WO2009119322A1 - 圧電磁器及び圧電磁器組成物 - Google Patents
圧電磁器及び圧電磁器組成物 Download PDFInfo
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Abstract
Description
0.80≦x≦0.96・・・(2)
0.02≦y≦0.08・・・(3)
0.01≦z≦0.15・・・(4)
x+y+z=1・・・・・・・(5)
0.01≦z≦0.12・・・(6)
上記一般式(1)におけるzの範囲を上記式(6)の範囲にすることによって、一層高い温度領域で優れた圧電特性を有する圧電磁器とすることができる。
図1は、本発明の圧電磁器の好適な一実施形態を示す斜視図である。圧電磁器10は、主成分として、下記一般式(1)で表される、菱面晶組成である3成分系の固溶体を含有する。
0.02≦y≦0.08・・・(3)
0.01≦z≦0.15・・・(4)
x+y+z=1・・・・・・・(5)
本実施形態の圧電磁器組成物は、上述の圧電磁器10と同様の主成分を含有する。すなわち、上記一般式(1)で表される3成分系の固溶体を主成分として含有する。また、圧電磁器10と同様に、Mn元素を副成分として含有することが好ましい。圧電磁器組成物は、例えば、平均粒径0.3~3.0μmの粉体であってもよく、凝集物であってもよい。凝集物は、公知の方法で粉砕することによって、粉体にすることができる。この粉体を成形後、所定の温度で焼成し、得られた焼結体に分極処理を施すことによって、上述の圧電磁器10を得ることができる。
(実施例1~5,12及び比較例1~10)
出発原料として、市販の酸化ビスマス(Bi2O3)、炭酸ナトリウム(Na2CO3),炭酸カリウム(K2CO3)、炭酸リチウム(Li2CO3)、酸化チタン(TiO2)の各粉末原料を準備した。これらの各粉末原料を、表1の固溶体組成(モル比)となるように秤量してエチルアルコールを加え、ジルコニアボールを用いて10時間のボールミル混合を行った。ボールミル混合して得られたスラリーを十分に乾燥させた後、プレス成形し800~850℃で2時間の仮焼成を行った。
出発原料として、市販の酸化ビスマス(Bi2O3)、炭酸ナトリウム(Na2CO3)、炭酸カリウム(K2CO3)、炭酸リチウム(Li2CO3)、酸化チタン(TiO2)、炭酸マンガン(MnCO3)の各粉末原料を準備した。これらの各粉末原料を、表1の組成(モル比)及びMn元素含有量となるように秤量してエチルアルコールを加え、ジルコニアボールを用いて10時間のボールミル混合を行った。そして、実施例1と同様にして焼結体を作製して圧電磁器を得た。このようにして、実施例6~11及び実施例13~15の圧電磁器を作製した。
<Tdの測定>
圧電セラミック振動子の電気的試験方法(EMAS-6100)に基づいて、分極処理を施した各実施例及び各比較例の圧電磁器の脱分極温度(Td)の測定を行った。具体的には、各圧電磁器を恒温槽に入れ、インピーダンスアナライザーで圧電特性を測定しながら温度を上昇させ、圧電特性が完全に消失する温度を脱分極温度(Td)として測定した。測定結果を表1に示す。
分極処理を施した各圧電磁器の圧電特性として、機械的品質係数(Qm)、圧電d定数(d33)及び電気機械結合係数(k33)を測定した。具体的には、インピーダンスアナライザー(アジレントテクノロジー社製、商品名:4294A)を使用し、共振・反共振法により縦振動の450kHz付近で測定を行った。得られた測定値からEMAS6000シリーズを用いてQm、d33及びk33を計算した。計算結果を表1に示す。なお、Qmは33-modeの測定値である。
Claims (6)
- 下記一般式(1)で表される3成分系の固溶体を主成分とする圧電磁器であって、
x(Bi1/2Na1/2)TiO3-y(Bi1/2Li1/2)TiO3-z(Bi1/2K1/2)TiO3・・・(1)
前記一般式(1)におけるx,y,zが、それぞれ下記式(2),(3),(4),(5)を満たす圧電磁器。
0.80≦x≦0.96・・・(2)
0.02≦y≦0.08・・・(3)
0.01≦z≦0.15・・・(4)
x+y+z=1・・・・・・・(5) - 前記一般式(1)におけるzが、下記式(6)を満たす請求項1記載の圧電磁器。
0.01≦z≦0.12・・・(6) - 前記主成分の中に分散されたMn元素を副成分として含有し、
前記Mn元素の含有量が、前記主成分に対してMnO換算で0.93質量%以下である請求項1又は2記載の圧電磁器。 - 下記一般式(1)で表される3成分系の固溶体を主成分とする圧電磁器組成物であって、
x(Bi1/2Na1/2)TiO3-y(Bi1/2Li1/2)TiO3-z(Bi1/2K1/2)TiO3・・・(1)
前記一般式(1)におけるx,y,zが、それぞれ下記式(2),(3),(4),(5)を満たす圧電磁器組成物。
0.80≦x≦0.96・・・(2)
0.02≦y≦0.08・・・(3)
0.01≦z≦0.15・・・(4)
x+y+z=1・・・・・・・(5) - 前記一般式(1)におけるzが、下記式(6)を満たす請求項4記載の圧電磁器組成物。
0.01≦z≦0.12・・・(6) - 前記主成分の中に分散されたMn元素を副成分として含有し、
前記Mn元素の含有量が、前記主成分に対してMnO換算で0.93質量%以下である請求項4又は5記載の圧電磁器組成物。
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JP2010505522A JP5273140B2 (ja) | 2008-03-26 | 2009-03-11 | 圧電磁器及び圧電磁器組成物 |
US12/933,507 US8231803B2 (en) | 2008-03-26 | 2009-03-11 | Piezoelectric ceramic and piezoelectric ceramic composition |
EP09725839.6A EP2269965B1 (en) | 2008-03-26 | 2009-03-11 | Piezoelectric ceramic and piezoelectric ceramic composition |
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Cited By (4)
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CN102233729A (zh) * | 2010-04-14 | 2011-11-09 | 精工爱普生株式会社 | 液体喷射头、液体喷射装置以及压电元件 |
CN102233731A (zh) * | 2010-04-14 | 2011-11-09 | 精工爱普生株式会社 | 液体喷射头、液体喷射装置以及压电元件 |
JP2016047793A (ja) * | 2013-11-13 | 2016-04-07 | Tdk株式会社 | 圧電組成物および圧電素子 |
WO2019175721A1 (en) * | 2018-03-12 | 2019-09-19 | Indian Institute Of Science | Actuator material and method thereof |
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JP5534197B2 (ja) * | 2010-03-12 | 2014-06-25 | セイコーエプソン株式会社 | 液体噴射ヘッド、液体噴射装置、圧電素子及び焦電センサー |
US20130257692A1 (en) * | 2012-04-02 | 2013-10-03 | Atheer, Inc. | Method and apparatus for ego-centric 3d human computer interface |
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See also references of EP2269965A4 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102233729A (zh) * | 2010-04-14 | 2011-11-09 | 精工爱普生株式会社 | 液体喷射头、液体喷射装置以及压电元件 |
CN102233731A (zh) * | 2010-04-14 | 2011-11-09 | 精工爱普生株式会社 | 液体喷射头、液体喷射装置以及压电元件 |
US8636342B2 (en) | 2010-04-14 | 2014-01-28 | Seiko Epson Corporation | Piezoelectric device, liquid ejecting head, liquid ejecting apparatus, ultrasonic device sensor, and timing device |
CN102233729B (zh) * | 2010-04-14 | 2014-07-09 | 精工爱普生株式会社 | 液体喷射头、液体喷射装置以及压电元件 |
JP2016047793A (ja) * | 2013-11-13 | 2016-04-07 | Tdk株式会社 | 圧電組成物および圧電素子 |
WO2019175721A1 (en) * | 2018-03-12 | 2019-09-19 | Indian Institute Of Science | Actuator material and method thereof |
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JPWO2009119322A1 (ja) | 2011-07-21 |
EP2269965A4 (en) | 2013-04-03 |
US8231803B2 (en) | 2012-07-31 |
EP2269965A1 (en) | 2011-01-05 |
US20110017936A1 (en) | 2011-01-27 |
EP2269965B1 (en) | 2016-02-10 |
JP5273140B2 (ja) | 2013-08-28 |
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