CN102650536B - 光学编码器 - Google Patents

光学编码器 Download PDF

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Publication number
CN102650536B
CN102650536B CN201210043088.6A CN201210043088A CN102650536B CN 102650536 B CN102650536 B CN 102650536B CN 201210043088 A CN201210043088 A CN 201210043088A CN 102650536 B CN102650536 B CN 102650536B
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CN
China
Prior art keywords
pattern
resolution detection
detection pattern
photoelectric detector
scale
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201210043088.6A
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English (en)
Chinese (zh)
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CN102650536A (zh
Inventor
堀口春彦
名仓千裕
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Publication of CN102650536A publication Critical patent/CN102650536A/zh
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Publication of CN102650536B publication Critical patent/CN102650536B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746—Linear encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
CN201210043088.6A 2011-02-28 2012-02-23 光学编码器 Expired - Fee Related CN102650536B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-042074 2011-02-28
JP2011042074A JP5765968B2 (ja) 2011-02-28 2011-02-28 光学式エンコーダ

Publications (2)

Publication Number Publication Date
CN102650536A CN102650536A (zh) 2012-08-29
CN102650536B true CN102650536B (zh) 2015-08-19

Family

ID=45688379

Family Applications (1)

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CN201210043088.6A Expired - Fee Related CN102650536B (zh) 2011-02-28 2012-02-23 光学编码器

Country Status (5)

Country Link
US (1) US8993954B2 (enExample)
EP (1) EP2492648B1 (enExample)
JP (1) JP5765968B2 (enExample)
KR (1) KR101392686B1 (enExample)
CN (1) CN102650536B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103196915B (zh) * 2013-02-26 2015-05-27 无锡微焦科技有限公司 一种物体探测系统
JP6359254B2 (ja) * 2013-09-03 2018-07-18 株式会社ミツトヨ 光電式エンコーダ
US9726524B2 (en) 2014-10-09 2017-08-08 Raytheon Company Optical position encoder
JP6486097B2 (ja) * 2014-12-19 2019-03-20 キヤノン株式会社 位置検出装置、レンズ装置、撮像システム、工作装置、位置検出方法、プログラム、および、記憶媒体
JP7058935B2 (ja) * 2016-09-12 2022-04-25 株式会社ミツトヨ 光電式エンコーダ
CN109990676A (zh) * 2019-04-28 2019-07-09 深圳市度彼电子有限公司 一种电子卷尺
CN111750795A (zh) * 2020-06-18 2020-10-09 哈尔滨工程大学 一种分布式蠕变测量系统及测量方法

Citations (6)

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CN2521583Y (zh) * 2001-12-05 2002-11-20 台湾艾华电子工业股份有限公司 光学编码器
CN1417633A (zh) * 2001-11-06 2003-05-14 约翰尼斯海登海恩博士股份有限公司 用于光学编码器的多分辨率光电二极管传感器阵列
CN1580709A (zh) * 2003-08-08 2005-02-16 夏普株式会社 光学编码器
CN1670486A (zh) * 2004-03-17 2005-09-21 佳能株式会社 光学式编码器
CN101403626A (zh) * 2007-10-02 2009-04-08 约翰尼斯海登海恩博士股份有限公司 光电二极管阵列、光电二极管检测系统和光学编码器
EP2093543A2 (en) * 2008-02-21 2009-08-26 Mitutoyo Corporation Photoelectric Encoder and Scale

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JPH0729459Y2 (ja) * 1986-12-29 1995-07-05 山洋電気株式会社 光電形エンコ−ダ
JP2749107B2 (ja) * 1989-03-20 1998-05-13 株式会社日立製作所 光ヘッド
JPH06341859A (ja) * 1993-06-02 1994-12-13 Copal Co Ltd 光学式ｓｉｎ／ｃｏｓ関数出力ポテンショメータ
JPH06341858A (ja) * 1993-06-02 1994-12-13 Copal Co Ltd 光学式変位検出装置
JPH0868667A (ja) 1994-08-30 1996-03-12 Canon Inc 光学式エンコーダ装置
JPH09145408A (ja) * 1995-11-22 1997-06-06 Konica Corp エンコーダ装置
JP3542226B2 (ja) * 1996-02-28 2004-07-14 日本電産コパル株式会社 光学式ポテンショメータ
JPH11287671A (ja) * 1998-04-01 1999-10-19 Fanuc Ltd 光学式エンコーダ
JP2001146623A (ja) 1999-11-24 2001-05-29 Tanizawa Seisakusho Ltd ヘルメット
DE19962278A1 (de) 1999-12-23 2001-08-02 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
JP2002296075A (ja) * 2001-04-02 2002-10-09 Canon Inc 光学式エンコーダ
DE10244234A1 (de) 2002-09-23 2004-03-25 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP2004219380A (ja) 2003-01-17 2004-08-05 Mitsutoyo Corp 光電式エンコーダ
JP2005017116A (ja) * 2003-06-26 2005-01-20 Sharp Corp 光学式エンコーダ用受光素子
JP4416560B2 (ja) * 2004-04-09 2010-02-17 株式会社ミツトヨ 光学式変位測定装置
JP2006023220A (ja) * 2004-07-09 2006-01-26 Nidec Copal Corp ロータリーエンコーダ
US7199354B2 (en) * 2004-08-26 2007-04-03 Dr. Johannes Heidenhain Gmbh Detector array for optical encoders
JP2008076064A (ja) 2006-09-19 2008-04-03 Olympus Corp 光学式エンコーダの信号処理回路
DE102009022766A1 (de) * 2008-05-30 2009-12-10 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Auflösungseinstellbarer optischer Kodierer
US7608813B1 (en) 2008-11-18 2009-10-27 Mitutoyo Corporation Scale track configuration for absolute optical encoder including a detector electronics with plurality of track detector portions

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CN1417633A (zh) * 2001-11-06 2003-05-14 约翰尼斯海登海恩博士股份有限公司 用于光学编码器的多分辨率光电二极管传感器阵列
CN2521583Y (zh) * 2001-12-05 2002-11-20 台湾艾华电子工业股份有限公司 光学编码器
CN1580709A (zh) * 2003-08-08 2005-02-16 夏普株式会社 光学编码器
CN1670486A (zh) * 2004-03-17 2005-09-21 佳能株式会社 光学式编码器
CN101403626A (zh) * 2007-10-02 2009-04-08 约翰尼斯海登海恩博士股份有限公司 光电二极管阵列、光电二极管检测系统和光学编码器
EP2093543A2 (en) * 2008-02-21 2009-08-26 Mitutoyo Corporation Photoelectric Encoder and Scale

Also Published As

Publication number Publication date
EP2492648A3 (en) 2017-07-05
KR20120098435A (ko) 2012-09-05
JP2012181020A (ja) 2012-09-20
US20120217383A1 (en) 2012-08-30
EP2492648B1 (en) 2018-12-12
US8993954B2 (en) 2015-03-31
EP2492648A2 (en) 2012-08-29
JP5765968B2 (ja) 2015-08-19
CN102650536A (zh) 2012-08-29
KR101392686B1 (ko) 2014-05-07

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Granted publication date: 20150819