JP2013051236A - 圧電素子ユニット、液体噴射ヘッドおよび液体噴射装置 - Google Patents
圧電素子ユニット、液体噴射ヘッドおよび液体噴射装置 Download PDFInfo
- Publication number
- JP2013051236A JP2013051236A JP2011186965A JP2011186965A JP2013051236A JP 2013051236 A JP2013051236 A JP 2013051236A JP 2011186965 A JP2011186965 A JP 2011186965A JP 2011186965 A JP2011186965 A JP 2011186965A JP 2013051236 A JP2013051236 A JP 2013051236A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- piezoelectric element
- internal electrode
- element unit
- external electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 26
- 239000000758 substrate Substances 0.000 claims description 41
- 239000000463 material Substances 0.000 claims description 15
- 229910001316 Ag alloy Inorganic materials 0.000 claims description 5
- 229910001252 Pd alloy Inorganic materials 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 abstract description 6
- 230000000052 comparative effect Effects 0.000 description 14
- 230000000694 effects Effects 0.000 description 5
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000008602 contraction Effects 0.000 description 3
- 238000007665 sagging Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910000510 noble metal Inorganic materials 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14274—Structure of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/877—Conductive materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14491—Electrical connection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011186965A JP2013051236A (ja) | 2011-08-30 | 2011-08-30 | 圧電素子ユニット、液体噴射ヘッドおよび液体噴射装置 |
| US13/595,995 US8636344B2 (en) | 2011-08-30 | 2012-08-27 | Piezoelectric unit, liquid ejecting head, and liquid ejecting apparatus |
| CN2012103111187A CN102963128A (zh) | 2011-08-30 | 2012-08-28 | 压电元件单元、液体喷射头以及液体喷射装置 |
| US14/095,904 US9090057B2 (en) | 2011-08-30 | 2013-12-03 | Piezoelectric unit, liquid ejecting head, and liquid ejecting apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011186965A JP2013051236A (ja) | 2011-08-30 | 2011-08-30 | 圧電素子ユニット、液体噴射ヘッドおよび液体噴射装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013051236A true JP2013051236A (ja) | 2013-03-14 |
| JP2013051236A5 JP2013051236A5 (enExample) | 2014-10-09 |
Family
ID=47743094
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011186965A Pending JP2013051236A (ja) | 2011-08-30 | 2011-08-30 | 圧電素子ユニット、液体噴射ヘッドおよび液体噴射装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (2) | US8636344B2 (enExample) |
| JP (1) | JP2013051236A (enExample) |
| CN (1) | CN102963128A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013051236A (ja) * | 2011-08-30 | 2013-03-14 | Seiko Epson Corp | 圧電素子ユニット、液体噴射ヘッドおよび液体噴射装置 |
| US10447135B2 (en) * | 2015-09-28 | 2019-10-15 | The Curators Of The University Of Missouri | Device for generating electrical power from low frequency oscillations |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09156100A (ja) * | 1995-12-11 | 1997-06-17 | Seiko Epson Corp | インクジェット記録ヘッド用圧電振動子ユニット、及びその製造方法 |
| JP2000094678A (ja) * | 1998-09-17 | 2000-04-04 | Seiko Epson Corp | 圧電振動子ユニット、圧電振動子ユニットの製造方法、及びインクジェット式記録ヘッド |
| JP2001102646A (ja) * | 1999-09-28 | 2001-04-13 | Tokin Ceramics Corp | 積層型圧電セラミックス |
| JP2001111127A (ja) * | 1999-10-04 | 2001-04-20 | Kyocera Corp | 圧電/電歪型アクチュエータ及びその製造方法 |
| JP2004186344A (ja) * | 2002-12-02 | 2004-07-02 | Kyocera Corp | セラミック積層体及びその製法 |
| JP2010173269A (ja) * | 2009-01-30 | 2010-08-12 | Seiko Epson Corp | 液体噴射ヘッド及び液体噴射装置並びに圧電素子 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2998764B2 (ja) * | 1991-06-13 | 2000-01-11 | セイコーエプソン株式会社 | インクジェット式印字ヘッド、インク補給方法、及び気泡除去方法 |
| DE69916344T2 (de) * | 1998-01-23 | 2005-05-12 | Océ-Technologies B.V. | Pizoelektrischer Betätiger für Tintenstrahldruckkopf |
| EP1113509A3 (en) * | 1999-12-27 | 2005-03-23 | Seiko Epson Corporation | Piezoelectric vibrator unit, liquid jet head, and their manufacturing methods |
| US6398350B2 (en) * | 2000-02-08 | 2002-06-04 | Seiko Epson Corporation | Piezoelectric vibrator unit, liquid jet head, manufacturing method of piezoelectric vibrator unit, and manufacturing method of liquid jet head |
| CN100547822C (zh) * | 2003-03-04 | 2009-10-07 | 精工爱普生株式会社 | 压电元件形成部件 |
| JP4235804B2 (ja) | 2003-03-04 | 2009-03-11 | セイコーエプソン株式会社 | 圧電素子形成部材、圧電素子形成ユニット及び圧電素子ユニット並びに液体噴射ヘッド |
| JP4670225B2 (ja) * | 2003-04-04 | 2011-04-13 | セイコーエプソン株式会社 | 圧電素子形成部材およびその製造方法ならびにそれを用いた圧電素子ユニットおよび液体噴射ヘッド |
| JP5444971B2 (ja) | 2009-09-08 | 2014-03-19 | 株式会社リコー | 圧電アクチュエータの製造方法、圧電アクチュエータ、液体吐出ヘッド及び画像形成装置 |
| JP2011071365A (ja) | 2009-09-28 | 2011-04-07 | Taiheiyo Cement Corp | 電子部品の内部電極の製造方法および電子部品 |
| JP5707839B2 (ja) * | 2010-10-13 | 2015-04-30 | セイコーエプソン株式会社 | 圧電型発電機および圧電型発電機の製造方法 |
| JP2013051236A (ja) * | 2011-08-30 | 2013-03-14 | Seiko Epson Corp | 圧電素子ユニット、液体噴射ヘッドおよび液体噴射装置 |
-
2011
- 2011-08-30 JP JP2011186965A patent/JP2013051236A/ja active Pending
-
2012
- 2012-08-27 US US13/595,995 patent/US8636344B2/en active Active
- 2012-08-28 CN CN2012103111187A patent/CN102963128A/zh active Pending
-
2013
- 2013-12-03 US US14/095,904 patent/US9090057B2/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09156100A (ja) * | 1995-12-11 | 1997-06-17 | Seiko Epson Corp | インクジェット記録ヘッド用圧電振動子ユニット、及びその製造方法 |
| JP2000094678A (ja) * | 1998-09-17 | 2000-04-04 | Seiko Epson Corp | 圧電振動子ユニット、圧電振動子ユニットの製造方法、及びインクジェット式記録ヘッド |
| JP2001102646A (ja) * | 1999-09-28 | 2001-04-13 | Tokin Ceramics Corp | 積層型圧電セラミックス |
| JP2001111127A (ja) * | 1999-10-04 | 2001-04-20 | Kyocera Corp | 圧電/電歪型アクチュエータ及びその製造方法 |
| JP2004186344A (ja) * | 2002-12-02 | 2004-07-02 | Kyocera Corp | セラミック積層体及びその製法 |
| JP2010173269A (ja) * | 2009-01-30 | 2010-08-12 | Seiko Epson Corp | 液体噴射ヘッド及び液体噴射装置並びに圧電素子 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20140085385A1 (en) | 2014-03-27 |
| CN102963128A (zh) | 2013-03-13 |
| US20130050352A1 (en) | 2013-02-28 |
| US9090057B2 (en) | 2015-07-28 |
| US8636344B2 (en) | 2014-01-28 |
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