CN102088020B - 功率mos晶体管内集成肖特基二极管的器件及制造方法 - Google Patents
功率mos晶体管内集成肖特基二极管的器件及制造方法 Download PDFInfo
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- CN102088020B CN102088020B CN200910201907A CN200910201907A CN102088020B CN 102088020 B CN102088020 B CN 102088020B CN 200910201907 A CN200910201907 A CN 200910201907A CN 200910201907 A CN200910201907 A CN 200910201907A CN 102088020 B CN102088020 B CN 102088020B
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CN102088020A CN102088020A (zh) | 2011-06-08 |
CN102088020B true CN102088020B (zh) | 2012-10-03 |
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Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103021867B (zh) * | 2012-12-21 | 2016-11-16 | 上海华虹宏力半导体制造有限公司 | 沟槽型金属-氧化物-半导体势垒肖特基器件的形成方法 |
CN103151270A (zh) * | 2013-02-26 | 2013-06-12 | 上海宏力半导体制造有限公司 | 沟槽式金属氧化物半导体肖特基势垒器件制造方法 |
CN103346087B (zh) * | 2013-06-03 | 2017-02-08 | 上海华虹宏力半导体制造有限公司 | 沟槽式金属氧化物半导体肖特基势垒器件的制造方法 |
CN104681448B (zh) * | 2013-11-29 | 2017-12-05 | 上海华虹宏力半导体制造有限公司 | 肖特基晶体管的结构及制造方法 |
CN105304708B (zh) * | 2014-07-31 | 2019-04-26 | 瀚薪科技股份有限公司 | 碳化硅半导体元件 |
CN113299644A (zh) * | 2021-05-21 | 2021-08-24 | 江苏东海半导体科技有限公司 | 一种自带肖特基二极管结构的沟槽mos器件及制造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1547765A (zh) * | 2001-08-23 | 2004-11-17 | 通用半导体公司 | 具有内嵌的沟槽肖特基整流器的沟槽dmos晶体管 |
CN101142684A (zh) * | 2004-05-28 | 2008-03-12 | 飞思卡尔半导体公司 | 肖特基器件 |
CN101465375A (zh) * | 2007-12-21 | 2009-06-24 | 万国半导体股份有限公司 | 具有肖特基势垒控制层的mos器件 |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN1547765A (zh) * | 2001-08-23 | 2004-11-17 | 通用半导体公司 | 具有内嵌的沟槽肖特基整流器的沟槽dmos晶体管 |
CN101142684A (zh) * | 2004-05-28 | 2008-03-12 | 飞思卡尔半导体公司 | 肖特基器件 |
CN101465375A (zh) * | 2007-12-21 | 2009-06-24 | 万国半导体股份有限公司 | 具有肖特基势垒控制层的mos器件 |
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