CN102933740A - 铟靶及其制造方法 - Google Patents
铟靶及其制造方法 Download PDFInfo
- Publication number
- CN102933740A CN102933740A CN2011800027278A CN201180002727A CN102933740A CN 102933740 A CN102933740 A CN 102933740A CN 2011800027278 A CN2011800027278 A CN 2011800027278A CN 201180002727 A CN201180002727 A CN 201180002727A CN 102933740 A CN102933740 A CN 102933740A
- Authority
- CN
- China
- Prior art keywords
- indium
- inclusion
- raw material
- sem
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052738 indium Inorganic materials 0.000 title claims abstract description 74
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 title claims abstract description 71
- 238000000034 method Methods 0.000 title claims abstract description 18
- 239000002245 particle Substances 0.000 claims abstract description 35
- 239000002994 raw material Substances 0.000 claims description 27
- 238000004519 manufacturing process Methods 0.000 claims description 16
- 150000001875 compounds Chemical class 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 229910052804 chromium Inorganic materials 0.000 claims description 6
- 229910052742 iron Inorganic materials 0.000 claims description 6
- 229910052759 nickel Inorganic materials 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 150000001722 carbon compounds Chemical class 0.000 claims description 3
- 150000001805 chlorine compounds Chemical class 0.000 claims description 3
- 229910044991 metal oxide Inorganic materials 0.000 claims description 3
- 150000004706 metal oxides Chemical class 0.000 claims description 3
- 150000002471 indium Chemical class 0.000 abstract description 3
- 238000004544 sputter deposition Methods 0.000 abstract description 2
- 230000002547 anomalous effect Effects 0.000 abstract 1
- 238000000550 scanning electron microscopy energy dispersive X-ray spectroscopy Methods 0.000 description 23
- 238000010586 diagram Methods 0.000 description 12
- 238000009826 distribution Methods 0.000 description 12
- 230000000803 paradoxical effect Effects 0.000 description 12
- 239000007788 liquid Substances 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 239000011651 chromium Substances 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 230000033228 biological regulation Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000005477 sputtering target Methods 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 239000003085 diluting agent Substances 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910000846 In alloy Inorganic materials 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000003556 assay Methods 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000005554 pickling Methods 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C28/00—Alloys based on a metal not provided for in groups C22C5/00 - C22C27/00
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (5)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011093071A JP4884561B1 (ja) | 2011-04-19 | 2011-04-19 | インジウムターゲット及びその製造方法 |
JP2011-093071 | 2011-04-19 | ||
PCT/JP2011/065587 WO2012144089A1 (ja) | 2011-04-19 | 2011-07-07 | インジウムターゲット及びその製造方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410560520.8A Division CN104357801A (zh) | 2011-04-19 | 2011-07-07 | 铟靶及其制造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102933740A true CN102933740A (zh) | 2013-02-13 |
CN102933740B CN102933740B (zh) | 2016-05-11 |
Family
ID=45851264
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410560520.8A Pending CN104357801A (zh) | 2011-04-19 | 2011-07-07 | 铟靶及其制造方法 |
CN201180002727.8A Active CN102933740B (zh) | 2011-04-19 | 2011-07-07 | 铟靶及其制造方法 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410560520.8A Pending CN104357801A (zh) | 2011-04-19 | 2011-07-07 | 铟靶及其制造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20120273348A1 (zh) |
JP (1) | JP4884561B1 (zh) |
KR (1) | KR101184961B1 (zh) |
CN (2) | CN104357801A (zh) |
TW (1) | TWI387654B (zh) |
WO (1) | WO2012144089A1 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104357801A (zh) * | 2011-04-19 | 2015-02-18 | Jx日矿日石金属株式会社 | 铟靶及其制造方法 |
CN111971423A (zh) * | 2018-03-28 | 2020-11-20 | Jx金属株式会社 | Co阳极及使用有Co阳极的Co电镀方法 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4948634B2 (ja) | 2010-09-01 | 2012-06-06 | Jx日鉱日石金属株式会社 | インジウムターゲット及びその製造方法 |
JP5140169B2 (ja) | 2011-03-01 | 2013-02-06 | Jx日鉱日石金属株式会社 | インジウムターゲット及びその製造方法 |
JP5026611B1 (ja) | 2011-09-21 | 2012-09-12 | Jx日鉱日石金属株式会社 | 積層構造体及びその製造方法 |
JP5074628B1 (ja) | 2012-01-05 | 2012-11-14 | Jx日鉱日石金属株式会社 | インジウム製スパッタリングターゲット及びその製造方法 |
WO2014030362A1 (ja) | 2012-08-22 | 2014-02-27 | Jx日鉱日石金属株式会社 | インジウム製円筒型スパッタリングターゲット及びその製造方法 |
JP5281186B1 (ja) * | 2012-10-25 | 2013-09-04 | Jx日鉱日石金属株式会社 | インジウムターゲット及びその製造方法 |
WO2015004958A1 (ja) | 2013-07-08 | 2015-01-15 | Jx日鉱日石金属株式会社 | スパッタリングターゲット及び、それの製造方法 |
US10334686B2 (en) | 2014-02-21 | 2019-06-25 | Signify Holding B.V. | Light emitting module, a lamp, a luminaire and a method of illuminating an object |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0925564A (ja) * | 1995-07-06 | 1997-01-28 | Japan Energy Corp | アルミニウムまたはアルミニウム合金スパッタリングターゲット |
CN1381402A (zh) * | 2001-02-06 | 2002-11-27 | 住友化学工业株式会社 | 具有低量金属杂质的含铟水溶液的制造方法 |
JP2010024474A (ja) * | 2008-07-16 | 2010-02-04 | Sumitomo Metal Mining Co Ltd | インジウムターゲットの製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57185973A (en) * | 1981-05-07 | 1982-11-16 | Mitsui Mining & Smelting Co Ltd | Production of target for sputtering |
JP3974945B2 (ja) * | 1992-01-30 | 2007-09-12 | 東ソー株式会社 | チタンスパッタリングターゲット |
JP3081602B2 (ja) * | 1998-02-23 | 2000-08-28 | 株式会社神戸製鋼所 | スパッタリングターゲット材料及びその製造方法 |
JP4817486B2 (ja) * | 2000-09-29 | 2011-11-16 | 株式会社東芝 | タングステン粉末およびその製造方法ならびにスパッタ・ターゲットおよび切削工具 |
CN100537828C (zh) * | 2001-03-12 | 2009-09-09 | 日矿金属株式会社 | Ito溅射靶用氧化锡粉末、该粉末的制造方法、用于形成ito膜的烧结体溅射靶及该靶的制造方法 |
US20090065354A1 (en) * | 2007-09-12 | 2009-03-12 | Kardokus Janine K | Sputtering targets comprising a novel manufacturing design, methods of production and uses thereof |
JP4884561B1 (ja) * | 2011-04-19 | 2012-02-29 | Jx日鉱日石金属株式会社 | インジウムターゲット及びその製造方法 |
-
2011
- 2011-04-19 JP JP2011093071A patent/JP4884561B1/ja active Active
- 2011-07-07 KR KR1020117030226A patent/KR101184961B1/ko active IP Right Grant
- 2011-07-07 WO PCT/JP2011/065587 patent/WO2012144089A1/ja active Application Filing
- 2011-07-07 US US13/504,338 patent/US20120273348A1/en not_active Abandoned
- 2011-07-07 CN CN201410560520.8A patent/CN104357801A/zh active Pending
- 2011-07-07 CN CN201180002727.8A patent/CN102933740B/zh active Active
- 2011-08-01 TW TW100127178A patent/TWI387654B/zh active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0925564A (ja) * | 1995-07-06 | 1997-01-28 | Japan Energy Corp | アルミニウムまたはアルミニウム合金スパッタリングターゲット |
CN1381402A (zh) * | 2001-02-06 | 2002-11-27 | 住友化学工业株式会社 | 具有低量金属杂质的含铟水溶液的制造方法 |
JP2010024474A (ja) * | 2008-07-16 | 2010-02-04 | Sumitomo Metal Mining Co Ltd | インジウムターゲットの製造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104357801A (zh) * | 2011-04-19 | 2015-02-18 | Jx日矿日石金属株式会社 | 铟靶及其制造方法 |
CN111971423A (zh) * | 2018-03-28 | 2020-11-20 | Jx金属株式会社 | Co阳极及使用有Co阳极的Co电镀方法 |
Also Published As
Publication number | Publication date |
---|---|
KR101184961B1 (ko) | 2012-10-02 |
WO2012144089A1 (ja) | 2012-10-26 |
JP4884561B1 (ja) | 2012-02-29 |
US20120273348A1 (en) | 2012-11-01 |
JP2012224911A (ja) | 2012-11-15 |
TW201229247A (en) | 2012-07-16 |
CN102933740B (zh) | 2016-05-11 |
CN104357801A (zh) | 2015-02-18 |
TWI387654B (zh) | 2013-03-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder |
Address after: Tokyo, Japan, Japan Patentee after: JX NIPPON MINING & METALS CORPORATION Address before: Tokyo, Japan, Japan Patentee before: JX Nippon Mining & Metals Co., Ltd. |
|
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: Tokyo, Japan, Japan Patentee after: JX NIPPON MINING & METALS CORPORATION Address before: Tokyo, Japan, Japan Patentee before: JX NIPPON MINING & METALS CORPORATION |
|
CP01 | Change in the name or title of a patent holder | ||
CP02 | Change in the address of a patent holder |
Address after: No. 10-4, erdingmu, tiger gate, Tokyo port, Japan Patentee after: JKS Metal Co.,Ltd. Address before: Tokyo, Japan Patentee before: JKS Metal Co.,Ltd. |
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CP02 | Change in the address of a patent holder |