CN102233729B - 液体喷射头、液体喷射装置以及压电元件 - Google Patents

液体喷射头、液体喷射装置以及压电元件 Download PDF

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Publication number
CN102233729B
CN102233729B CN201110087450.5A CN201110087450A CN102233729B CN 102233729 B CN102233729 B CN 102233729B CN 201110087450 A CN201110087450 A CN 201110087450A CN 102233729 B CN102233729 B CN 102233729B
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CN
China
Prior art keywords
mol
piezoelectric layer
piezoelectric
layer
titanate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201110087450.5A
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English (en)
Chinese (zh)
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CN102233729A (zh
Inventor
酒井朋裕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN102233729A publication Critical patent/CN102233729A/zh
Application granted granted Critical
Publication of CN102233729B publication Critical patent/CN102233729B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8561—Bismuth-based oxides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Coating Apparatus (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Semiconductor Memories (AREA)
CN201110087450.5A 2010-04-14 2011-04-06 液体喷射头、液体喷射装置以及压电元件 Expired - Fee Related CN102233729B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010-092907 2010-04-14
JP2010092907A JP5585768B2 (ja) 2010-04-14 2010-04-14 液体噴射ヘッド、液体噴射装置および圧電素子

Publications (2)

Publication Number Publication Date
CN102233729A CN102233729A (zh) 2011-11-09
CN102233729B true CN102233729B (zh) 2014-07-09

Family

ID=44787916

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201110087450.5A Expired - Fee Related CN102233729B (zh) 2010-04-14 2011-04-06 液体喷射头、液体喷射装置以及压电元件

Country Status (3)

Country Link
US (1) US8636342B2 (https=)
JP (1) JP5585768B2 (https=)
CN (1) CN102233729B (https=)

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JP2010150126A (ja) * 2008-11-18 2010-07-08 Ngk Insulators Ltd 圧電／電歪セラミックス組成物、圧電／電歪セラミックスの焼結体、圧電／電歪素子、圧電／電歪セラミックス組成物の製造方法及び圧電／電歪素子の製造方法
JP6329130B2 (ja) 2012-04-10 2018-05-30 アイノビア，インコーポレイティド 噴霧エジェクタ機構、電荷分離及び制御可能な液滴電荷を提供する装置、並びに低投与量の点眼
EP2838669B1 (en) * 2012-04-20 2018-01-03 Eyenovia, Inc. Spray ejector device and methods of use
WO2013173321A1 (en) 2012-05-14 2013-11-21 Corinthian Ophthalmic, Inc. Laminar flow droplet generator device and methods of use
EA201492094A1 (ru) 2012-05-15 2015-04-30 Айновиа, Инк. Эжекторные устройства, способы, возбудители и схемы для них
US9343650B2 (en) * 2013-03-29 2016-05-17 Fuji Chemical Co., Ltd. Piezoelectric material, piezoelectric element, multilayered piezoelectric element, liquid ejection head, liquid ejection apparatus, ultrasonic motor, optical equipment, vibration apparatus, dust removing apparatus, imaging apparatus, and electronic equipment
JP6349738B2 (ja) * 2013-03-29 2018-07-04 Tdk株式会社 圧電組成物および圧電素子
JP5761540B2 (ja) 2013-06-28 2015-08-12 セイコーエプソン株式会社 圧電材料、圧電素子、液体噴射ヘッド、液体噴射装置、超音波センサー、圧電モーター及び発電装置
JP2015038953A (ja) 2013-06-28 2015-02-26 セイコーエプソン株式会社 圧電材料、圧電素子、液体噴射ヘッド、液体噴射装置、超音波センサー、圧電モーター及び発電装置
JP5754660B2 (ja) 2013-06-28 2015-07-29 セイコーエプソン株式会社 圧電材料、圧電素子、液体噴射ヘッド、液体噴射装置、超音波センサー、圧電モーター及び発電装置
JP6398771B2 (ja) * 2014-03-31 2018-10-03 Tdk株式会社 圧電組成物および圧電素子
CN104496468A (zh) * 2014-11-27 2015-04-08 济南大学 一种降低钛酸铋钠基薄膜矫顽场及提高其耐压性的方法
EP3240055B1 (en) * 2014-12-26 2021-06-23 Seiko Epson Corporation Piezoelectric material and method for producing same, piezoelectric element, and device using piezoelectric element
WO2016103515A1 (ja) * 2014-12-26 2016-06-30 セイコーエプソン株式会社 圧電材料の製造方法、並びにこれにより製造された圧電材料を用いた圧電素子、及び圧電素子応用デバイス
JP6375955B2 (ja) * 2015-01-08 2018-08-22 Tdk株式会社 圧電組成物および圧電素子

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1745486A (zh) * 2003-01-31 2006-03-08 佳能株式会社 压电元件
CN1911665A (zh) * 2005-08-09 2007-02-14 精工爱普生株式会社 致动器装置及其制造方法、液体喷射头以及液体喷射装置
WO2009119322A1 (ja) * 2008-03-26 2009-10-01 Tdk株式会社 圧電磁器及び圧電磁器組成物
CN101638004A (zh) * 2008-07-28 2010-02-03 精工爱普生株式会社 液体喷射头和液体喷射装置及压电元件

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CN85100513B (zh) * 1985-04-01 1987-08-19 中国科学院上海硅酸盐研究所 钛酸铋钠钡系超声用压电陶瓷材料
JP4748291B2 (ja) * 2001-01-10 2011-08-17 Ｔｄｋ株式会社 積層体変位素子
JP4708667B2 (ja) * 2002-08-08 2011-06-22 キヤノン株式会社 アクチュエータおよび液体噴射ヘッド
JP4165347B2 (ja) * 2003-06-25 2008-10-15 セイコーエプソン株式会社 圧電素子の製造方法
JP3994163B2 (ja) 2003-09-26 2007-10-17 独立行政法人物質・材料研究機構 Ｎｂｔ強誘電体薄膜の製造方法
JP5127268B2 (ja) * 2007-03-02 2013-01-23 キヤノン株式会社 圧電体、圧電体素子、圧電体素子を用いた液体吐出ヘッド及び液体吐出装置
JP4973931B2 (ja) * 2007-03-27 2012-07-11 Ｔｄｋ株式会社 圧電磁器組成物
JP5253894B2 (ja) * 2007-06-08 2013-07-31 富士フイルム株式会社 強誘電体膜、圧電素子、及び液体吐出装置
JP5345868B2 (ja) * 2008-03-31 2013-11-20 富士フイルム株式会社 ペロブスカイト型酸化物膜、強誘電体、圧電素子、液体吐出装置
JP5394765B2 (ja) * 2008-03-31 2014-01-22 富士フイルム株式会社 ペロブスカイト型酸化物膜、強誘電体、圧電素子、液体吐出装置
JP5248168B2 (ja) * 2008-04-01 2013-07-31 セイコーエプソン株式会社 圧電材料および圧電素子
CN101798214A (zh) * 2010-03-03 2010-08-11 天津大学 (Na1/2Bi1/2)TiO3/BaTiO3陶瓷介质材料及其电容器的制备方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1745486A (zh) * 2003-01-31 2006-03-08 佳能株式会社 压电元件
CN1911665A (zh) * 2005-08-09 2007-02-14 精工爱普生株式会社 致动器装置及其制造方法、液体喷射头以及液体喷射装置
WO2009119322A1 (ja) * 2008-03-26 2009-10-01 Tdk株式会社 圧電磁器及び圧電磁器組成物
CN101638004A (zh) * 2008-07-28 2010-02-03 精工爱普生株式会社 液体喷射头和液体喷射装置及压电元件

Also Published As

Publication number Publication date
US20110254901A1 (en) 2011-10-20
US8636342B2 (en) 2014-01-28
JP5585768B2 (ja) 2014-09-10
JP2011222884A (ja) 2011-11-04
CN102233729A (zh) 2011-11-09

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Granted publication date: 20140709