CN102687259B - 半导体用铜接合线及其接合结构 - Google Patents
半导体用铜接合线及其接合结构 Download PDFInfo
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- CN102687259B CN102687259B CN201180005261.7A CN201180005261A CN102687259B CN 102687259 B CN102687259 B CN 102687259B CN 201180005261 A CN201180005261 A CN 201180005261A CN 102687259 B CN102687259 B CN 102687259B
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Classifications
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Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Wire Bonding (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Abstract
Description
Claims (12)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2010021971A JP5550369B2 (ja) | 2010-02-03 | 2010-02-03 | 半導体用銅ボンディングワイヤとその接合構造 |
JP2010-021971 | 2010-02-03 | ||
PCT/JP2011/052270 WO2011096487A1 (ja) | 2010-02-03 | 2011-02-03 | 半導体用銅ボンディングワイヤとその接合構造 |
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CN102687259A CN102687259A (zh) | 2012-09-19 |
CN102687259B true CN102687259B (zh) | 2015-02-25 |
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JP (1) | JP5550369B2 (zh) |
CN (1) | CN102687259B (zh) |
TW (1) | TWI517271B (zh) |
WO (1) | WO2011096487A1 (zh) |
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US11830845B2 (en) | 2011-05-03 | 2023-11-28 | Tessera Llc | Package-on-package assembly with wire bonds to encapsulation surface |
KR101128063B1 (ko) | 2011-05-03 | 2012-04-23 | 테세라, 인코포레이티드 | 캡슐화 층의 표면에 와이어 본드를 구비하는 패키지 적층형 어셈블리 |
US8836136B2 (en) | 2011-10-17 | 2014-09-16 | Invensas Corporation | Package-on-package assembly with wire bond vias |
JP2013120075A (ja) * | 2011-12-06 | 2013-06-17 | Mitsubishi Electric Corp | 故障解析装置および故障解析方法ならびにスクリーニングテスト装置およびスクリーニングテスト方法 |
JP5429269B2 (ja) * | 2011-12-09 | 2014-02-26 | 日鉄住金マイクロメタル株式会社 | ボンディングワイヤの製造方法 |
US9230892B2 (en) * | 2012-03-22 | 2016-01-05 | Sumitomo Bakelite Co., Ltd. | Semiconductor device and method of manufacturing the same |
JP6002437B2 (ja) * | 2012-05-17 | 2016-10-05 | 新日本無線株式会社 | 半導体装置及びその製造方法 |
US8835228B2 (en) | 2012-05-22 | 2014-09-16 | Invensas Corporation | Substrate-less stackable package with wire-bond interconnect |
US9502390B2 (en) | 2012-08-03 | 2016-11-22 | Invensas Corporation | BVA interposer |
TW201428901A (zh) * | 2013-01-07 | 2014-07-16 | 矽品精密工業股份有限公司 | 半導體封裝件及其製法 |
US9167710B2 (en) | 2013-08-07 | 2015-10-20 | Invensas Corporation | Embedded packaging with preformed vias |
US20150076714A1 (en) | 2013-09-16 | 2015-03-19 | Invensas Corporation | Microelectronic element with bond elements to encapsulation surface |
US9583456B2 (en) | 2013-11-22 | 2017-02-28 | Invensas Corporation | Multiple bond via arrays of different wire heights on a same substrate |
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JP5590259B1 (ja) * | 2014-01-28 | 2014-09-17 | 千住金属工業株式会社 | Cu核ボール、はんだペーストおよびはんだ継手 |
US10950570B2 (en) | 2014-04-21 | 2021-03-16 | Nippon Steel Chemical & Material Co., Ltd. | Bonding wire for semiconductor device |
US10381326B2 (en) | 2014-05-28 | 2019-08-13 | Invensas Corporation | Structure and method for integrated circuits packaging with increased density |
US9888579B2 (en) | 2015-03-05 | 2018-02-06 | Invensas Corporation | Pressing of wire bond wire tips to provide bent-over tips |
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US9761554B2 (en) * | 2015-05-07 | 2017-09-12 | Invensas Corporation | Ball bonding metal wire bond wires to metal pads |
US10137534B2 (en) | 2015-06-15 | 2018-11-27 | Nippon Micrometal Corporation | Bonding wire for semiconductor device |
CN107962313B (zh) * | 2015-06-15 | 2024-03-08 | 日铁新材料股份有限公司 | 半导体装置用接合线 |
DE102015110437B4 (de) * | 2015-06-29 | 2020-10-08 | Infineon Technologies Ag | Halbleitervorrichtung mit einer Metallstruktur, die mit einer leitfähigen Struktur elektrisch verbunden ist und Verfahren zur Herstellung |
CN107004610B (zh) | 2015-07-23 | 2020-07-17 | 日铁新材料股份有限公司 | 半导体装置用接合线 |
US9887172B2 (en) * | 2015-08-12 | 2018-02-06 | Nippon Micrometal Corporation | Bonding wire for semiconductor device |
US10490528B2 (en) | 2015-10-12 | 2019-11-26 | Invensas Corporation | Embedded wire bond wires |
US9490222B1 (en) | 2015-10-12 | 2016-11-08 | Invensas Corporation | Wire bond wires for interference shielding |
US10332854B2 (en) | 2015-10-23 | 2019-06-25 | Invensas Corporation | Anchoring structure of fine pitch bva |
US10181457B2 (en) | 2015-10-26 | 2019-01-15 | Invensas Corporation | Microelectronic package for wafer-level chip scale packaging with fan-out |
US9911718B2 (en) | 2015-11-17 | 2018-03-06 | Invensas Corporation | ‘RDL-First’ packaged microelectronic device for a package-on-package device |
SG10201509913XA (en) * | 2015-12-02 | 2017-07-28 | Heraeus Materials Singapore Pte Ltd | Silver alloyed copper wire |
JP6445186B2 (ja) * | 2015-12-15 | 2018-12-26 | 日鉄ケミカル&マテリアル株式会社 | 半導体装置用ボンディングワイヤ |
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US9935075B2 (en) | 2016-07-29 | 2018-04-03 | Invensas Corporation | Wire bonding method and apparatus for electromagnetic interference shielding |
US10299368B2 (en) | 2016-12-21 | 2019-05-21 | Invensas Corporation | Surface integrated waveguides and circuit structures therefor |
CN108823463A (zh) * | 2018-06-30 | 2018-11-16 | 汕头市骏码凯撒有限公司 | 一种铜合金键合丝及其制造方法 |
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- 2011-02-03 CN CN201180005261.7A patent/CN102687259B/zh active Active
- 2011-02-03 WO PCT/JP2011/052270 patent/WO2011096487A1/ja active Application Filing
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Also Published As
Publication number | Publication date |
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TWI517271B (zh) | 2016-01-11 |
JP5550369B2 (ja) | 2014-07-16 |
TW201140718A (en) | 2011-11-16 |
US20120299182A1 (en) | 2012-11-29 |
JP2011159894A (ja) | 2011-08-18 |
US8653668B2 (en) | 2014-02-18 |
CN102687259A (zh) | 2012-09-19 |
WO2011096487A1 (ja) | 2011-08-11 |
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