CN101687740B - 2-溴-2,2-二氟乙醇和2- ( 烷基羰氧基 ) -1,1-二氟乙烷磺酸盐类的制造方法 - Google Patents
2-溴-2,2-二氟乙醇和2- ( 烷基羰氧基 ) -1,1-二氟乙烷磺酸盐类的制造方法 Download PDFInfo
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- CN101687740B CN101687740B CN200880020858.7A CN200880020858A CN101687740B CN 101687740 B CN101687740 B CN 101687740B CN 200880020858 A CN200880020858 A CN 200880020858A CN 101687740 B CN101687740 B CN 101687740B
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- alkylcarbonyloxy
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- sodium
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- 0 CBC(C(*)=O)(F)F Chemical compound CBC(C(*)=O)(F)F 0.000 description 2
- YCYYUJSJRWGUSG-UHFFFAOYSA-N BC(C(O)=O)(F)F Chemical compound BC(C(O)=O)(F)F YCYYUJSJRWGUSG-UHFFFAOYSA-N 0.000 description 1
- IVXHTCGJIIXFPY-UHFFFAOYSA-N CC(C)(C)C(OCC(N)(N)N=O)=O Chemical compound CC(C)(C)C(OCC(N)(N)N=O)=O IVXHTCGJIIXFPY-UHFFFAOYSA-N 0.000 description 1
- MTKARAVXCQSIEO-UHFFFAOYSA-N CCCCC(OCC(F)(F)S(O)(=O)=O)=O Chemical compound CCCCC(OCC(F)(F)S(O)(=O)=O)=O MTKARAVXCQSIEO-UHFFFAOYSA-N 0.000 description 1
- FRAZXTUARRODLS-UHFFFAOYSA-N CCCCC(OCC(N)(N)N=O)=O Chemical compound CCCCC(OCC(N)(N)N=O)=O FRAZXTUARRODLS-UHFFFAOYSA-N 0.000 description 1
- WLOQLWBIJZDHET-UHFFFAOYSA-N c(cc1)ccc1[S+](c1ccccc1)c1ccccc1 Chemical compound c(cc1)ccc1[S+](c1ccccc1)c1ccccc1 WLOQLWBIJZDHET-UHFFFAOYSA-N 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C309/00—Sulfonic acids; Halides, esters, or anhydrides thereof
- C07C309/01—Sulfonic acids
- C07C309/02—Sulfonic acids having sulfo groups bound to acyclic carbon atoms
- C07C309/03—Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton
- C07C309/17—Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton containing carboxyl groups bound to the carbon skeleton
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C29/00—Preparation of compounds having hydroxy or O-metal groups bound to a carbon atom not belonging to a six-membered aromatic ring
- C07C29/132—Preparation of compounds having hydroxy or O-metal groups bound to a carbon atom not belonging to a six-membered aromatic ring by reduction of an oxygen containing functional group
- C07C29/136—Preparation of compounds having hydroxy or O-metal groups bound to a carbon atom not belonging to a six-membered aromatic ring by reduction of an oxygen containing functional group of >C=O containing groups, e.g. —COOH
- C07C29/147—Preparation of compounds having hydroxy or O-metal groups bound to a carbon atom not belonging to a six-membered aromatic ring by reduction of an oxygen containing functional group of >C=O containing groups, e.g. —COOH of carboxylic acids or derivatives thereof
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C303/00—Preparation of esters or amides of sulfuric acids; Preparation of sulfonic acids or of their esters, halides, anhydrides or amides
- C07C303/32—Preparation of esters or amides of sulfuric acids; Preparation of sulfonic acids or of their esters, halides, anhydrides or amides of salts of sulfonic acids
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C309/00—Sulfonic acids; Halides, esters, or anhydrides thereof
- C07C309/01—Sulfonic acids
- C07C309/02—Sulfonic acids having sulfo groups bound to acyclic carbon atoms
- C07C309/03—Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton
- C07C309/07—Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton containing oxygen atoms bound to the carbon skeleton
- C07C309/08—Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton containing oxygen atoms bound to the carbon skeleton containing hydroxy groups bound to the carbon skeleton
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C309/00—Sulfonic acids; Halides, esters, or anhydrides thereof
- C07C309/01—Sulfonic acids
- C07C309/02—Sulfonic acids having sulfo groups bound to acyclic carbon atoms
- C07C309/03—Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton
- C07C309/07—Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton containing oxygen atoms bound to the carbon skeleton
- C07C309/12—Sulfonic acids having sulfo groups bound to acyclic carbon atoms of an acyclic saturated carbon skeleton containing oxygen atoms bound to the carbon skeleton containing esterified hydroxy groups bound to the carbon skeleton
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C31/00—Saturated compounds having hydroxy or O-metal groups bound to acyclic carbon atoms
- C07C31/34—Halogenated alcohols
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C313/00—Sulfinic acids; Sulfenic acids; Halides, esters or anhydrides thereof; Amides of sulfinic or sulfenic acids, i.e. compounds having singly-bound oxygen atoms of sulfinic or sulfenic groups replaced by nitrogen atoms, not being part of nitro or nitroso groups
- C07C313/02—Sulfinic acids; Derivatives thereof
- C07C313/04—Sulfinic acids; Esters thereof
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C381/00—Compounds containing carbon and sulfur and having functional groups not covered by groups C07C301/00 - C07C337/00
- C07C381/12—Sulfonium compounds
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C67/00—Preparation of carboxylic acid esters
- C07C67/08—Preparation of carboxylic acid esters by reacting carboxylic acids or symmetrical anhydrides with the hydroxy or O-metal group of organic compounds
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C67/00—Preparation of carboxylic acid esters
- C07C67/14—Preparation of carboxylic acid esters from carboxylic acid halides
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C69/00—Esters of carboxylic acids; Esters of carbonic or haloformic acids
- C07C69/62—Halogen-containing esters
- C07C69/65—Halogen-containing esters of unsaturated acids
- C07C69/653—Acrylic acid esters; Methacrylic acid esters; Haloacrylic acid esters; Halomethacrylic acid esters
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0047—Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C2602/00—Systems containing two condensed rings
- C07C2602/36—Systems containing two condensed rings the rings having more than two atoms in common
- C07C2602/42—Systems containing two condensed rings the rings having more than two atoms in common the bicyclo ring system containing seven carbon atoms
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C2603/00—Systems containing at least three condensed rings
- C07C2603/56—Ring systems containing bridged rings
- C07C2603/58—Ring systems containing bridged rings containing three rings
- C07C2603/70—Ring systems containing bridged rings containing three rings containing only six-membered rings
- C07C2603/74—Adamantanes
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Materials For Photolithography (AREA)
- Low-Molecular Organic Synthesis Reactions Using Catalysts (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007241606 | 2007-09-18 | ||
| JP241606/2007 | 2007-09-18 | ||
| JP2008172944A JP5347349B2 (ja) | 2007-09-18 | 2008-07-02 | 2−ブロモ−2,2−ジフルオロエタノール及び2−(アルキルカルボニルオキシ)−1,1−ジフルオロエタンスルホン酸塩類の製造方法 |
| JP172944/2008 | 2008-07-02 | ||
| PCT/JP2008/066041 WO2009037980A1 (ja) | 2007-09-18 | 2008-09-05 | 2-ブロモ-2,2-ジフルオロエタノール及び2-(アルキルカルボニルオキシ)-1,1-ジフルオロエタンスルホン酸塩類の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101687740A CN101687740A (zh) | 2010-03-31 |
| CN101687740B true CN101687740B (zh) | 2014-07-02 |
Family
ID=40663683
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200880020858.7A Active CN101687740B (zh) | 2007-09-18 | 2008-09-05 | 2-溴-2,2-二氟乙醇和2- ( 烷基羰氧基 ) -1,1-二氟乙烷磺酸盐类的制造方法 |
| CN200880024402.8A Active CN101687741B (zh) | 2007-09-18 | 2008-09-05 | 2-(烷基羰氧基)-1,1-二氟乙烷磺酸盐类及其制造方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200880024402.8A Active CN101687741B (zh) | 2007-09-18 | 2008-09-05 | 2-(烷基羰氧基)-1,1-二氟乙烷磺酸盐类及其制造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (4) | US8581009B2 (enExample) |
| JP (2) | JP5347349B2 (enExample) |
| KR (3) | KR101234680B1 (enExample) |
| CN (2) | CN101687740B (enExample) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101687781B (zh) * | 2007-02-15 | 2015-08-12 | 中央硝子株式会社 | 光产酸剂用化合物以及使用它的抗蚀剂组合物、图案形成方法 |
| JP5347349B2 (ja) * | 2007-09-18 | 2013-11-20 | セントラル硝子株式会社 | 2−ブロモ−2,2−ジフルオロエタノール及び2−(アルキルカルボニルオキシ)−1,1−ジフルオロエタンスルホン酸塩類の製造方法 |
| WO2009057769A1 (ja) * | 2007-11-01 | 2009-05-07 | Central Glass Company, Limited | 新規スルホン酸塩及びその誘導体、光酸発生剤並びにこれを用いたレジスト材料及びパターン形成方法 |
| JP5484671B2 (ja) * | 2007-12-21 | 2014-05-07 | 東京応化工業株式会社 | 新規な化合物およびその製造方法 |
| US9034556B2 (en) | 2007-12-21 | 2015-05-19 | Tokyo Ohka Kogyo Co., Ltd. | Compound and method of producing the same, acid generator, resist composition and method of forming resist pattern |
| JP4513990B2 (ja) * | 2008-01-18 | 2010-07-28 | 信越化学工業株式会社 | ポジ型レジスト材料及びパターン形成方法 |
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| KR100940915B1 (ko) * | 2008-03-13 | 2010-02-08 | 금호석유화학 주식회사 | 화학증폭형 레지스트 조성물용 산발생제 |
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| KR101115576B1 (ko) * | 2009-10-01 | 2012-03-06 | 금호석유화학 주식회사 | 술포니움 염의 제조 방법 및 이에 의하여 제조된 술포니움 염 |
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| US9182664B2 (en) | 2010-10-13 | 2015-11-10 | Central Glass Company, Limited | Polymerizable fluorine-containing sulfonate, fluorine-containing sulfonate resin, resist composition and pattern-forming method using same |
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| US9221928B2 (en) | 2011-06-20 | 2015-12-29 | Central Glass Company, Limited | Fluorine-containing sulfonate resin, fluorine-containing N-sulfonyloxyimide resin, resist composition and pattern formation method |
| JP6019849B2 (ja) | 2011-09-08 | 2016-11-02 | セントラル硝子株式会社 | 含フッ素スルホン酸塩類、含フッ素スルホン酸塩樹脂、レジスト組成物及びそれを用いたパターン形成方法 |
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| JP6002378B2 (ja) | 2011-11-24 | 2016-10-05 | 東京応化工業株式会社 | 高分子化合物の製造方法 |
| CN102775331B (zh) * | 2011-12-29 | 2013-11-27 | 河南大学 | 邻甲酸甲酯苯磺酸的绿色环保合成工艺 |
| JP5699943B2 (ja) | 2012-01-13 | 2015-04-15 | 信越化学工業株式会社 | パターン形成方法及びレジスト材料 |
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| US8795948B2 (en) | 2012-03-22 | 2014-08-05 | Tokyo Ohka Kogyo Co., Ltd. | Resist composition, method of forming resist pattern and polymeric compound |
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| CN104098444A (zh) * | 2014-07-22 | 2014-10-15 | 南通得宝氟化学有限公司 | 2,2-二氟乙醇的制备方法 |
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| JP5347371B2 (ja) | 2013-11-20 |
| JP5347349B2 (ja) | 2013-11-20 |
| JP2009091350A (ja) | 2009-04-30 |
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| US8748672B2 (en) | 2014-06-10 |
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| KR101234680B1 (ko) | 2013-02-19 |
| US8222448B2 (en) | 2012-07-17 |
| US8110711B2 (en) | 2012-02-07 |
| US20110015431A1 (en) | 2011-01-20 |
| US20130317250A1 (en) | 2013-11-28 |
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| US8581009B2 (en) | 2013-11-12 |
| US20110319652A1 (en) | 2011-12-29 |
| KR101258919B1 (ko) | 2013-05-07 |
| KR20100054870A (ko) | 2010-05-25 |
| JP2009091351A (ja) | 2009-04-30 |
| CN101687741A (zh) | 2010-03-31 |
| KR20100054868A (ko) | 2010-05-25 |
| CN101687741B (zh) | 2014-02-19 |
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