CN101874299B - 具有散热孔的陶瓷基板 - Google Patents
具有散热孔的陶瓷基板 Download PDFInfo
- Publication number
- CN101874299B CN101874299B CN2008801186744A CN200880118674A CN101874299B CN 101874299 B CN101874299 B CN 101874299B CN 2008801186744 A CN2008801186744 A CN 2008801186744A CN 200880118674 A CN200880118674 A CN 200880118674A CN 101874299 B CN101874299 B CN 101874299B
- Authority
- CN
- China
- Prior art keywords
- louvre
- reinforcement
- ceramic substrate
- height
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 120
- 239000000919 ceramic Substances 0.000 title claims abstract description 90
- 230000002787 reinforcement Effects 0.000 claims description 118
- 238000000034 method Methods 0.000 claims description 31
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 17
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 13
- 239000011521 glass Substances 0.000 claims description 11
- 238000003475 lamination Methods 0.000 claims description 10
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims description 9
- 229910017083 AlN Inorganic materials 0.000 claims description 8
- 230000005855 radiation Effects 0.000 claims description 8
- 238000002360 preparation method Methods 0.000 claims description 7
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 claims description 3
- 150000002739 metals Chemical class 0.000 claims description 3
- 229910052763 palladium Inorganic materials 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 238000005520 cutting process Methods 0.000 claims description 2
- 229910003460 diamond Inorganic materials 0.000 claims description 2
- 239000010432 diamond Substances 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910002804 graphite Inorganic materials 0.000 claims description 2
- 239000010439 graphite Substances 0.000 claims description 2
- 229910052697 platinum Inorganic materials 0.000 claims description 2
- 230000003014 reinforcing effect Effects 0.000 abstract 2
- 239000000203 mixture Substances 0.000 description 36
- 239000000945 filler Substances 0.000 description 21
- 238000004519 manufacturing process Methods 0.000 description 11
- 238000009434 installation Methods 0.000 description 9
- 238000013459 approach Methods 0.000 description 8
- 239000004744 fabric Substances 0.000 description 8
- 238000007639 printing Methods 0.000 description 8
- 238000011049 filling Methods 0.000 description 6
- 239000010410 layer Substances 0.000 description 6
- 238000005498 polishing Methods 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 238000005429 filling process Methods 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 2
- 238000005422 blasting Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 230000005068 transpiration Effects 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- KXDHJXZQYSOELW-UHFFFAOYSA-M Carbamate Chemical compound NC([O-])=O KXDHJXZQYSOELW-UHFFFAOYSA-M 0.000 description 1
- 206010013786 Dry skin Diseases 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000004840 adhesive resin Substances 0.000 description 1
- 229920006223 adhesive resin Polymers 0.000 description 1
- -1 alcohol ester Chemical class 0.000 description 1
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052878 cordierite Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 229940116411 terpineol Drugs 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
- H01L23/3677—Wire-like or pin-like cooling fins or heat sinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
- H01L2924/097—Glass-ceramics, e.g. devitrified glass
- H01L2924/09701—Low temperature co-fired ceramic [LTCC]
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Structure Of Printed Boards (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/001,267 | 2007-12-11 | ||
| US12/001,267 US20090146295A1 (en) | 2007-12-11 | 2007-12-11 | Ceramic substrate having thermal via |
| PCT/US2008/086338 WO2009076494A2 (en) | 2007-12-11 | 2008-12-11 | Ceramic substrate having thermal via |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101874299A CN101874299A (zh) | 2010-10-27 |
| CN101874299B true CN101874299B (zh) | 2012-04-04 |
Family
ID=40637680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008801186744A Expired - Fee Related CN101874299B (zh) | 2007-12-11 | 2008-12-11 | 具有散热孔的陶瓷基板 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20090146295A1 (enExample) |
| JP (1) | JP2011507276A (enExample) |
| CN (1) | CN101874299B (enExample) |
| TW (1) | TW201023307A (enExample) |
| WO (1) | WO2009076494A2 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101491138B1 (ko) * | 2007-12-12 | 2015-02-09 | 엘지이노텍 주식회사 | 다층 기판 및 이를 구비한 발광 다이오드 모듈 |
| US20100140790A1 (en) * | 2008-12-05 | 2010-06-10 | Seagate Technology Llc | Chip having thermal vias and spreaders of cvd diamond |
| US8757874B2 (en) | 2010-05-03 | 2014-06-24 | National Instruments Corporation | Temperature sensing system and method |
| WO2012055206A1 (zh) * | 2010-10-26 | 2012-05-03 | Yu Jianping | 氧化铝/石墨复合陶瓷材料和采用该材料为基板的led光源 |
| KR101289186B1 (ko) * | 2011-04-15 | 2013-07-26 | 삼성전기주식회사 | 인쇄회로기판 및 그 제조방법 |
| US9006770B2 (en) * | 2011-05-18 | 2015-04-14 | Tsmc Solid State Lighting Ltd. | Light emitting diode carrier |
| US8908383B1 (en) * | 2012-05-21 | 2014-12-09 | Triquint Semiconductor, Inc. | Thermal via structures with surface features |
| US9318466B2 (en) * | 2014-08-28 | 2016-04-19 | Globalfoundries Inc. | Method for electronic circuit assembly on a paper substrate |
| EP3850319B1 (de) * | 2018-11-09 | 2023-07-12 | Siemens Energy Global GmbH & Co. KG | Anordnung zum ermitteln der temperatur einer oberfläche |
| CN117769163B (zh) * | 2023-12-26 | 2024-05-31 | 江苏富乐华半导体科技股份有限公司 | 一种铝薄膜电路基板制备方法 |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59230741A (ja) * | 1983-06-15 | 1984-12-25 | 株式会社日立製作所 | 形状記憶複合材料 |
| US4894115A (en) * | 1989-02-14 | 1990-01-16 | General Electric Company | Laser beam scanning method for forming via holes in polymer materials |
| JPH07221218A (ja) * | 1994-02-03 | 1995-08-18 | Toshiba Corp | 半導体装置 |
| US5802699A (en) * | 1994-06-07 | 1998-09-08 | Tessera, Inc. | Methods of assembling microelectronic assembly with socket for engaging bump leads |
| US5558267A (en) * | 1995-03-31 | 1996-09-24 | Texas Instruments Incorporated | Moat for die pad cavity in bond station heater block |
| JPH0955459A (ja) * | 1995-06-06 | 1997-02-25 | Seiko Epson Corp | 半導体装置 |
| US6247228B1 (en) * | 1996-08-12 | 2001-06-19 | Tessera, Inc. | Electrical connection with inwardly deformable contacts |
| JP3650689B2 (ja) * | 1997-05-28 | 2005-05-25 | 三菱電機株式会社 | 半導体装置 |
| US6395998B1 (en) * | 2000-09-13 | 2002-05-28 | International Business Machines Corporation | Electronic package having an adhesive retaining cavity |
| DE10051547A1 (de) * | 2000-10-18 | 2002-04-25 | Bosch Gmbh Robert | Baugruppenträger für elektrische/elektronische Bauelemente |
| US6750516B2 (en) * | 2001-10-18 | 2004-06-15 | Hewlett-Packard Development Company, L.P. | Systems and methods for electrically isolating portions of wafers |
| US6541712B1 (en) * | 2001-12-04 | 2003-04-01 | Teradyhe, Inc. | High speed multi-layer printed circuit board via |
| US7152312B2 (en) * | 2002-02-11 | 2006-12-26 | Adc Dsl Systems, Inc. | Method for transmitting current through a substrate |
| JP2003338577A (ja) * | 2002-05-21 | 2003-11-28 | Murata Mfg Co Ltd | 回路基板装置 |
| US6977346B2 (en) * | 2002-06-10 | 2005-12-20 | Visteon Global Technologies, Inc. | Vented circuit board for cooling power components |
| TWI233145B (en) * | 2002-09-03 | 2005-05-21 | Toshiba Corp | Semiconductor device |
| JP2004165291A (ja) * | 2002-11-11 | 2004-06-10 | Tokuyama Corp | ビアホール付きセラミック基板及びその製造方法 |
| US7286359B2 (en) * | 2004-05-11 | 2007-10-23 | The U.S. Government As Represented By The National Security Agency | Use of thermally conductive vias to extract heat from microelectronic chips and method of manufacturing |
| US7786567B2 (en) * | 2004-11-10 | 2010-08-31 | Chung-Cheng Wang | Substrate for electrical device and methods for making the same |
| KR100849455B1 (ko) * | 2005-04-19 | 2008-07-30 | 티디케이가부시기가이샤 | 다층 세라믹 기판 및 그 제조 방법 |
| JP2007031229A (ja) * | 2005-07-28 | 2007-02-08 | Tdk Corp | 窒化アルミニウム基板の製造方法及び窒化アルミニウム基板 |
| US7554193B2 (en) * | 2005-08-16 | 2009-06-30 | Renesas Technology Corp. | Semiconductor device |
| JP4331769B2 (ja) * | 2007-02-28 | 2009-09-16 | Tdk株式会社 | 配線構造及びその形成方法並びにプリント配線板 |
-
2007
- 2007-12-11 US US12/001,267 patent/US20090146295A1/en not_active Abandoned
-
2008
- 2008-12-11 CN CN2008801186744A patent/CN101874299B/zh not_active Expired - Fee Related
- 2008-12-11 JP JP2010538144A patent/JP2011507276A/ja active Pending
- 2008-12-11 WO PCT/US2008/086338 patent/WO2009076494A2/en not_active Ceased
- 2008-12-12 TW TW097148703A patent/TW201023307A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| US20090146295A1 (en) | 2009-06-11 |
| WO2009076494A3 (en) | 2009-07-30 |
| CN101874299A (zh) | 2010-10-27 |
| TW201023307A (en) | 2010-06-16 |
| JP2011507276A (ja) | 2011-03-03 |
| WO2009076494A2 (en) | 2009-06-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120404 Termination date: 20131211 |