CN101863478B - 高纯四氟化硅的制备方法 - Google Patents
高纯四氟化硅的制备方法 Download PDFInfo
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CN101863478A CN101863478A (zh) | 2010-10-20 |
CN101863478B true CN101863478B (zh) | 2012-07-18 |
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Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101973553B (zh) * | 2010-11-03 | 2015-07-15 | 瓮福(集团)有限责任公司 | 用氟硅酸生产高纯度四氟化硅的方法 |
CN109574017A (zh) * | 2018-11-23 | 2019-04-05 | 贵州开磷氟硅化工有限责任公司 | 一种以氟硅酸为原料制备SiF4和无水氟化氢的方法 |
CN111661874A (zh) * | 2020-07-22 | 2020-09-15 | 三祥新材股份有限公司 | 一种降低电熔氧化锆粉氧化硅含量的方法 |
CN112158849B (zh) * | 2020-09-27 | 2023-06-30 | 湖北祥云(集团)化工股份有限公司 | 一种磷矿伴生氟制备四氟化硅的方法 |
CN112374503A (zh) * | 2020-11-19 | 2021-02-19 | 苏州金宏气体股份有限公司 | 一种高纯四氟化硅气体的纯化方法及纯化系统 |
CN116462200B (zh) * | 2023-04-24 | 2024-10-01 | 中国五环工程有限公司 | 基于真空膜蒸馏法的氟硅酸浓缩方法 |
Citations (1)
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CN101291875A (zh) * | 2005-10-03 | 2008-10-22 | 斯泰拉化工公司 | 四氟化硅的制造方法、以及用于其的制造装置 |
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CN101291875A (zh) * | 2005-10-03 | 2008-10-22 | 斯泰拉化工公司 | 四氟化硅的制造方法、以及用于其的制造装置 |
Non-Patent Citations (2)
Title |
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于剑昆.四氟化硅的生产概况.《无机盐工业》.2006,第38卷(第1期),第1-4页. * |
大塚丰三等.高纯四氟化硅的制造方法.《低温与特气》.1986,(第01期),第47-51页. * |
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Effective date of registration: 20120111 Address after: 528211, Lishui Town, Nanhai District, Guangdong City, Foshan Province Applicant after: Foshan Huate Gases Co., Ltd. Co-applicant after: Guangdong SouthChina Special Gas Institute Co., Ltd. Address before: Water town and Nanhai District 528000 Guangdong city of Foshan Province on the East Jin tou Ling leuvens Applicant before: Shi Pingxiang |
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Address after: 528211, Lishui Town, Nanhai District, Guangdong City, Foshan Province Patentee after: GUANGDONG HUATE GASES CO., LTD. Patentee after: Guangdong SouthChina Special Gas Institute Co., Ltd. Address before: 528211, Lishui Town, Nanhai District, Guangdong City, Foshan Province Patentee before: Foshan Huate Gases Co., Ltd. Patentee before: Guangdong SouthChina Special Gas Institute Co., Ltd. |