CN102294854B - 硬质涂层及其制备方法及具有该涂层的被覆件 - Google Patents
硬质涂层及其制备方法及具有该涂层的被覆件 Download PDFInfo
- Publication number
- CN102294854B CN102294854B CN201010208726.6A CN201010208726A CN102294854B CN 102294854 B CN102294854 B CN 102294854B CN 201010208726 A CN201010208726 A CN 201010208726A CN 102294854 B CN102294854 B CN 102294854B
- Authority
- CN
- China
- Prior art keywords
- atomic percentage
- percentage conc
- intermediate layer
- conc
- hard coat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000002360 preparation method Methods 0.000 title claims abstract description 11
- 238000000576 coating method Methods 0.000 title abstract description 24
- 239000011248 coating agent Substances 0.000 title abstract description 22
- 230000007704 transition Effects 0.000 claims abstract description 34
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 239000010955 niobium Substances 0.000 claims description 51
- 239000010936 titanium Substances 0.000 claims description 45
- 229910052757 nitrogen Inorganic materials 0.000 claims description 34
- 229910052710 silicon Inorganic materials 0.000 claims description 34
- 229910052758 niobium Inorganic materials 0.000 claims description 31
- 239000011159 matrix material Substances 0.000 claims description 26
- 229910052719 titanium Inorganic materials 0.000 claims description 20
- RJSRQTFBFAJJIL-UHFFFAOYSA-N niobium titanium Chemical compound [Ti].[Nb] RJSRQTFBFAJJIL-UHFFFAOYSA-N 0.000 claims description 19
- 239000000470 constituent Substances 0.000 claims description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 16
- 229910001257 Nb alloy Inorganic materials 0.000 claims description 15
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 14
- 239000010703 silicon Substances 0.000 claims description 14
- 230000001105 regulatory effect Effects 0.000 claims description 12
- 238000007733 ion plating Methods 0.000 claims description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 10
- 239000007789 gas Substances 0.000 claims description 8
- 238000005520 cutting process Methods 0.000 claims description 7
- 229910000997 High-speed steel Inorganic materials 0.000 claims description 6
- 229910045601 alloy Inorganic materials 0.000 claims description 6
- 239000000956 alloy Substances 0.000 claims description 6
- 238000004062 sedimentation Methods 0.000 claims description 6
- 229910052786 argon Inorganic materials 0.000 claims description 5
- 238000007747 plating Methods 0.000 claims description 5
- 239000011195 cermet Substances 0.000 claims description 4
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 4
- 229910003460 diamond Inorganic materials 0.000 claims description 3
- 239000010432 diamond Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 229910010037 TiAlN Inorganic materials 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000001050 lubricating effect Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000003026 anti-oxygenic effect Effects 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 235000006708 antioxidants Nutrition 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/027—Graded interfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C14/00—Alloys based on titanium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
Description
Claims (11)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201010208726.6A CN102294854B (zh) | 2010-06-24 | 2010-06-24 | 硬质涂层及其制备方法及具有该涂层的被覆件 |
US13/074,108 US20110318558A1 (en) | 2010-06-24 | 2011-03-29 | Coating, article coated with coating, and method for manufacturing article |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201010208726.6A CN102294854B (zh) | 2010-06-24 | 2010-06-24 | 硬质涂层及其制备方法及具有该涂层的被覆件 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102294854A CN102294854A (zh) | 2011-12-28 |
CN102294854B true CN102294854B (zh) | 2014-07-09 |
Family
ID=45352832
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201010208726.6A Expired - Fee Related CN102294854B (zh) | 2010-06-24 | 2010-06-24 | 硬质涂层及其制备方法及具有该涂层的被覆件 |
Country Status (2)
Country | Link |
---|---|
US (1) | US20110318558A1 (zh) |
CN (1) | CN102294854B (zh) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103572219A (zh) * | 2013-10-28 | 2014-02-12 | 沈阳大学 | 一种氮化铬钛铌氮梯度硬质反应膜的制备方法 |
RU2553766C1 (ru) * | 2013-12-03 | 2015-06-20 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" | Способ получения многослойного покрытия для режущего инструмента |
RU2554268C1 (ru) * | 2013-12-03 | 2015-06-27 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" | Способ получения многослойного покрытия для режущего инструмента |
RU2553777C1 (ru) * | 2013-12-03 | 2015-06-20 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" | Способ получения многослойного покрытия для режущего инструмента |
DE102014206151A1 (de) * | 2014-04-01 | 2015-10-01 | Waldemar Link Gmbh & Co. Kg | Implantatverbindung |
WO2016013645A1 (ja) * | 2014-07-25 | 2016-01-28 | 株式会社タンガロイ | 被覆切削工具 |
CN107442777B (zh) * | 2017-07-24 | 2019-05-14 | 中南钻石有限公司 | 一种潜孔钻用聚晶金刚石复合球齿及其制备方法 |
CN114001142B (zh) * | 2021-10-26 | 2024-01-02 | 东风商用车有限公司 | 一种具有低传动噪声的高负载齿轮及其制备方法 |
CN114411098A (zh) * | 2021-12-21 | 2022-04-29 | 嘉兴岱源真空科技有限公司 | 一种TiNb涂层的镀膜方法 |
CN115961240B (zh) * | 2022-06-14 | 2023-12-12 | 广东华升纳米科技股份有限公司 | 一种涂层及其制备方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1710144A (zh) * | 2004-06-18 | 2005-12-21 | 日立工具股份有限公司 | 硬质保护膜及其制造方法 |
CN1853831A (zh) * | 2005-04-18 | 2006-11-01 | 山特维克知识产权股份有限公司 | 涂层刀片 |
CN101512035A (zh) * | 2006-09-06 | 2009-08-19 | 山特维克知识产权股份有限公司 | 涂层钻及制造该涂层钻的方法 |
EP1801260B1 (en) * | 2005-12-22 | 2011-02-16 | Mitsubishi Materials Corporation | Cutting tool made of surface-coated cubic boron nitride-based ultrahigh pressure sintered material |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4018480B2 (ja) * | 2002-08-20 | 2007-12-05 | 住友電工ハードメタル株式会社 | 被覆硬質工具 |
JP2005290536A (ja) * | 2004-03-31 | 2005-10-20 | Chiyoda Daiichi Kogyo Kk | 基材のコーティング方法およびコーティング構造 |
SE529223C2 (sv) * | 2005-05-06 | 2007-06-05 | Seco Tools Ab | Belagt skärverktyg innefattande hexagonal h-(Mel,Me2)Xfas |
-
2010
- 2010-06-24 CN CN201010208726.6A patent/CN102294854B/zh not_active Expired - Fee Related
-
2011
- 2011-03-29 US US13/074,108 patent/US20110318558A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1710144A (zh) * | 2004-06-18 | 2005-12-21 | 日立工具股份有限公司 | 硬质保护膜及其制造方法 |
CN1853831A (zh) * | 2005-04-18 | 2006-11-01 | 山特维克知识产权股份有限公司 | 涂层刀片 |
EP1801260B1 (en) * | 2005-12-22 | 2011-02-16 | Mitsubishi Materials Corporation | Cutting tool made of surface-coated cubic boron nitride-based ultrahigh pressure sintered material |
CN101512035A (zh) * | 2006-09-06 | 2009-08-19 | 山特维克知识产权股份有限公司 | 涂层钻及制造该涂层钻的方法 |
Non-Patent Citations (1)
Title |
---|
JP特开2005-290536A 2005.10.20 |
Also Published As
Publication number | Publication date |
---|---|
US20110318558A1 (en) | 2011-12-29 |
CN102294854A (zh) | 2011-12-28 |
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C06 | Publication | ||
PB01 | Publication | ||
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SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: HONGFUJIN PRECISION ELECTRONICS (ZHENGZHOU) CO., L Free format text: FORMER OWNER: HONGFUJIN PRECISE INDUSTRY (SHENZHEN) CO., LTD. Effective date: 20150225 |
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C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 518109 SHENZHEN, GUANGDONG PROVINCE TO: 450000 ZHENGZHOU, HENAN PROVINCE |
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TR01 | Transfer of patent right |
Effective date of registration: 20150225 Address after: 450000 Comprehensive Bonded Zone on the east side of Zhenxing Road, Zhengzhou, Henan Patentee after: HONGFUJIN PRECISION ELECTRONICS (ZHENGZHOU) CO., LTD. Patentee after: Hon Hai Precision Industry Co., Ltd. Address before: 518109 Guangdong city of Shenzhen province Baoan District Longhua Town Industrial Zone tabulaeformis tenth East Ring Road No. 2 two Patentee before: Hongfujin Precise Industry (Shenzhen) Co., Ltd. Patentee before: Hon Hai Precision Industry Co., Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140709 Termination date: 20190624 |
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CF01 | Termination of patent right due to non-payment of annual fee |