JP5273140B2 - 圧電磁器及び圧電磁器組成物 - Google Patents
圧電磁器及び圧電磁器組成物 Download PDFInfo
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- 239000000919 ceramic Substances 0.000 title claims description 107
- 239000000203 mixture Substances 0.000 title claims description 54
- 239000006104 solid solution Substances 0.000 claims description 37
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 26
- 239000011572 manganese Substances 0.000 description 22
- 239000011734 sodium Substances 0.000 description 14
- 239000002994 raw material Substances 0.000 description 13
- 239000000843 powder Substances 0.000 description 11
- 230000010287 polarization Effects 0.000 description 10
- 230000028161 membrane depolarization Effects 0.000 description 7
- 238000002156 mixing Methods 0.000 description 7
- 150000001875 compounds Chemical class 0.000 description 6
- 238000010304 firing Methods 0.000 description 6
- 150000002500 ions Chemical class 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 238000001354 calcination Methods 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000000465 moulding Methods 0.000 description 4
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 4
- 229910052797 bismuth Inorganic materials 0.000 description 3
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 3
- 238000009694 cold isostatic pressing Methods 0.000 description 3
- 229910000464 lead oxide Inorganic materials 0.000 description 3
- 229910001415 sodium ion Inorganic materials 0.000 description 3
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 2
- 229910002113 barium titanate Inorganic materials 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 229910000416 bismuth oxide Inorganic materials 0.000 description 2
- FSAJRXGMUISOIW-UHFFFAOYSA-N bismuth sodium Chemical compound [Na].[Bi] FSAJRXGMUISOIW-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 235000019441 ethanol Nutrition 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- XGZVUEUWXADBQD-UHFFFAOYSA-L lithium carbonate Chemical compound [Li+].[Li+].[O-]C([O-])=O XGZVUEUWXADBQD-UHFFFAOYSA-L 0.000 description 2
- 229910001416 lithium ion Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 238000010587 phase diagram Methods 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- 238000010298 pulverizing process Methods 0.000 description 2
- 229910000029 sodium carbonate Inorganic materials 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 101100513612 Microdochium nivale MnCO gene Proteins 0.000 description 1
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- YPQJHZKJHIBJAP-UHFFFAOYSA-N [K].[Bi] Chemical compound [K].[Bi] YPQJHZKJHIBJAP-UHFFFAOYSA-N 0.000 description 1
- 238000003916 acid precipitation Methods 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- JYPVGDJNZGAXBB-UHFFFAOYSA-N bismuth lithium Chemical compound [Li].[Bi] JYPVGDJNZGAXBB-UHFFFAOYSA-N 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical compound OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010828 elution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000005242 forging Methods 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000009774 resonance method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
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- C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
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- C04B35/62605—Treating the starting powders individually or as mixtures
- C04B35/6261—Milling
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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- H10N30/00—Piezoelectric or electrostrictive devices
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Description
0.80≦x≦0.88・・・(2)
0.04≦y≦0.08・・・(3)
0.08≦z≦0.10・・・(4)
x+y+z=1・・・・・・・(5)
図1は、本発明の圧電磁器の好適な一実施形態を示す斜視図である。圧電磁器10は、主成分として、下記一般式(1)で表される、菱面晶組成である3成分系の固溶体を含有する。
0.02≦y≦0.08・・・(3)
0.01≦z≦0.15・・・(4)
x+y+z=1・・・・・・・(5)
本実施形態の圧電磁器組成物は、上述の圧電磁器10と同様の主成分を含有する。すなわち、上記一般式(1)で表される3成分系の固溶体を主成分として含有する。また、圧電磁器10と同様に、Mn元素を副成分として含有することが好ましい。圧電磁器組成物は、例えば、平均粒径0.3〜3.0μmの粉体であってもよく、凝集物であってもよい。凝集物は、公知の方法で粉砕することによって、粉体にすることができる。この粉体を成形後、所定の温度で焼成し、得られた焼結体に分極処理を施すことによって、上述の圧電磁器10を得ることができる。
出発原料として、市販の酸化ビスマス(Bi2O3)、炭酸ナトリウム(Na2CO3),炭酸カリウム(K2CO3)、炭酸リチウム(Li2CO3)、酸化チタン(TiO2)の各粉末原料を準備した。これらの各粉末原料を、表1の固溶体組成(モル比)となるように秤量してエチルアルコールを加え、ジルコニアボールを用いて10時間のボールミル混合を行った。ボールミル混合して得られたスラリーを十分に乾燥させた後、プレス成形し800〜850℃で2時間の仮焼成を行った。
出発原料として、市販の酸化ビスマス(Bi2O3)、炭酸ナトリウム(Na2CO3)、炭酸カリウム(K2CO3)、炭酸リチウム(Li2CO3)、酸化チタン(TiO2)、炭酸マンガン(MnCO3)の各粉末原料を準備した。これらの各粉末原料を、表1の組成(モル比)及びMn元素含有量となるように秤量してエチルアルコールを加え、ジルコニアボールを用いて10時間のボールミル混合を行った。そして、実施例1と同様にして焼結体を作製して圧電磁器を得た。このようにして、実施例6〜8、参考例9〜11及び参考例13〜15の圧電磁器を作製した。
<Tdの測定>
圧電セラミック振動子の電気的試験方法(EMAS−6100)に基づいて、分極処理を施した各実施例及び各比較例の圧電磁器の脱分極温度(Td)の測定を行った。具体的には、各圧電磁器を恒温槽に入れ、インピーダンスアナライザーで圧電特性を測定しながら温度を上昇させ、圧電特性が完全に消失する温度を脱分極温度(Td)として測定した。測定結果を表1に示す。
分極処理を施した各圧電磁器の圧電特性として、機械的品質係数(Qm)、圧電d定数(d33)及び電気機械結合係数(k33)を測定した。具体的には、インピーダンスアナライザー(アジレントテクノロジー社製、商品名:4294A)を使用し、共振・反共振法により縦振動の450kHz付近で測定を行った。得られた測定値からEMAS6000シリーズを用いてQm、d33及びk33を計算した。計算結果を表1に示す。なお、Qmは33−modeの測定値である。
Claims (2)
- 下記一般式(1)で表される3成分系の固溶体を主成分とする圧電磁器であって、
x(Bi1/2Na1/2)TiO3−y(Bi1/2Li1/2)TiO3−z(Bi1/2K1/2)TiO3・・・(1)
前記一般式(1)におけるx,y,zが、それぞれ下記式(2),(3),(4),(5)を満たし、
前記主成分の中に分散されたMn元素を副成分として含有し、
前記Mn元素の含有量が、前記主成分に対してMnO換算で0.12〜0.37質量%である圧電磁器。
0.80≦x≦0.88・・・(2)
0.04≦y≦0.08・・・(3)
0.08≦z≦0.10・・・(4)
x+y+z=1・・・・・・・(5) - 下記一般式(1)で表される3成分系の固溶体を主成分とする圧電磁器組成物であって、
x(Bi1/2Na1/2)TiO3−y(Bi1/2Li1/2)TiO3−z(Bi1/2K1/2)TiO3・・・(1)
前記一般式(1)におけるx,y,zが、それぞれ下記式(2),(3),(4),(5)を満たし、
前記主成分の中に分散されたMn元素を副成分として含有し、
前記Mn元素の含有量が、前記主成分に対してMnO換算で0.12〜0.37質量%である圧電磁器組成物。
0.80≦x≦0.88・・・(2)
0.04≦y≦0.08・・・(3)
0.08≦z≦0.10・・・(4)
x+y+z=1・・・・・・・(5)
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