CN102294758B - 冷却介质回收方法 - Google Patents
冷却介质回收方法 Download PDFInfo
- Publication number
- CN102294758B CN102294758B CN201110172424.2A CN201110172424A CN102294758B CN 102294758 B CN102294758 B CN 102294758B CN 201110172424 A CN201110172424 A CN 201110172424A CN 102294758 B CN102294758 B CN 102294758B
- Authority
- CN
- China
- Prior art keywords
- cooling medium
- filtration
- tackifier
- membrane
- recovery method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000002826 coolant Substances 0.000 title claims abstract description 81
- 238000000034 method Methods 0.000 title claims abstract description 22
- 238000011084 recovery Methods 0.000 title claims description 16
- 239000012528 membrane Substances 0.000 claims abstract description 52
- 238000001914 filtration Methods 0.000 claims abstract description 39
- 239000000919 ceramic Substances 0.000 claims abstract description 31
- 238000005520 cutting process Methods 0.000 claims abstract description 25
- 238000011001 backwashing Methods 0.000 claims abstract description 15
- 238000005352 clarification Methods 0.000 claims abstract description 11
- 238000009295 crossflow filtration Methods 0.000 claims abstract description 10
- 230000001629 suppression Effects 0.000 claims abstract description 3
- 238000009826 distribution Methods 0.000 claims description 4
- 239000002202 Polyethylene glycol Substances 0.000 claims description 3
- 229920001223 polyethylene glycol Polymers 0.000 claims description 3
- 238000007599 discharging Methods 0.000 abstract description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 18
- 229910052710 silicon Inorganic materials 0.000 description 18
- 239000010703 silicon Substances 0.000 description 18
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 229910000831 Steel Inorganic materials 0.000 description 5
- 239000003082 abrasive agent Substances 0.000 description 5
- 239000010959 steel Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- 239000012809 cooling fluid Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000000706 filtrate Substances 0.000 description 2
- 235000013312 flour Nutrition 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 206010059866 Drug resistance Diseases 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000000892 gravimetry Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010-144448 | 2010-06-25 | ||
| JP2010144448A JP5640260B2 (ja) | 2010-06-25 | 2010-06-25 | クーラント回収方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102294758A CN102294758A (zh) | 2011-12-28 |
| CN102294758B true CN102294758B (zh) | 2015-08-05 |
Family
ID=45355551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110172424.2A Active CN102294758B (zh) | 2010-06-25 | 2011-06-23 | 冷却介质回收方法 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5640260B2 (enExample) |
| KR (1) | KR101799598B1 (enExample) |
| CN (1) | CN102294758B (enExample) |
| TW (1) | TWI501838B (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013248707A (ja) * | 2012-05-31 | 2013-12-12 | Panasonic Corp | クーラント廃液の再生方法、クーラント廃液の処理方法、クーラント廃液の処理システム、及び再生クーラント液の製造方法 |
| JP6331474B2 (ja) * | 2014-02-28 | 2018-05-30 | ブラザー工業株式会社 | 工作機械の洗浄液濾過装置 |
| CN105174522B (zh) * | 2015-10-09 | 2017-11-17 | 浙江瑞翌新材料科技股份有限公司 | 一种金刚线切割废冷却液的回收方法及系统 |
| CN117774150A (zh) * | 2022-09-22 | 2024-03-29 | 内蒙古中环光伏材料有限公司 | 一种去除硅单晶金刚线切片用冷却液中硅粉的方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1176864A (zh) * | 1996-07-29 | 1998-03-25 | 集成工艺设备有限公司 | 化学－机械研磨设备中的浆料再循环 |
| US6422067B1 (en) * | 1999-04-26 | 2002-07-23 | Super Silicon Crystal Research Institute Corporation | Slurry useful for wire-saw slicing and evaluation of slurry |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3249373B2 (ja) * | 1996-02-21 | 2002-01-21 | 信越半導体株式会社 | 水溶性スラリー廃液の再利用システム |
| JP3816200B2 (ja) * | 1997-07-18 | 2006-08-30 | 東芝セラミックス株式会社 | 微細粒子を含む液体の処理方法および処理装置 |
| JP3314921B2 (ja) * | 1999-06-08 | 2002-08-19 | 三菱住友シリコン株式会社 | 半導体材料の切断・加工方法 |
| JP4369054B2 (ja) * | 1999-07-01 | 2009-11-18 | エムイーエムシー・エレクトロニック・マテリアルズ・ソシエタ・ペル・アチオニ | 使用済グリコール系スラリーの分離、再生および再使用法 |
| JP4609675B2 (ja) * | 2007-08-16 | 2011-01-12 | オルガノ株式会社 | メタル研磨ｃｍｐ工程排水処理装置及び方法 |
| JP5173945B2 (ja) * | 2008-07-02 | 2013-04-03 | シャープ株式会社 | クーラント再生方法およびスラリー再生方法 |
| US8960177B2 (en) * | 2008-12-20 | 2015-02-24 | Cabot Microelectronics Corporation | Wiresaw cutting method |
-
2010
- 2010-06-25 JP JP2010144448A patent/JP5640260B2/ja active Active
-
2011
- 2011-06-14 TW TW100120660A patent/TWI501838B/zh active
- 2011-06-15 KR KR1020110058125A patent/KR101799598B1/ko active Active
- 2011-06-23 CN CN201110172424.2A patent/CN102294758B/zh active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1176864A (zh) * | 1996-07-29 | 1998-03-25 | 集成工艺设备有限公司 | 化学－机械研磨设备中的浆料再循环 |
| US6422067B1 (en) * | 1999-04-26 | 2002-07-23 | Super Silicon Crystal Research Institute Corporation | Slurry useful for wire-saw slicing and evaluation of slurry |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102294758A (zh) | 2011-12-28 |
| JP2012006115A (ja) | 2012-01-12 |
| TW201208814A (en) | 2012-03-01 |
| KR101799598B1 (ko) | 2017-11-20 |
| KR20120000502A (ko) | 2012-01-02 |
| JP5640260B2 (ja) | 2014-12-17 |
| TWI501838B (zh) | 2015-10-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101659794B (zh) | 一种膜分离纯化技术提取高纯度栀子黄色素工艺 | |
| CN101474511A (zh) | 一种硅晶圆线切割废砂浆中聚乙二醇和碳化硅的回收方法 | |
| CN102294758B (zh) | 冷却介质回收方法 | |
| JPH07238102A (ja) | 脱蛋白天然ゴムラテックス及びその製造方法 | |
| KR101333966B1 (ko) | 멤브레인공정을 이용한 반도체 및 태양전지용 웨이퍼 폐슬러리중 절삭액의 고효율 재생방법 및 재생시스템 | |
| KR101250376B1 (ko) | 원심분리 및 멤브레인을 이용한 태양전지용 웨이퍼 폐슬러리의 고효율 재생방법 및 재생시스템 | |
| CN103347656A (zh) | 研磨剂的回收方法和研磨剂的回收装置 | |
| KR101323765B1 (ko) | 실리콘입자의 처리방법 및 장치 | |
| CN105174522B (zh) | 一种金刚线切割废冷却液的回收方法及系统 | |
| CN215527793U (zh) | 一种含石蜡油的锂离子电池pe隔膜的分离和回收装置 | |
| CN104603064A (zh) | 造水方法 | |
| CN101333015B (zh) | 制程排放水的回收系统及方法 | |
| CN113428871B (zh) | 一种钛硅分子筛的分离纯化方法及分离纯化系统 | |
| JP2013237130A (ja) | クーラントを回収する方法 | |
| JP2020146645A (ja) | 有価物を含む流体を分離精製する方法 | |
| CN107827738A (zh) | 一种从迷迭香提取物中分离鼠尾草酸的方法 | |
| CN202181290U (zh) | 一种采用膜过滤二段分离方式的废砂浆在线回收设备 | |
| CN215195825U (zh) | 一种化学合成物纯化分离装置 | |
| CN220495735U (zh) | Nmp循环溶剂除杂装置 | |
| KR101673475B1 (ko) | 산화세륨 연마재의 재생 방법 | |
| TWI432569B (zh) | Silicon crystal cutting fluid recovery method | |
| CN215692389U (zh) | 过滤装置 | |
| KR101408245B1 (ko) | 폐오일 여과 시스템 클리닝 방법 | |
| CN103443064B (zh) | 精制对苯二甲酸母液的处理方法 | |
| CN203200231U (zh) | 一种分离机加膜过滤并能除水的硅片切割废砂浆回收设备 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |