2003-12-15 2005-06-22 佳能株式会社 梁、具有梁的喷墨记录头及其制造方法
CN1880080A (zh) * 2005-06-17 2006-12-20 佳能株式会社 用来制造排液头的方法、排液头、及排液记录设备

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JPS63288620A (ja) * 1987-05-22 1988-11-25 Kobe Steel Ltd アルミニウムの電解複合超鏡面加工方法
US4829324A (en) * 1987-12-23 1989-05-09 Xerox Corporation Large array thermal ink jet printhead
US4851371A (en) 1988-12-05 1989-07-25 Xerox Corporation Fabricating process for large array semiconductive devices
US4975143A (en) * 1989-11-22 1990-12-04 Xerox Corporation Keyway alignment substrates
JP3198221B2 (ja) 1994-10-31 2001-08-13 キヤノン株式会社 インクジェットヘッドの製造方法、インクジェットヘッド、およびインクジェットヘッド記録装置
JPH10157149A (ja) * 1996-12-05 1998-06-16 Canon Inc 液体噴射記録ヘッドの製造方法
CN1136103C (zh) * 1998-11-23 2004-01-28 研能科技股份有限公司 喷孔片的制造方法
JP2001096753A (ja) * 1999-10-01 2001-04-10 Seiko Epson Corp インクジェットヘッドの製造方法
JP2001301170A (ja) * 2000-04-25 2001-10-30 Seiko Epson Corp インクジェット式記録ヘッド及びその製造方法
US6642127B2 (en) * 2001-10-19 2003-11-04 Applied Materials, Inc. Method for dicing a semiconductor wafer
JPWO2004052651A1 (ja) * 2002-12-10 2006-04-06 松下電器産業株式会社 インクジェットヘッドの製造方法、及びインクジェット式記録装置
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JP4277705B2 (ja) * 2004-02-12 2009-06-10 セイコーエプソン株式会社 インクジェットヘッドの製造方法及びインクジェットヘッド並びにインクジェット記録装置
JP2006231645A (ja) * 2005-02-24 2006-09-07 Ricoh Co Ltd 液滴吐出ヘッド、液体カートリッジ、液滴吐出装置及び液滴吐出ヘッドの製造方法
JP2006321173A (ja) * 2005-05-20 2006-11-30 Fuji Xerox Co Ltd 液滴吐出ヘッドおよび製造方法
JP5082285B2 (ja) * 2006-04-25 2012-11-28 セイコーエプソン株式会社 配線構造、デバイス、デバイスの製造方法、液滴吐出ヘッド、液滴吐出ヘッドの製造方法、及び液滴吐出装置
US8152278B2 (en) * 2006-12-14 2012-04-10 Canon Kabushiki Kaisha Liquid jet head chip and manufacturing method therefor
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Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0367541B1 (en) * 1988-10-31 1994-10-05 Canon Kabushiki Kaisha Method of manufacturing an ink jet head
EP0677387A2 (en) * 1994-04-14 1995-10-18 Canon Kabushiki Kaisha Ink jet head substrate and ink jet head using same
US5888333A (en) * 1994-10-31 1999-03-30 Canon Kabushiki Kaisha Ink jet head production method, ink jet head, and ink jet recording apparatus
CN1628982A (zh) * 2003-12-15 2005-06-22 佳能株式会社 梁、具有梁的喷墨记录头及其制造方法
CN1880080A (zh) * 2005-06-17 2006-12-20 佳能株式会社 用来制造排液头的方法、排液头、及排液记录设备

Also Published As

Publication number Publication date
CN101746136B (zh) 2013-02-13
US8789928B2 (en) 2014-07-29
US10029466B2 (en) 2018-07-24
US20100149283A1 (en) 2010-06-17
CN101746136A (zh) 2010-06-23
US20120325772A1 (en) 2012-12-27
US20160152029A1 (en) 2016-06-02
JP5404883B2 (ja) 2014-02-05
US20140227808A1 (en) 2014-08-14
US9283761B2 (en) 2016-03-15
JP5404331B2 (ja) 2014-01-29
JP2010162874A (ja) 2010-07-29
CN103009813A (zh) 2013-04-03
JP2012254646A (ja) 2012-12-27
US9782970B2 (en) 2017-10-10

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Granted publication date: 20150422

Termination date: 20201216