CN102292475B - 用于生产硅细棒的方法和设备 - Google Patents

用于生产硅细棒的方法和设备 Download PDF

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CN102292475B
CN102292475B CN201080004883.3A CN201080004883A CN102292475B CN 102292475 B CN102292475 B CN 102292475B CN 201080004883 A CN201080004883 A CN 201080004883A CN 102292475 B CN102292475 B CN 102292475B
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China
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silicon
rod
lift
thin
induction coil
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CN102292475A (zh
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H·里曼
F-W·舒尔策
J·菲舍尔
M·伦纳
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PV SILICON FORSCHUNGS und PROD
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PV SILICON FORSCHUNGS und PROD
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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/005—Simultaneous pulling of more than one crystal
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1004—Apparatus with means for measuring, testing, or sensing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1004—Apparatus with means for measuring, testing, or sensing
    • Y10T117/1008—Apparatus with means for measuring, testing, or sensing with responsive control means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1068—Seed pulling including heating or cooling details [e.g., shield configuration]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/1088—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone including heating or cooling details

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Silicon Compounds (AREA)
CN201080004883.3A 2009-01-21 2010-01-19 用于生产硅细棒的方法和设备 Active CN102292475B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102009005837.0 2009-01-21
DE102009005837A DE102009005837B4 (de) 2009-01-21 2009-01-21 Verfahren und Vorrichtung zur Herstellung von Siliziumdünnstäben
PCT/DE2010/000070 WO2010083818A1 (de) 2009-01-21 2010-01-19 Verfahren und vorrichtung zur herstellung von siliziumdünnstäben

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CN102292475A CN102292475A (zh) 2011-12-21
CN102292475B true CN102292475B (zh) 2014-05-28

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US (1) US8197595B2 (enExample)
EP (1) EP2379783B1 (enExample)
JP (1) JP5559203B2 (enExample)
CN (1) CN102292475B (enExample)
DE (1) DE102009005837B4 (enExample)
DK (1) DK2379783T3 (enExample)
WO (1) WO2010083818A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103781587B (zh) * 2011-07-29 2016-09-07 Ats自动化加工系统公司 用于生产硅细棒的系统和方法
RU2507318C1 (ru) * 2012-08-14 2014-02-20 Закрытое Акционерное Общество "Валенсия" Способ получения кремниевых филаментов произвольного сечения (варианты)
CN103147118B (zh) * 2013-02-25 2016-03-30 天津市环欧半导体材料技术有限公司 一种利用直拉区熔法制备太阳能级硅单晶的方法
CN103993352A (zh) * 2014-04-18 2014-08-20 洛阳金诺机械工程有限公司 一种使籽晶转动的硅芯拉制方法
CN105274616B (zh) * 2014-06-18 2018-03-09 四川永祥多晶硅有限公司 一种提高硅芯母料利用率的方法
KR101611053B1 (ko) * 2014-06-27 2016-04-11 오씨아이 주식회사 폴리실리콘 절편을 이용한 폴리실리콘 필라멘트 접합장치
CN104264221A (zh) * 2014-09-10 2015-01-07 河南协鑫光伏科技有限公司 一种生产原生多晶硅用方型硅芯材料及制备方法
DE102014226419A1 (de) * 2014-12-18 2016-06-23 Siltronic Ag Verfahren zum Züchten eines Einkristalls durch Kristallisieren des Einkristalls aus einer Fließzone
CN106757310A (zh) * 2016-12-19 2017-05-31 洛阳金诺机械工程有限公司 一种硅芯拉制装置
CN109576778A (zh) * 2018-12-25 2019-04-05 内蒙古中环光伏材料有限公司 一种降低cz法制备单晶的杂质含量的方法
CN114455587B (zh) * 2022-01-26 2023-07-21 何良雨 一种高纯多晶硅生产装置和方法
WO2025060333A1 (zh) * 2023-09-22 2025-03-27 洛阳长缨新能源科技有限公司 多圈籽晶差动升降装置及使多圈籽晶差动升降的方法

Citations (4)

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DE2952602A1 (de) * 1979-12-28 1981-07-02 Siemens AG, 1000 Berlin und 8000 München Verfahren und vorrichtung zum herstellen von silicium-duennstaeben
CN1544713A (zh) * 2003-11-14 2004-11-10 中国科学院物理研究所 一种碳化硅晶体生长装置
CN1748049A (zh) * 2003-02-11 2006-03-15 托普西尔半导体原料公司 用于制造单晶棒的设备和方法
CN101006205A (zh) * 2004-06-18 2007-07-25 Memc电子材料有限公司 向晶体形成装置装载熔融源材料的熔化器组件和方法

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DE1544301A1 (de) * 1966-09-28 1970-05-27 Siemens Ag Verfahren zum tiegelfreien Zonenschmelzen eines kristallinen Stabes,insbesondere Halbleiterstabes
DE2458490A1 (de) 1974-12-10 1976-06-16 Siemens Ag Verfahren zum herstellen eines siliciumhalbleiterkristallstabes durch tiegelfreies zonenschmelzen
US4220839A (en) * 1978-01-05 1980-09-02 Topsil A/S Induction heating coil for float zone melting of semiconductor rods
DD141536A1 (de) * 1979-01-22 1980-05-07 Dietmar Taenzer Verfahren zur herstellung kristalliner staebchen aus einer schmelze
DD226599B1 (de) * 1984-09-10 1990-10-10 Spurenmetalle Freiberg Veb Kom Vorrichtung zur herstellung von silizium-duennstaeben
DE102005063346B4 (de) 2005-04-06 2010-10-28 Pv Silicon Forschungs Und Produktions Gmbh Verfahren zur Herstellung einer einkristallinen Si-Scheibe mit annähernd rundem polygonalem Querschnitt
US20110204044A1 (en) * 2008-11-25 2011-08-25 Chaoxuan Liu High-frequency coil pulling holes arrangement for producing multiple silicon cores
WO2010060349A1 (zh) 2008-11-25 2010-06-03 Liu Chaoxuan 制造多根硅芯的高频线圈拉制孔布局

Patent Citations (4)

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Publication number Priority date Publication date Assignee Title
DE2952602A1 (de) * 1979-12-28 1981-07-02 Siemens AG, 1000 Berlin und 8000 München Verfahren und vorrichtung zum herstellen von silicium-duennstaeben
CN1748049A (zh) * 2003-02-11 2006-03-15 托普西尔半导体原料公司 用于制造单晶棒的设备和方法
CN1544713A (zh) * 2003-11-14 2004-11-10 中国科学院物理研究所 一种碳化硅晶体生长装置
CN101006205A (zh) * 2004-06-18 2007-07-25 Memc电子材料有限公司 向晶体形成装置装载熔融源材料的熔化器组件和方法

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DE102009005837A1 (de) 2010-07-22
EP2379783B1 (de) 2014-05-28
JP5559203B2 (ja) 2014-07-23
CN102292475A (zh) 2011-12-21
US8197595B2 (en) 2012-06-12
WO2010083818A1 (de) 2010-07-29
JP2012515698A (ja) 2012-07-12
EP2379783A1 (de) 2011-10-26
DE102009005837B4 (de) 2011-10-06
DK2379783T3 (da) 2014-09-08
US20110314869A1 (en) 2011-12-29

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