CN102308031A - 碳化硅单晶制造用坩埚、以及碳化硅单晶的制造装置和制造方法 - Google Patents
碳化硅单晶制造用坩埚、以及碳化硅单晶的制造装置和制造方法 Download PDFInfo
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- CN102308031A CN102308031A CN2010800069153A CN201080006915A CN102308031A CN 102308031 A CN102308031 A CN 102308031A CN 2010800069153 A CN2010800069153 A CN 2010800069153A CN 201080006915 A CN201080006915 A CN 201080006915A CN 102308031 A CN102308031 A CN 102308031A
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- Prior art keywords
- crucible
- silicon carbide
- crystal silicon
- vessels
- distillation gas
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Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 129
- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 89
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 74
- 239000013078 crystal Substances 0.000 claims abstract description 68
- 239000002994 raw material Substances 0.000 claims abstract description 38
- 238000004821 distillation Methods 0.000 claims description 116
- 230000012010 growth Effects 0.000 claims description 77
- 238000000034 method Methods 0.000 claims description 45
- 238000009434 installation Methods 0.000 claims description 22
- 230000007246 mechanism Effects 0.000 claims description 6
- 230000018109 developmental process Effects 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 abstract description 39
- 230000001105 regulatory effect Effects 0.000 abstract description 4
- 238000000859 sublimation Methods 0.000 abstract 2
- 230000008022 sublimation Effects 0.000 abstract 2
- 239000007789 gas Substances 0.000 description 132
- 238000012360 testing method Methods 0.000 description 26
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 22
- 238000002425 crystallisation Methods 0.000 description 20
- 230000008025 crystallization Effects 0.000 description 20
- 238000002474 experimental method Methods 0.000 description 18
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 12
- 229910002804 graphite Inorganic materials 0.000 description 11
- 239000010439 graphite Substances 0.000 description 11
- 238000012797 qualification Methods 0.000 description 11
- 239000000377 silicon dioxide Substances 0.000 description 11
- 239000000463 material Substances 0.000 description 10
- 239000000843 powder Substances 0.000 description 10
- 230000006872 improvement Effects 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 description 7
- 208000035475 disorder Diseases 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 239000012535 impurity Substances 0.000 description 6
- 238000011835 investigation Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 4
- 238000005755 formation reaction Methods 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 3
- 230000002950 deficient Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 3
- 208000037824 growth disorder Diseases 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 208000016253 exhaustion Diseases 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 102000029749 Microtubule Human genes 0.000 description 1
- 108091022875 Microtubule Proteins 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000009429 distress Effects 0.000 description 1
- 239000007770 graphite material Substances 0.000 description 1
- 238000001534 heteroepitaxy Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 210000004688 microtubule Anatomy 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 230000002285 radioactive effect Effects 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 1
- WXRGABKACDFXMG-UHFFFAOYSA-N trimethylborane Chemical compound CB(C)C WXRGABKACDFXMG-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
- C30B23/06—Heating of the deposition chamber, the substrate or the materials to be evaporated
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/002—Controlling or regulating
- C30B23/005—Controlling or regulating flux or flow of depositing species or vapour
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
- C30B35/002—Crucibles or containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02378—Silicon carbide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/02433—Crystal orientation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02529—Silicon carbide
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
Abstract
Description
Claims (6)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009-052893 | 2009-03-06 | ||
JP2009052893A JP4547031B2 (ja) | 2009-03-06 | 2009-03-06 | 炭化珪素単結晶製造用坩堝、並びに炭化珪素単結晶の製造装置及び製造方法 |
PCT/JP2010/053483 WO2010101200A1 (ja) | 2009-03-06 | 2010-02-25 | 炭化珪素単結晶製造用坩堝、並びに炭化珪素単結晶の製造装置及び製造方法 |
Publications (2)
Publication Number | Publication Date |
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CN102308031A true CN102308031A (zh) | 2012-01-04 |
CN102308031B CN102308031B (zh) | 2014-05-07 |
Family
ID=42709754
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201080006915.3A Active CN102308031B (zh) | 2009-03-06 | 2010-02-25 | 碳化硅单晶制造用坩埚、以及碳化硅单晶的制造装置和制造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8936680B2 (zh) |
EP (1) | EP2405038B1 (zh) |
JP (1) | JP4547031B2 (zh) |
KR (1) | KR101243585B1 (zh) |
CN (1) | CN102308031B (zh) |
WO (1) | WO2010101200A1 (zh) |
Cited By (7)
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CN103603036A (zh) * | 2013-11-20 | 2014-02-26 | 河北同光晶体有限公司 | 一种用于生长碳化硅晶体的坩埚 |
CN104278322A (zh) * | 2013-07-03 | 2015-01-14 | 住友电气工业株式会社 | 制造碳化硅单晶的方法和碳化硅单晶衬底 |
CN104882365A (zh) * | 2014-02-28 | 2015-09-02 | 中国科学院物理研究所 | 一种碳化硅表面处理方法 |
CN105040103A (zh) * | 2015-06-25 | 2015-11-11 | 江苏艾科勒科技有限公司 | 一种优质碳化硅晶体生长装置 |
CN110735183A (zh) * | 2018-07-18 | 2020-01-31 | 昭和电工株式会社 | 基座、SiC单晶的制造装置和制造方法 |
CN111188089A (zh) * | 2018-11-14 | 2020-05-22 | 昭和电工株式会社 | SiC单晶制造装置和SiC单晶的制造方法 |
CN113774488A (zh) * | 2021-09-23 | 2021-12-10 | 安徽光智科技有限公司 | 碳化硅晶体的生长方法 |
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JP5526866B2 (ja) * | 2010-03-02 | 2014-06-18 | 住友電気工業株式会社 | 炭化珪素結晶の製造方法および炭化珪素結晶の製造装置 |
JP5482643B2 (ja) * | 2010-12-24 | 2014-05-07 | 新日鐵住金株式会社 | 炭化珪素単結晶インゴットの製造装置 |
CN102888651B (zh) * | 2011-07-22 | 2015-09-23 | 浙江昱辉阳光能源有限公司 | 一种坩埚罩和坩埚系统 |
JP5853648B2 (ja) * | 2011-11-30 | 2016-02-09 | 住友電気工業株式会社 | 炭化珪素半導体装置の製造方法 |
US8860040B2 (en) | 2012-09-11 | 2014-10-14 | Dow Corning Corporation | High voltage power semiconductor devices on SiC |
US9018639B2 (en) | 2012-10-26 | 2015-04-28 | Dow Corning Corporation | Flat SiC semiconductor substrate |
US9797064B2 (en) | 2013-02-05 | 2017-10-24 | Dow Corning Corporation | Method for growing a SiC crystal by vapor deposition onto a seed crystal provided on a support shelf which permits thermal expansion |
US9017804B2 (en) | 2013-02-05 | 2015-04-28 | Dow Corning Corporation | Method to reduce dislocations in SiC crystal growth |
US9738991B2 (en) | 2013-02-05 | 2017-08-22 | Dow Corning Corporation | Method for growing a SiC crystal by vapor deposition onto a seed crystal provided on a supporting shelf which permits thermal expansion |
US8940614B2 (en) | 2013-03-15 | 2015-01-27 | Dow Corning Corporation | SiC substrate with SiC epitaxial film |
JP6230106B2 (ja) * | 2013-07-31 | 2017-11-15 | 太平洋セメント株式会社 | 炭化珪素単結晶の製造方法 |
US9809900B2 (en) * | 2013-10-30 | 2017-11-07 | Siemens Medical Solutions Usa, Inc. | Crystal growth chamber with O-ring seal for Czochralski growth station |
KR101538867B1 (ko) * | 2013-12-26 | 2015-07-23 | 주식회사 포스코 | 실리콘카바이드 단결정 성장 장치 및 이를 이용한 실리콘카바이드 단결정의 성장 방법 |
US9279192B2 (en) | 2014-07-29 | 2016-03-08 | Dow Corning Corporation | Method for manufacturing SiC wafer fit for integration with power device manufacturing technology |
US10793972B1 (en) | 2017-07-11 | 2020-10-06 | Ii-Vi Delaware, Inc. | High quality silicon carbide crystals and method of making the same |
CN107326329A (zh) * | 2017-08-31 | 2017-11-07 | 京东方科技集团股份有限公司 | 蒸发源和蒸镀装置 |
CN108149315B (zh) * | 2018-01-24 | 2020-10-23 | 中国科学院上海硅酸盐研究所 | 晶体生长用坩埚以及释放碳化硅晶体热应力的方法 |
KR102122668B1 (ko) | 2018-12-12 | 2020-06-12 | 에스케이씨 주식회사 | 잉곳의 제조장치 및 이를 이용한 탄화규소 잉곳의 제조방법 |
DE102020106291B4 (de) | 2020-03-09 | 2024-02-08 | Ebner Industrieofenbau Gmbh | Heizvorrichtung und Verfahren zur Kristallzüchtung mit beweglicher Impfkristallhalterung |
CN116905088B (zh) * | 2023-09-12 | 2024-01-19 | 苏州优晶光电科技有限公司 | 电阻法生长碳化硅晶体质量的控制方法、装置及生长方法 |
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2009
- 2009-03-06 JP JP2009052893A patent/JP4547031B2/ja active Active
-
2010
- 2010-02-25 KR KR1020117018299A patent/KR101243585B1/ko active IP Right Grant
- 2010-02-25 WO PCT/JP2010/053483 patent/WO2010101200A1/ja active Application Filing
- 2010-02-25 EP EP10748793.6A patent/EP2405038B1/en active Active
- 2010-02-25 US US13/138,526 patent/US8936680B2/en active Active
- 2010-02-25 CN CN201080006915.3A patent/CN102308031B/zh active Active
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Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104278322A (zh) * | 2013-07-03 | 2015-01-14 | 住友电气工业株式会社 | 制造碳化硅单晶的方法和碳化硅单晶衬底 |
CN103603036A (zh) * | 2013-11-20 | 2014-02-26 | 河北同光晶体有限公司 | 一种用于生长碳化硅晶体的坩埚 |
CN104882365A (zh) * | 2014-02-28 | 2015-09-02 | 中国科学院物理研究所 | 一种碳化硅表面处理方法 |
CN104882365B (zh) * | 2014-02-28 | 2017-11-14 | 中国科学院物理研究所 | 一种碳化硅表面处理方法 |
CN105040103A (zh) * | 2015-06-25 | 2015-11-11 | 江苏艾科勒科技有限公司 | 一种优质碳化硅晶体生长装置 |
CN110735183A (zh) * | 2018-07-18 | 2020-01-31 | 昭和电工株式会社 | 基座、SiC单晶的制造装置和制造方法 |
US11519096B2 (en) | 2018-07-18 | 2022-12-06 | Showa Denko K.K. | Pedestal for supporting a seed for SiC single crystal growth which includes a gas-permeable region of reduced thickness |
CN111188089A (zh) * | 2018-11-14 | 2020-05-22 | 昭和电工株式会社 | SiC单晶制造装置和SiC单晶的制造方法 |
CN111188089B (zh) * | 2018-11-14 | 2022-02-25 | 昭和电工株式会社 | SiC单晶制造装置和SiC单晶的制造方法 |
US11306412B2 (en) | 2018-11-14 | 2022-04-19 | Showa Denko K.K. | SiC single crystal manufacturing apparatus and SiC single crystal manufacturing method |
CN113774488A (zh) * | 2021-09-23 | 2021-12-10 | 安徽光智科技有限公司 | 碳化硅晶体的生长方法 |
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WO2010101200A1 (ja) | 2010-09-10 |
KR101243585B1 (ko) | 2013-03-20 |
US8936680B2 (en) | 2015-01-20 |
EP2405038A4 (en) | 2013-08-28 |
EP2405038A1 (en) | 2012-01-11 |
CN102308031B (zh) | 2014-05-07 |
JP2010202485A (ja) | 2010-09-16 |
US20110308449A1 (en) | 2011-12-22 |
EP2405038B1 (en) | 2014-09-03 |
JP4547031B2 (ja) | 2010-09-22 |
KR20110112410A (ko) | 2011-10-12 |
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