CN102301457B - 电浆蚀刻装置 - Google Patents

电浆蚀刻装置 Download PDF

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Publication number
CN102301457B
CN102301457B CN2009801552603A CN200980155260A CN102301457B CN 102301457 B CN102301457 B CN 102301457B CN 2009801552603 A CN2009801552603 A CN 2009801552603A CN 200980155260 A CN200980155260 A CN 200980155260A CN 102301457 B CN102301457 B CN 102301457B
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China
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mentioned
span
electricity
substrate
electric
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CN2009801552603A
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English (en)
Chinese (zh)
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CN102301457A (zh
Inventor
山本孝
野沢善幸
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Sumitomo Precision Products Co Ltd
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Sumitomo Precision Products Co Ltd
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Publication of CN102301457A publication Critical patent/CN102301457A/zh
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
  • Paper (AREA)
CN2009801552603A 2009-03-31 2009-12-10 电浆蚀刻装置 Active CN102301457B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009-084137 2009-03-31
JP2009084137A JP4977730B2 (ja) 2009-03-31 2009-03-31 プラズマエッチング装置
PCT/JP2009/070643 WO2010113358A1 (ja) 2009-03-31 2009-12-10 プラズマエッチング装置

Publications (2)

Publication Number Publication Date
CN102301457A CN102301457A (zh) 2011-12-28
CN102301457B true CN102301457B (zh) 2013-09-25

Family

ID=42827680

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009801552603A Active CN102301457B (zh) 2009-03-31 2009-12-10 电浆蚀刻装置

Country Status (7)

Country Link
US (1) US20120006490A1 (enExample)
EP (1) EP2416351B1 (enExample)
JP (1) JP4977730B2 (enExample)
KR (1) KR20120009419A (enExample)
CN (1) CN102301457B (enExample)
TW (1) TWI476829B (enExample)
WO (1) WO2010113358A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013028313A1 (en) * 2011-08-19 2013-02-28 Mattson Technology, Inc. High efficiency plasma source
JP5821039B2 (ja) * 2011-11-07 2015-11-24 パナソニックＩｐマネジメント株式会社 プラズマ処理装置
JP5485327B2 (ja) * 2012-04-16 2014-05-07 Ｓｐｐテクノロジーズ株式会社 プラズマ密度調整部材
US20150170883A1 (en) * 2012-09-27 2015-06-18 Spp Technologies Co., Ltd. Plasma Etching Device
GB201318249D0 (en) * 2013-10-15 2013-11-27 Spts Technologies Ltd Plasma etching apparatus
DE102014216195A1 (de) * 2014-08-14 2016-02-18 Robert Bosch Gmbh Vorrichtung zum anisotropen Ätzen eines Substrats und Verfahren zum Betreiben einer Vorrichtung zum anisotropen Ätzen eines Substrats
JP6444794B2 (ja) * 2015-03-30 2018-12-26 Ｓｐｐテクノロジーズ株式会社 半導体素子の製造方法及びその製造に用いられるプラズマエッチング装置
US11201036B2 (en) 2017-06-09 2021-12-14 Beijing E-Town Semiconductor Technology Co., Ltd Plasma strip tool with uniformity control
EP4200891A1 (en) 2020-08-28 2023-06-28 Mattson Technology, Inc. Plasma strip tool with movable insert

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001007083A (ja) * 1999-06-18 2001-01-12 Sony Corp プラズマ処理装置及び方法
EP1162646A3 (en) * 2000-06-06 2004-10-13 Matsushita Electric Works, Ltd. Plasma treatment apparatus and method
JP2005531125A (ja) * 2001-10-22 2005-10-13 ユナクシス・ユーエスエイ・インコーポレーテッド パルス化プラズマを使用したフォトマスク基板のエッチングのための方法及び装置
US20030092278A1 (en) * 2001-11-13 2003-05-15 Fink Steven T. Plasma baffle assembly
JP2004079465A (ja) * 2002-08-22 2004-03-11 Shimadzu Corp プラズマ生成装置およびプラズマ処理装置
JP3712125B2 (ja) * 2003-02-03 2005-11-02 東京応化工業株式会社 プラズマ処理装置
GB0323001D0 (en) * 2003-10-01 2003-11-05 Oxford Instr Plasma Technology Apparatus and method for plasma treating a substrate
JP4459877B2 (ja) 2004-08-12 2010-04-28 住友精密工業株式会社 エッチング方法及びエッチング装置
JP4578893B2 (ja) 2004-08-20 2010-11-10 住友精密工業株式会社 シリコン材のプラズマエッチング方法及びプラズマエッチング装置
KR100683174B1 (ko) * 2005-06-17 2007-02-15 삼성전자주식회사 플라즈마 가속장치 및 그것을 구비하는 플라즈마 처리시스템

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JP特开2001-7083A 2001.01.12
JP特开2004-241437A 2004.08.26

Also Published As

Publication number Publication date
US20120006490A1 (en) 2012-01-12
KR20120009419A (ko) 2012-01-31
TWI476829B (zh) 2015-03-11
TW201036061A (en) 2010-10-01
WO2010113358A1 (ja) 2010-10-07
EP2416351A4 (en) 2015-08-12
JP2010238847A (ja) 2010-10-21
JP4977730B2 (ja) 2012-07-18
EP2416351B1 (en) 2019-08-07
EP2416351A1 (en) 2012-02-08
CN102301457A (zh) 2011-12-28

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Owner name: SSP TECHNOLOGY A/S

Free format text: FORMER OWNER: SUMITOMO PRECISION SHANGHAI CO., LTD.

Effective date: 20120406

C41 Transfer of patent application or patent right or utility model
TA01 Transfer of patent application right

Effective date of registration: 20120406

Address after: Tokyo, Japan

Applicant after: Sumitomo Precision Products Co., Ltd.

Address before: Hyogo

Applicant before: Sumitomo Precision Products Co., Ltd.

C53 Correction of patent of invention or patent application
CB02 Change of applicant information

Address after: Japan Tokyo Chiyoda Otemachi a chome 3 No. 2 Keidanren hall 15 order

Applicant after: Sumitomo Precision Products Co., Ltd.

Address before: Tokyo, Japan

Applicant before: Sumitomo Precision Products Co., Ltd.

C14 Grant of patent or utility model
GR01 Patent grant