CN102452671B - 一种连续化生产超纯氨水的方法 - Google Patents
一种连续化生产超纯氨水的方法 Download PDFInfo
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- CN102452671B CN102452671B CN201010523016.2A CN201010523016A CN102452671B CN 102452671 B CN102452671 B CN 102452671B CN 201010523016 A CN201010523016 A CN 201010523016A CN 102452671 B CN102452671 B CN 102452671B
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CN201010523016.2A CN102452671B (zh) | 2010-10-28 | 2010-10-28 | 一种连续化生产超纯氨水的方法 |
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CN201010523016.2A CN102452671B (zh) | 2010-10-28 | 2010-10-28 | 一种连续化生产超纯氨水的方法 |
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CN102452671A CN102452671A (zh) | 2012-05-16 |
CN102452671B true CN102452671B (zh) | 2015-10-07 |
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CN201010523016.2A Expired - Fee Related CN102452671B (zh) | 2010-10-28 | 2010-10-28 | 一种连续化生产超纯氨水的方法 |
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Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103466656B (zh) * | 2012-06-06 | 2015-09-02 | 华东理工大学 | 一种膜吸收法制备超净高纯氨水的方法 |
CN102701233B (zh) * | 2012-06-15 | 2013-10-16 | 中机工程(西安)启源工程有限公司 | 一种液氨吸收器及其氨水制备系统 |
CN103466655B (zh) * | 2013-09-29 | 2016-06-22 | 浙江建业化工股份有限公司 | 氨吸收装置以及制备超净高纯氨水的方法 |
CN105523570A (zh) * | 2016-02-16 | 2016-04-27 | 江苏达诺尔科技股份有限公司 | 一种ppt级超纯氨水的制备方法 |
CN106006672B (zh) * | 2016-05-26 | 2019-05-24 | 隆达电子股份有限公司 | 氨浓度提升系统及其方法 |
CN113880314B (zh) * | 2021-11-10 | 2022-07-19 | 广东工业大学 | 从氨氮废水中获取氨水的处理方法和处理系统 |
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EP0831978B1 (en) * | 1995-06-05 | 2001-02-28 | Air Liquide America Corporation | On-site ammonia purification for semiconductor manufacture |
CN1204550A (zh) * | 1997-04-11 | 1999-01-13 | 拉贝勒公司 | 用于微电子工业的高纯化学品的制备方法和装置 |
FR2833854B1 (fr) * | 2001-12-21 | 2004-08-20 | Air Liquide Electronics Sys | Procede de production d'une solution de produit chimique a partir de la phase liquide d'un produit chimique |
CN201473330U (zh) * | 2009-07-31 | 2010-05-19 | 江阴市润玛电子材料有限公司 | 超高纯氨水的生产系统 |
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