CN101782663B - 光学物品及其制造方法 - Google Patents

光学物品及其制造方法 Download PDF

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Publication number
CN101782663B
CN101782663B CN201010003907.5A CN201010003907A CN101782663B CN 101782663 B CN101782663 B CN 101782663B CN 201010003907 A CN201010003907 A CN 201010003907A CN 101782663 B CN101782663 B CN 101782663B
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CN
China
Prior art keywords
layer
silicide
mentioned
sample
antireflection
Prior art date
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Application number
CN201010003907.5A
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English (en)
Chinese (zh)
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CN101782663A (zh
Inventor
西本圭司
野口崇
关浩幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Publication of CN101782663A publication Critical patent/CN101782663A/zh
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Publication of CN101782663B publication Critical patent/CN101782663B/zh
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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0018Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means for preventing ghost images
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/083Oxides of refractory metals or yttrium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10Glass or silica
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • C23C14/5846Reactive treatment
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • G02B1/041Lenses
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/113Anti-reflection coatings using inorganic layer materials only
    • G02B1/115Multilayers
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/18Coatings for keeping optical surfaces clean, e.g. hydrophobic or photo-catalytic films
    • GPHYSICS
    • G02OPTICS
    • G02CSPECTACLES; SUNGLASSES OR GOGGLES INSOFAR AS THEY HAVE THE SAME FEATURES AS SPECTACLES; CONTACT LENSES
    • G02C7/00Optical parts
    • G02C7/02Lenses; Lens systems ; Methods of designing lenses
    • GPHYSICS
    • G02OPTICS
    • G02CSPECTACLES; SUNGLASSES OR GOGGLES INSOFAR AS THEY HAVE THE SAME FEATURES AS SPECTACLES; CONTACT LENSES
    • G02C7/00Optical parts
    • G02C7/02Lenses; Lens systems ; Methods of designing lenses
    • G02C7/08Auxiliary lenses; Arrangements for varying focal length
    • G02C7/088Lens systems mounted to spectacles
    • GPHYSICS
    • G02OPTICS
    • G02CSPECTACLES; SUNGLASSES OR GOGGLES INSOFAR AS THEY HAVE THE SAME FEATURES AS SPECTACLES; CONTACT LENSES
    • G02C7/00Optical parts
    • G02C7/10Filters, e.g. for facilitating adaptation of the eyes to the dark; Sunglasses
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Ophthalmology & Optometry (AREA)
  • General Health & Medical Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Eyeglasses (AREA)
CN201010003907.5A 2009-01-14 2010-01-13 光学物品及其制造方法 Active CN101782663B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2009-005421 2009-01-14
JP2009005421 2009-01-14
JP2009-197787 2009-08-28
JP2009197787A JP5489604B2 (ja) 2009-01-14 2009-08-28 光学物品の製造方法

Publications (2)

Publication Number Publication Date
CN101782663A CN101782663A (zh) 2010-07-21
CN101782663B true CN101782663B (zh) 2014-11-05

Family

ID=41818332

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201010003907.5A Active CN101782663B (zh) 2009-01-14 2010-01-13 光学物品及其制造方法

Country Status (5)

Country Link
US (1) US8215766B2 (enExample)
EP (1) EP2209023A1 (enExample)
JP (1) JP5489604B2 (enExample)
KR (1) KR101657713B1 (enExample)
CN (1) CN101782663B (enExample)

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JP2010231172A (ja) * 2009-03-04 2010-10-14 Seiko Epson Corp 光学物品およびその製造方法
JP2010231171A (ja) * 2009-03-04 2010-10-14 Seiko Epson Corp 光学物品およびその製造方法
JP5588135B2 (ja) * 2009-08-10 2014-09-10 ホーヤ レンズ マニュファクチャリング フィリピン インク 光学物品の製造方法
JP5442394B2 (ja) * 2009-10-29 2014-03-12 ソニー株式会社 固体撮像装置とその製造方法、及び電子機器
JP5523066B2 (ja) * 2009-11-17 2014-06-18 ホーヤ レンズ マニュファクチャリング フィリピン インク 光学物品の製造方法
JP5622468B2 (ja) * 2010-07-26 2014-11-12 ホーヤ レンズ マニュファクチャリング フィリピン インク レンズの製造方法及びレンズ
JP2012032690A (ja) * 2010-08-02 2012-02-16 Seiko Epson Corp 光学物品およびその製造方法
JP5740607B2 (ja) * 2011-02-23 2015-06-24 東海光学株式会社 光学製品の耐久性試験方法
WO2013011664A1 (en) * 2011-07-21 2013-01-24 Canon Kabushiki Kaisha Optical member and method of producing the same
KR101374702B1 (ko) * 2012-02-09 2014-03-17 주식회사카이저솔루션 전자식 컬러 선글라스 및 그 구동 방법
CN103365448B (zh) * 2012-03-30 2016-05-04 群康科技(深圳)有限公司 基板结构、其制造方法、触控面板及显示器装置
US20150301233A1 (en) * 2012-08-31 2015-10-22 Hoya Lens Manufacturing Philippines Inc. Optical article provided with high-strength hard coat layer
USD743476S1 (en) * 2012-09-27 2015-11-17 J Moss Pillow sunglasses lens cover
USD749668S1 (en) * 2012-09-27 2016-02-16 J Moss Sunglasses lens cover
JP5896889B2 (ja) * 2012-12-07 2016-03-30 株式会社豊田自動織機 光学選択膜
CN103499888A (zh) * 2013-10-12 2014-01-08 江苏格林视通光学有限公司 一种雅兰膜镜片
CN104199129B (zh) * 2014-08-29 2016-04-20 南阳格瑞光电科技股份有限公司 一种防水防污光学透镜及其加工工艺
EP3240673B1 (en) * 2014-12-31 2024-08-07 Essilor International Method of mirror coating an optical article and article thereby obtained
JP6461313B2 (ja) 2015-03-31 2019-01-30 ホヤ レンズ タイランド リミテッドHOYA Lens Thailand Ltd 眼鏡レンズおよびその製造方法、ならびに眼鏡
JP6197833B2 (ja) * 2015-06-30 2017-09-20 株式会社豊田自動織機 太陽熱集熱管及び太陽熱発電装置
JP6881172B2 (ja) * 2017-09-13 2021-06-02 Agc株式会社 反射防止膜付透明基体、およびそれを用いた表示装置
US11156753B2 (en) 2017-12-18 2021-10-26 Viavi Solutions Inc. Optical filters
JP6799550B2 (ja) * 2018-01-16 2020-12-16 東京エレクトロン株式会社 プラズマ処理装置の部品をクリーニングする方法
KR20190108073A (ko) * 2018-03-13 2019-09-23 비아비 솔루션즈 아이엔씨. 기능적 처리에 의한 광학층의 적층부를 포함하는 광학 디바이스
CN111902561B (zh) * 2018-04-26 2022-04-08 三菱综合材料株式会社 屏蔽层、屏蔽层的制造方法及氧化物溅射靶
CN108866486B (zh) * 2018-08-19 2020-08-04 杏晖光学(厦门)有限公司 一种防刮伤硬化电镀防护面罩的制备方法
TWI733447B (zh) * 2020-05-13 2021-07-11 均霈光學股份有限公司 可釋放中紅外線鏡片及其製造方法
CN111562631B (zh) * 2020-06-23 2024-07-12 江苏万新光学有限公司 一种低应力耐高温树脂镜片及其制备方法
CN111913240A (zh) * 2020-08-11 2020-11-10 中山北方晶华精密光学有限公司 一种手机专用光学镜片及其加工方法
JP7701174B2 (ja) * 2021-03-30 2025-07-01 ホヤ レンズ タイランド リミテッド 眼鏡レンズの製造方法
US20250102834A1 (en) * 2023-09-22 2025-03-27 Hoya Optical Labs Of America, Inc. Indium tin oxide reflection control

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US4705356A (en) * 1984-07-13 1987-11-10 Optical Coating Laboratory, Inc. Thin film optical variable article having substantial color shift with angle and method
US5437931A (en) * 1993-10-20 1995-08-01 Industrial Technology Research Institute Optically variable multilayer film and optically variable pigment obtained therefrom
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EP1811335A1 (en) * 2004-09-10 2007-07-25 Shin-Etsu Chemical Co., Ltd. Photomask blank, photomask and method for producing those

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US3858977A (en) * 1972-01-18 1975-01-07 Canadian Patents Dev Optical interference authenticating means
US4705356A (en) * 1984-07-13 1987-11-10 Optical Coating Laboratory, Inc. Thin film optical variable article having substantial color shift with angle and method
US5437931A (en) * 1993-10-20 1995-08-01 Industrial Technology Research Institute Optically variable multilayer film and optically variable pigment obtained therefrom
US6296793B1 (en) * 1998-06-05 2001-10-02 Merck Patent Gesellschaft Mit Composition for preparing water-repellent coatings on optical substrates
EP1811335A1 (en) * 2004-09-10 2007-07-25 Shin-Etsu Chemical Co., Ltd. Photomask blank, photomask and method for producing those

Also Published As

Publication number Publication date
EP2209023A1 (en) 2010-07-21
CN101782663A (zh) 2010-07-21
JP2010186160A (ja) 2010-08-26
KR101657713B1 (ko) 2016-09-19
US8215766B2 (en) 2012-07-10
US20100177395A1 (en) 2010-07-15
KR20100083748A (ko) 2010-07-22
JP5489604B2 (ja) 2014-05-14

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Owner name: HOYA OPTICAL MANUFACTURING PHILIPPINES CORP.

Free format text: FORMER OWNER: SEIKO EPSON CORP.

Effective date: 20130905

C41 Transfer of patent application or patent right or utility model
TA01 Transfer of patent application right

Effective date of registration: 20130905

Address after: Philippines province of Cavite

Applicant after: SEIKO EPSON CORP.

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Applicant before: Seiko Epson Corp.

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GR01 Patent grant