CN101802718B - 含硅的精细图案形成用组合物以及使用它的精细图案形成方法 - Google Patents
含硅的精细图案形成用组合物以及使用它的精细图案形成方法 Download PDFInfo
- Publication number
- CN101802718B CN101802718B CN200880106486XA CN200880106486A CN101802718B CN 101802718 B CN101802718 B CN 101802718B CN 200880106486X A CN200880106486X A CN 200880106486XA CN 200880106486 A CN200880106486 A CN 200880106486A CN 101802718 B CN101802718 B CN 101802718B
- Authority
- CN
- China
- Prior art keywords
- fine pattern
- composition
- pattern
- resist
- resist pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
- G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
- G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
- G03F7/0758—Macromolecular compounds containing Si-O, Si-C or Si-N bonds with silicon- containing groups in the side chains
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
- G03F7/405—Treatment with inorganic or organometallic reagents after imagewise removal
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Organic Chemistry (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Abstract
Description
图案类型 | 1∶3间距 | 1∶5间距 |
处理前尺寸(nm) | 175 | 164 |
处理后尺寸(nm) | 159 | 148 |
收缩量(nm) | 16 | 16 |
Claims (7)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-236974 | 2007-09-12 | ||
JP2007236974A JP5058733B2 (ja) | 2007-09-12 | 2007-09-12 | ケイ素含有微細パターン形成用組成物を用いた微細パターン形成方法 |
PCT/JP2008/066556 WO2009035087A1 (ja) | 2007-09-12 | 2008-09-12 | ケイ素含有微細パターン形成用組成物およびそれを用いた微細パターン形成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101802718A CN101802718A (zh) | 2010-08-11 |
CN101802718B true CN101802718B (zh) | 2012-07-04 |
Family
ID=40452093
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200880106486XA Expired - Fee Related CN101802718B (zh) | 2007-09-12 | 2008-09-12 | 含硅的精细图案形成用组合物以及使用它的精细图案形成方法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US8663906B2 (zh) |
EP (1) | EP2199861B1 (zh) |
JP (1) | JP5058733B2 (zh) |
KR (1) | KR101438384B1 (zh) |
CN (1) | CN101802718B (zh) |
MY (1) | MY150435A (zh) |
TW (1) | TWI369585B (zh) |
WO (1) | WO2009035087A1 (zh) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI452419B (zh) * | 2008-01-28 | 2014-09-11 | Az Electronic Mat Ip Japan Kk | 細微圖案光罩及其製造方法、及使用其之細微圖案形成方法 |
US8084186B2 (en) * | 2009-02-10 | 2011-12-27 | Az Electronic Materials Usa Corp. | Hardmask process for forming a reverse tone image using polysilazane |
JP5425514B2 (ja) * | 2009-04-16 | 2014-02-26 | AzエレクトロニックマテリアルズIp株式会社 | 微細パターン形成方法 |
KR101835293B1 (ko) * | 2010-09-03 | 2018-03-06 | 테트라썬, 아이엔씨. | 광학코팅의 부분적 리프트-오프에 의한 광기전력 장치의 미세라인 금속화 |
JP5768397B2 (ja) * | 2011-02-16 | 2015-08-26 | 三菱電機株式会社 | 半導体装置の製造方法 |
US8968586B2 (en) | 2012-02-15 | 2015-03-03 | Jsr Corporation | Pattern-forming method |
JP2012137778A (ja) * | 2012-03-19 | 2012-07-19 | Az Electronic Materials Ip Ltd | ケイ素含有微細パターン形成用組成物 |
KR101902402B1 (ko) | 2012-04-05 | 2018-09-28 | 삼성전자 주식회사 | 반도체 장치의 미세 패턴 형성 방법 및 이를 이용한 반도체 장치의 제조 방법 |
JP6075724B2 (ja) * | 2012-10-01 | 2017-02-08 | アーゼッド・エレクトロニック・マテリアルズ(ルクセンブルグ)ソシエテ・ア・レスポンサビリテ・リミテ | 微細レジストパターン形成用組成物およびそれを用いたパターン形成方法 |
JP5822986B2 (ja) * | 2014-06-16 | 2015-11-25 | ダウ コーニング コーポレーションDow Corning Corporation | レジスト被覆膜形成用材料 |
US9564326B2 (en) * | 2014-07-17 | 2017-02-07 | International Business Machines Corporation | Lithography using interface reaction |
KR102366801B1 (ko) | 2015-03-31 | 2022-02-25 | 삼성전자주식회사 | 반도체 소자의 제조 방법 |
US9673341B2 (en) | 2015-05-08 | 2017-06-06 | Tetrasun, Inc. | Photovoltaic devices with fine-line metallization and methods for manufacture |
KR102067082B1 (ko) | 2017-01-19 | 2020-01-16 | 삼성에스디아이 주식회사 | 패턴 형성 방법 및 반도체 소자 |
WO2018220796A1 (ja) * | 2017-06-01 | 2018-12-06 | 三菱電機株式会社 | 半導体装置の製造方法 |
Citations (4)
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WO2005116776A1 (ja) * | 2004-05-26 | 2005-12-08 | Jsr Corporation | 微細パターン形成用樹脂組成物および微細パターン形成方法 |
JP2006060006A (ja) * | 2004-08-19 | 2006-03-02 | Fujitsu Ltd | 半導体装置及びその製造方法、並びに、レジストパターンの形成方法 |
CN1823136A (zh) * | 2003-07-18 | 2006-08-23 | Az电子材料(日本)株式会社 | 含磷硅氮烷组合物、含磷硅质膜、含磷硅质填料、用于生产含磷硅质膜的方法和半导体装置 |
WO2007083654A1 (ja) * | 2006-01-18 | 2007-07-26 | Az Electronic Materials (Japan) K.K. | シリカ質膜の製造法およびそれにより製造されたシリカ質膜付き基板 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05166717A (ja) * | 1991-12-16 | 1993-07-02 | Mitsubishi Electric Corp | 微細パターン形成方法 |
JP3263219B2 (ja) | 1993-12-26 | 2002-03-04 | 東洋紙業株式会社 | 水性塗料の画像形成方法 |
JPH09230600A (ja) * | 1996-02-28 | 1997-09-05 | Hitachi Ltd | パターン形成方法 |
JP3071401B2 (ja) | 1996-07-05 | 2000-07-31 | 三菱電機株式会社 | 微細パターン形成材料及びこれを用いた半導体装置の製造方法並びに半導体装置 |
US20040081912A1 (en) * | 1998-10-05 | 2004-04-29 | Tatsuro Nagahara | Photosensitive polysilazane composition and method of forming patterned polysilazane film |
JP2000267268A (ja) | 1999-03-17 | 2000-09-29 | Tokyo Ohka Kogyo Co Ltd | 微細パターン形成材料 |
JP2001100428A (ja) | 1999-09-27 | 2001-04-13 | Mitsubishi Electric Corp | 半導体装置の製造方法、微細パターン形成用薬液および半導体装置 |
JP5020425B2 (ja) * | 2000-04-25 | 2012-09-05 | Azエレクトロニックマテリアルズ株式会社 | 微細溝をシリカ質材料で埋封する方法 |
JP2002006512A (ja) | 2000-06-20 | 2002-01-09 | Mitsubishi Electric Corp | 微細パターン形成方法、微細パターン形成用材料、およびこの微細パターン形成方法を用いた半導体装置の製造方法 |
JP4722269B2 (ja) * | 2000-08-29 | 2011-07-13 | Azエレクトロニックマテリアルズ株式会社 | 低誘電率多孔質シリカ質膜、半導体装置およびコーティング組成物、ならびに低誘電率多孔質シリカ質膜の製造方法 |
JP3662870B2 (ja) | 2001-07-05 | 2005-06-22 | 東京応化工業株式会社 | レジストパターン微細化用被覆形成剤及びそれを用いた微細レジストパターン形成方法 |
JP3697426B2 (ja) * | 2002-04-24 | 2005-09-21 | 株式会社東芝 | パターン形成方法および半導体装置の製造方法 |
JP3895269B2 (ja) | 2002-12-09 | 2007-03-22 | 富士通株式会社 | レジストパターンの形成方法並びに半導体装置及びその製造方法 |
KR100503527B1 (ko) * | 2003-02-12 | 2005-07-26 | 삼성전자주식회사 | 퍼하이드로 폴리실라잔을 포함하는 반도체 소자 제조용조성물 및 이를 이용한 반도체 소자의 제조방법 |
EP1908599A1 (en) * | 2005-07-25 | 2008-04-09 | Think Laboratory Co., Ltd. | Gravure platemaking roll and process for producing the same |
JP2007216501A (ja) * | 2006-02-16 | 2007-08-30 | Kri Inc | パターン形成用モールドの製造方法およびパターン形成用モールド |
WO2008133105A1 (ja) * | 2007-04-18 | 2008-11-06 | Think Laboratory Co., Ltd. | クッション性を有するグラビア版及びその製造方法 |
US8084186B2 (en) * | 2009-02-10 | 2011-12-27 | Az Electronic Materials Usa Corp. | Hardmask process for forming a reverse tone image using polysilazane |
-
2007
- 2007-09-12 JP JP2007236974A patent/JP5058733B2/ja not_active Expired - Fee Related
-
2008
- 2008-09-10 TW TW097134661A patent/TWI369585B/zh not_active IP Right Cessation
- 2008-09-12 CN CN200880106486XA patent/CN101802718B/zh not_active Expired - Fee Related
- 2008-09-12 EP EP08830189.0A patent/EP2199861B1/en not_active Not-in-force
- 2008-09-12 US US12/733,451 patent/US8663906B2/en not_active Expired - Fee Related
- 2008-09-12 MY MYPI20100160 patent/MY150435A/en unknown
- 2008-09-12 KR KR1020107004988A patent/KR101438384B1/ko not_active IP Right Cessation
- 2008-09-12 WO PCT/JP2008/066556 patent/WO2009035087A1/ja active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1823136A (zh) * | 2003-07-18 | 2006-08-23 | Az电子材料(日本)株式会社 | 含磷硅氮烷组合物、含磷硅质膜、含磷硅质填料、用于生产含磷硅质膜的方法和半导体装置 |
WO2005116776A1 (ja) * | 2004-05-26 | 2005-12-08 | Jsr Corporation | 微細パターン形成用樹脂組成物および微細パターン形成方法 |
JP2006060006A (ja) * | 2004-08-19 | 2006-03-02 | Fujitsu Ltd | 半導体装置及びその製造方法、並びに、レジストパターンの形成方法 |
WO2007083654A1 (ja) * | 2006-01-18 | 2007-07-26 | Az Electronic Materials (Japan) K.K. | シリカ質膜の製造法およびそれにより製造されたシリカ質膜付き基板 |
Also Published As
Publication number | Publication date |
---|---|
EP2199861A4 (en) | 2011-01-19 |
TWI369585B (en) | 2012-08-01 |
CN101802718A (zh) | 2010-08-11 |
WO2009035087A1 (ja) | 2009-03-19 |
KR101438384B1 (ko) | 2014-09-05 |
KR20100056485A (ko) | 2010-05-27 |
MY150435A (en) | 2014-01-30 |
JP5058733B2 (ja) | 2012-10-24 |
US8663906B2 (en) | 2014-03-04 |
EP2199861A1 (en) | 2010-06-23 |
JP2009069409A (ja) | 2009-04-02 |
US20100255430A1 (en) | 2010-10-07 |
EP2199861B1 (en) | 2013-07-24 |
TW200916966A (en) | 2009-04-16 |
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