CN101960314A - 微芯片及其制造方法 - Google Patents
微芯片及其制造方法 Download PDFInfo
- Publication number
- CN101960314A CN101960314A CN2009801075676A CN200980107567A CN101960314A CN 101960314 A CN101960314 A CN 101960314A CN 2009801075676 A CN2009801075676 A CN 2009801075676A CN 200980107567 A CN200980107567 A CN 200980107567A CN 101960314 A CN101960314 A CN 101960314A
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- resin film
- stream
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- groove
- microchip
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Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00103—Structures having a predefined profile, e.g. sloped or rounded grooves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/06—Fluid handling related problems
- B01L2200/0689—Sealing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0809—Geometry, shape and general structure rectangular shaped
- B01L2300/0816—Cards, e.g. flat sample carriers usually with flow in two horizontal directions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0887—Laminated structure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502746—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means for controlling flow resistance, e.g. flow controllers, baffles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/05—Microfluidics
- B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0323—Grooves
- B81B2203/0338—Channels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0369—Static structures characterized by their profile
- B81B2203/0384—Static structures characterized by their profile sloped profile
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
- B81C2201/019—Bonding or gluing multiple substrate layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
- Y10T156/1052—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing
- Y10T156/1062—Prior to assembly
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24273—Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
- Y10T428/24322—Composite web or sheet
- Y10T428/24331—Composite web or sheet including nonapertured component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
- Y10T428/24562—Interlaminar spaces
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Analytical Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Dispersion Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Hematology (AREA)
- Clinical Laboratory Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Automatic Analysis And Handling Materials Therefor (AREA)
- Lining Or Joining Of Plastics Or The Like (AREA)
Abstract
Description
Claims (9)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP058389/08 | 2008-03-07 | ||
JP2008058389 | 2008-03-07 | ||
PCT/JP2009/051561 WO2009110270A1 (ja) | 2008-03-07 | 2009-01-30 | マイクロチップ及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101960314A true CN101960314A (zh) | 2011-01-26 |
CN101960314B CN101960314B (zh) | 2014-11-26 |
Family
ID=41055832
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200980107567.6A Active CN101960314B (zh) | 2008-03-07 | 2009-01-30 | 微芯片及其制造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20110014422A1 (zh) |
EP (1) | EP2251698A1 (zh) |
JP (1) | JPWO2009110270A1 (zh) |
CN (1) | CN101960314B (zh) |
WO (1) | WO2009110270A1 (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012007920A (ja) * | 2010-06-23 | 2012-01-12 | Sumitomo Bakelite Co Ltd | マイクロ流路デバイスの製造方法 |
JP2014006049A (ja) * | 2012-06-21 | 2014-01-16 | Sumitomo Bakelite Co Ltd | マイクロ流路チップの製造方法 |
JP2015199187A (ja) * | 2014-03-31 | 2015-11-12 | 住友ベークライト株式会社 | 樹脂製マイクロ流路デバイスの製造方法およびマイクロ流路デバイス |
GB2533386B (en) * | 2014-12-18 | 2019-09-11 | Smiths Detection Watford Ltd | A detection apparatus with pneumatic interface |
JP7216365B2 (ja) * | 2018-10-01 | 2023-02-01 | 旭化成株式会社 | マイクロ流路用感光性樹脂積層体 |
CN113176401B (zh) * | 2021-01-15 | 2022-03-01 | 北京中科生仪科技有限公司 | 生物芯片的基片 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000310613A (ja) * | 1999-02-26 | 2000-11-07 | Hitachi Chem Co Ltd | 電気泳動用チップとその製造方法、該電気泳動用チップを用いた電気泳動装置及び荷電性物質の分離方法 |
US20030118481A1 (en) * | 1998-10-09 | 2003-06-26 | Briscoe Cynthia G. | Multilayered ceramic micro-gas chromatograph and method for making the same |
US20040069639A1 (en) * | 2002-10-15 | 2004-04-15 | Koichi Ono | Resin chip |
JP2004219370A (ja) * | 2003-01-17 | 2004-08-05 | Pentax Corp | 実験チップ及び実験チップの製造方法 |
WO2006011558A1 (ja) * | 2004-07-29 | 2006-02-02 | Kyocera Corporation | マイクロ化学チップ |
US20060062693A1 (en) * | 2004-09-21 | 2006-03-23 | Fuji Photo Film Co., Ltd. | Apparatus for assay in utilizing attenuated total reflection |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59103803A (ja) * | 1982-11-29 | 1984-06-15 | 大日本印刷株式会社 | 包装体の製造法 |
US7229518B1 (en) * | 2000-11-02 | 2007-06-12 | Nike, Inc. | Process for improving interfacial adhesion in a laminate |
JP2003121453A (ja) * | 2001-10-09 | 2003-04-23 | Ryokusei Mes Kk | Dna(デオキシリボ核酸)検査用マイクロプレート製造システム |
JP2005140762A (ja) * | 2003-10-17 | 2005-06-02 | Mitsuboshi Belting Ltd | マイクロ分析用チップの製造方法 |
JP4496934B2 (ja) * | 2004-11-19 | 2010-07-07 | スターライト工業株式会社 | マイクロ化学デバイスの製造方法 |
JP4760463B2 (ja) * | 2005-08-25 | 2011-08-31 | 日立化成工業株式会社 | 感光性樹脂組成物、感光性フィルム、これらを用いたマイクロ化学チップの製造方法、およびマイクロ化学チップ |
-
2009
- 2009-01-30 JP JP2010501823A patent/JPWO2009110270A1/ja active Pending
- 2009-01-30 EP EP09718138A patent/EP2251698A1/en not_active Withdrawn
- 2009-01-30 US US12/920,943 patent/US20110014422A1/en not_active Abandoned
- 2009-01-30 CN CN200980107567.6A patent/CN101960314B/zh active Active
- 2009-01-30 WO PCT/JP2009/051561 patent/WO2009110270A1/ja active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030118481A1 (en) * | 1998-10-09 | 2003-06-26 | Briscoe Cynthia G. | Multilayered ceramic micro-gas chromatograph and method for making the same |
JP2000310613A (ja) * | 1999-02-26 | 2000-11-07 | Hitachi Chem Co Ltd | 電気泳動用チップとその製造方法、該電気泳動用チップを用いた電気泳動装置及び荷電性物質の分離方法 |
US20040069639A1 (en) * | 2002-10-15 | 2004-04-15 | Koichi Ono | Resin chip |
JP2004219370A (ja) * | 2003-01-17 | 2004-08-05 | Pentax Corp | 実験チップ及び実験チップの製造方法 |
WO2006011558A1 (ja) * | 2004-07-29 | 2006-02-02 | Kyocera Corporation | マイクロ化学チップ |
US20060062693A1 (en) * | 2004-09-21 | 2006-03-23 | Fuji Photo Film Co., Ltd. | Apparatus for assay in utilizing attenuated total reflection |
Non-Patent Citations (2)
Title |
---|
JIANG CHEN,ET.AL: "Fabrication of poly(methyl methacrylate) microfluidic chips...", 《ELECTROPHORESIS》 * |
YI SUN ET.AL: "Low-pressure,high-temperature thermal bonding of polymeric microfluidic devices...", 《JOURNAL OF MICROMECHANICS AND MICROENGINEERING》 * |
Also Published As
Publication number | Publication date |
---|---|
US20110014422A1 (en) | 2011-01-20 |
CN101960314B (zh) | 2014-11-26 |
EP2251698A1 (en) | 2010-11-17 |
WO2009110270A1 (ja) | 2009-09-11 |
JPWO2009110270A1 (ja) | 2011-07-14 |
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