CN102301457A - 电浆蚀刻装置 - Google Patents
电浆蚀刻装置 Download PDFInfo
- Publication number
- CN102301457A CN102301457A CN2009801552603A CN200980155260A CN102301457A CN 102301457 A CN102301457 A CN 102301457A CN 2009801552603 A CN2009801552603 A CN 2009801552603A CN 200980155260 A CN200980155260 A CN 200980155260A CN 102301457 A CN102301457 A CN 102301457A
- Authority
- CN
- China
- Prior art keywords
- mentioned
- span
- substrate
- electricity
- electric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001020 plasma etching Methods 0.000 title 1
- 238000005530 etching Methods 0.000 claims abstract description 75
- 239000000758 substrate Substances 0.000 claims abstract description 64
- 239000004020 conductor Substances 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims abstract description 5
- 230000005611 electricity Effects 0.000 claims description 89
- 239000002002 slurry Substances 0.000 claims description 75
- 239000008358 core component Substances 0.000 claims description 14
- 239000012811 non-conductive material Substances 0.000 claims description 6
- 238000009955 starching Methods 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 abstract description 8
- 230000006866 deterioration Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 26
- 230000002093 peripheral effect Effects 0.000 description 12
- 230000006698 induction Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229920002472 Starch Polymers 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000006386 neutralization reaction Methods 0.000 description 2
- 235000019698 starch Nutrition 0.000 description 2
- 239000008107 starch Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 235000012489 doughnuts Nutrition 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Plasma Technology (AREA)
- Drying Of Semiconductors (AREA)
- Paper (AREA)
Abstract
Description
Claims (3)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009-084137 | 2009-03-31 | ||
JP2009084137A JP4977730B2 (ja) | 2009-03-31 | 2009-03-31 | プラズマエッチング装置 |
PCT/JP2009/070643 WO2010113358A1 (ja) | 2009-03-31 | 2009-12-10 | プラズマエッチング装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102301457A true CN102301457A (zh) | 2011-12-28 |
CN102301457B CN102301457B (zh) | 2013-09-25 |
Family
ID=42827680
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009801552603A Active CN102301457B (zh) | 2009-03-31 | 2009-12-10 | 电浆蚀刻装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20120006490A1 (zh) |
EP (1) | EP2416351B1 (zh) |
JP (1) | JP4977730B2 (zh) |
KR (1) | KR20120009419A (zh) |
CN (1) | CN102301457B (zh) |
TW (1) | TWI476829B (zh) |
WO (1) | WO2010113358A1 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104576281A (zh) * | 2013-10-15 | 2015-04-29 | Spts科技有限公司 | 等离子刻蚀设备 |
CN104871297A (zh) * | 2012-09-27 | 2015-08-26 | Spp科技股份有限公司 | 等离子蚀刻装置 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5989119B2 (ja) * | 2011-08-19 | 2016-09-07 | マットソン テクノロジー インコーポレイテッドMattson Technology, Inc. | プラズマリアクタ及びプラズマを生成する方法 |
JP5821039B2 (ja) * | 2011-11-07 | 2015-11-24 | パナソニックIpマネジメント株式会社 | プラズマ処理装置 |
JP5485327B2 (ja) * | 2012-04-16 | 2014-05-07 | Sppテクノロジーズ株式会社 | プラズマ密度調整部材 |
DE102014216195A1 (de) * | 2014-08-14 | 2016-02-18 | Robert Bosch Gmbh | Vorrichtung zum anisotropen Ätzen eines Substrats und Verfahren zum Betreiben einer Vorrichtung zum anisotropen Ätzen eines Substrats |
JP6444794B2 (ja) * | 2015-03-30 | 2018-12-26 | Sppテクノロジーズ株式会社 | 半導体素子の製造方法及びその製造に用いられるプラズマエッチング装置 |
US11201036B2 (en) | 2017-06-09 | 2021-12-14 | Beijing E-Town Semiconductor Technology Co., Ltd | Plasma strip tool with uniformity control |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001007083A (ja) * | 1999-06-18 | 2001-01-12 | Sony Corp | プラズマ処理装置及び方法 |
EP1162646A3 (en) * | 2000-06-06 | 2004-10-13 | Matsushita Electric Works, Ltd. | Plasma treatment apparatus and method |
EP1444726A4 (en) * | 2001-10-22 | 2008-08-13 | Unaxis Usa Inc | METHOD AND DEVICE FOR Etching PHOTOMASCIC SUBSTRATES USING PULSED PLASMA |
US20030092278A1 (en) * | 2001-11-13 | 2003-05-15 | Fink Steven T. | Plasma baffle assembly |
JP2004079465A (ja) * | 2002-08-22 | 2004-03-11 | Shimadzu Corp | プラズマ生成装置およびプラズマ処理装置 |
JP3712125B2 (ja) * | 2003-02-03 | 2005-11-02 | 東京応化工業株式会社 | プラズマ処理装置 |
GB0323001D0 (en) * | 2003-10-01 | 2003-11-05 | Oxford Instr Plasma Technology | Apparatus and method for plasma treating a substrate |
JP4459877B2 (ja) | 2004-08-12 | 2010-04-28 | 住友精密工業株式会社 | エッチング方法及びエッチング装置 |
JP4578893B2 (ja) | 2004-08-20 | 2010-11-10 | 住友精密工業株式会社 | シリコン材のプラズマエッチング方法及びプラズマエッチング装置 |
KR100683174B1 (ko) * | 2005-06-17 | 2007-02-15 | 삼성전자주식회사 | 플라즈마 가속장치 및 그것을 구비하는 플라즈마 처리시스템 |
-
2009
- 2009-03-31 JP JP2009084137A patent/JP4977730B2/ja active Active
- 2009-12-10 CN CN2009801552603A patent/CN102301457B/zh active Active
- 2009-12-10 KR KR1020117015433A patent/KR20120009419A/ko not_active Application Discontinuation
- 2009-12-10 WO PCT/JP2009/070643 patent/WO2010113358A1/ja active Application Filing
- 2009-12-10 US US13/145,228 patent/US20120006490A1/en not_active Abandoned
- 2009-12-10 EP EP09842709.9A patent/EP2416351B1/en active Active
- 2009-12-16 TW TW098143187A patent/TWI476829B/zh active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104871297A (zh) * | 2012-09-27 | 2015-08-26 | Spp科技股份有限公司 | 等离子蚀刻装置 |
CN104871297B (zh) * | 2012-09-27 | 2017-07-18 | Spp科技股份有限公司 | 等离子蚀刻装置 |
CN104576281A (zh) * | 2013-10-15 | 2015-04-29 | Spts科技有限公司 | 等离子刻蚀设备 |
CN104576281B (zh) * | 2013-10-15 | 2020-05-08 | Spts科技有限公司 | 等离子刻蚀设备 |
Also Published As
Publication number | Publication date |
---|---|
JP2010238847A (ja) | 2010-10-21 |
CN102301457B (zh) | 2013-09-25 |
US20120006490A1 (en) | 2012-01-12 |
KR20120009419A (ko) | 2012-01-31 |
EP2416351A1 (en) | 2012-02-08 |
TW201036061A (en) | 2010-10-01 |
EP2416351B1 (en) | 2019-08-07 |
TWI476829B (zh) | 2015-03-11 |
WO2010113358A1 (ja) | 2010-10-07 |
JP4977730B2 (ja) | 2012-07-18 |
EP2416351A4 (en) | 2015-08-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: SSP TECHNOLOGY A/S Free format text: FORMER OWNER: SUMITOMO PRECISION SHANGHAI CO., LTD. Effective date: 20120406 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20120406 Address after: Tokyo, Japan Applicant after: Sumitomo Precision Products Co., Ltd. Address before: Hyogo Applicant before: Sumitomo Precision Products Co., Ltd. |
|
C53 | Correction of patent of invention or patent application | ||
CB02 | Change of applicant information |
Address after: Japan Tokyo Chiyoda Otemachi a chome 3 No. 2 Keidanren hall 15 order Applicant after: Sumitomo Precision Products Co., Ltd. Address before: Tokyo, Japan Applicant before: Sumitomo Precision Products Co., Ltd. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant |