CN102963128A - 压电元件单元、液体喷射头以及液体喷射装置 - Google Patents

压电元件单元、液体喷射头以及液体喷射装置 Download PDF

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Publication number
CN102963128A
CN102963128A CN2012103111187A CN201210311118A CN102963128A CN 102963128 A CN102963128 A CN 102963128A CN 2012103111187 A CN2012103111187 A CN 2012103111187A CN 201210311118 A CN201210311118 A CN 201210311118A CN 102963128 A CN102963128 A CN 102963128A
Authority
CN
China
Prior art keywords
electrode
piezoelectric element
internal electrode
active region
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2012103111187A
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English (en)
Chinese (zh)
Inventor
幸田隆史
富樫勇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN102963128A publication Critical patent/CN102963128A/zh
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2/14274Structure of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/04Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/87Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/87Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877Conductive materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14491Electrical connection
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/11Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics

Landscapes

  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
CN2012103111187A 2011-08-30 2012-08-28 压电元件单元、液体喷射头以及液体喷射装置 Pending CN102963128A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-186965 2011-08-30
JP2011186965A JP2013051236A (ja) 2011-08-30 2011-08-30 圧電素子ユニット、液体噴射ヘッドおよび液体噴射装置

Publications (1)

Publication Number Publication Date
CN102963128A true CN102963128A (zh) 2013-03-13

Family

ID=47743094

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2012103111187A Pending CN102963128A (zh) 2011-08-30 2012-08-28 压电元件单元、液体喷射头以及液体喷射装置

Country Status (3)

Country Link
US (2) US8636344B2 (enExample)
JP (1) JP2013051236A (enExample)
CN (1) CN102963128A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013051236A (ja) * 2011-08-30 2013-03-14 Seiko Epson Corp 圧電素子ユニット、液体噴射ヘッドおよび液体噴射装置
US10447135B2 (en) * 2015-09-28 2019-10-15 The Curators Of The University Of Missouri Device for generating electrical power from low frequency oscillations

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5453770A (en) * 1991-06-13 1995-09-26 Seiko Epson Corporation On-demand type ink jet print head
US20020158553A1 (en) * 1999-12-27 2002-10-31 Seiko Epson Corporation Manufacturing method of piezoelectric vibrator unit, manufacturing method of liquid jet head, piezoelectric vibrator unit, and liquid jet head
CN1542993A (zh) * 2003-04-04 2004-11-03 ������������ʽ���� 压电元件形成部件及其制造方法、压电致动器单元和液体喷射头
CN101009355A (zh) * 2003-03-04 2007-08-01 精工爱普生株式会社 压电元件形成部件
JP2010173269A (ja) * 2009-01-30 2010-08-12 Seiko Epson Corp 液体噴射ヘッド及び液体噴射装置並びに圧電素子

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3204292B2 (ja) * 1995-12-11 2001-09-04 セイコーエプソン株式会社 インクジェット記録ヘッド用圧電振動子ユニット、及びその製造方法
DE69916344T2 (de) * 1998-01-23 2005-05-12 Océ-Technologies B.V. Pizoelektrischer Betätiger für Tintenstrahldruckkopf
JP3468279B2 (ja) * 1998-09-17 2003-11-17 セイコーエプソン株式会社 圧電振動子ユニットの製造方法
JP2001102646A (ja) * 1999-09-28 2001-04-13 Tokin Ceramics Corp 積層型圧電セラミックス
JP2001111127A (ja) * 1999-10-04 2001-04-20 Kyocera Corp 圧電/電歪型アクチュエータ及びその製造方法
US6398350B2 (en) * 2000-02-08 2002-06-04 Seiko Epson Corporation Piezoelectric vibrator unit, liquid jet head, manufacturing method of piezoelectric vibrator unit, and manufacturing method of liquid jet head
JP2004186344A (ja) * 2002-12-02 2004-07-02 Kyocera Corp セラミック積層体及びその製法
JP4235804B2 (ja) 2003-03-04 2009-03-11 セイコーエプソン株式会社 圧電素子形成部材、圧電素子形成ユニット及び圧電素子ユニット並びに液体噴射ヘッド
JP5444971B2 (ja) 2009-09-08 2014-03-19 株式会社リコー 圧電アクチュエータの製造方法、圧電アクチュエータ、液体吐出ヘッド及び画像形成装置
JP2011071365A (ja) 2009-09-28 2011-04-07 Taiheiyo Cement Corp 電子部品の内部電極の製造方法および電子部品
JP5707839B2 (ja) * 2010-10-13 2015-04-30 セイコーエプソン株式会社 圧電型発電機および圧電型発電機の製造方法
JP2013051236A (ja) * 2011-08-30 2013-03-14 Seiko Epson Corp 圧電素子ユニット、液体噴射ヘッドおよび液体噴射装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5453770A (en) * 1991-06-13 1995-09-26 Seiko Epson Corporation On-demand type ink jet print head
US20020158553A1 (en) * 1999-12-27 2002-10-31 Seiko Epson Corporation Manufacturing method of piezoelectric vibrator unit, manufacturing method of liquid jet head, piezoelectric vibrator unit, and liquid jet head
US6700307B2 (en) * 1999-12-27 2004-03-02 Seiko Epson Corporation Piezoelectric vibrator unit
CN101009355A (zh) * 2003-03-04 2007-08-01 精工爱普生株式会社 压电元件形成部件
CN1542993A (zh) * 2003-04-04 2004-11-03 ������������ʽ���� 压电元件形成部件及其制造方法、压电致动器单元和液体喷射头
JP2004311643A (ja) * 2003-04-04 2004-11-04 Seiko Epson Corp 圧電素子形成部材およびその製造方法ならびにそれを用いた圧電素子ユニットおよび液体噴射ヘッド
JP2010173269A (ja) * 2009-01-30 2010-08-12 Seiko Epson Corp 液体噴射ヘッド及び液体噴射装置並びに圧電素子

Also Published As

Publication number Publication date
US20140085385A1 (en) 2014-03-27
US20130050352A1 (en) 2013-02-28
US9090057B2 (en) 2015-07-28
JP2013051236A (ja) 2013-03-14
US8636344B2 (en) 2014-01-28

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C02 Deemed withdrawal of patent application after publication (patent law 2001)
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Application publication date: 20130313