CN101640098B - 磁性薄膜及其成膜方法以及磁性薄膜的应用装置 - Google Patents

磁性薄膜及其成膜方法以及磁性薄膜的应用装置 Download PDF

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Publication number
CN101640098B
CN101640098B CN200910152089.2A CN200910152089A CN101640098B CN 101640098 B CN101640098 B CN 101640098B CN 200910152089 A CN200910152089 A CN 200910152089A CN 101640098 B CN101640098 B CN 101640098B
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China
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thin film
magnetic thin
alloy
magnetic
film according
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CN200910152089.2A
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Chinese (zh)
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CN101640098A (zh
Inventor
岛津武仁
佐藤英夫
北上修
冈本聪
青井基
片冈弘康
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Tohoku University NUC
Fuji Electric Co Ltd
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Tohoku University NUC
Fuji Electric Co Ltd
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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
    • G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
    • G11B5/656—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing Co
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
    • H01F10/12—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
    • H01F10/16—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys containing cobalt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00—Galvanomagnetic devices
    • H10N50/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00—Galvanomagnetic devices
    • H10N50/10—Magnetoresistive devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00—Galvanomagnetic devices
    • H10N50/80—Constructional details
    • H10N50/85—Materials of the active region
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/74—Record carriers characterised by the form, e.g. sheet shaped to wrap around a drum
    • G11B5/82—Disk carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
    • H01F10/3254—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the spacer being semiconducting or insulating, e.g. for spin tunnel junction [STJ]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
    • H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
    • H01F10/3286—Spin-exchange coupled multilayers having at least one layer with perpendicular magnetic anisotropy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/11—Magnetic recording head
    • Y10T428/115—Magnetic layer composition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/32—Composite [nonstructural laminate] of inorganic material having metal-compound-containing layer and having defined magnetic layer

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
  • Magnetic Heads (AREA)
  • Hall/Mr Elements (AREA)
CN200910152089.2A 2008-07-28 2009-07-28 磁性薄膜及其成膜方法以及磁性薄膜的应用装置 Active CN101640098B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008193156 2008-07-28
JP2008193156A JP5067739B2 (ja) 2008-07-28 2008-07-28 磁性薄膜とその成膜方法並びに磁性薄膜の応用デバイス
JP2008-193156 2008-07-28

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CN101640098A CN101640098A (zh) 2010-02-03
CN101640098B true CN101640098B (zh) 2013-05-29

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US (1) US8076012B2 (enExample)
JP (1) JP5067739B2 (enExample)
CN (1) CN101640098B (enExample)

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JP5550007B2 (ja) * 2008-12-05 2014-07-16 国立大学法人東北大学 磁性薄膜及びその製造方法、並びにこのような磁性薄膜を用いた各種応用デバイス
CN102163433B (zh) * 2010-02-23 2013-12-25 昭和电工株式会社 热辅助磁记录介质和磁存储装置
JP5570270B2 (ja) * 2010-03-29 2014-08-13 昭和電工株式会社 熱アシスト磁気記録媒体及び磁気記憶装置
JP5346348B2 (ja) * 2011-02-23 2013-11-20 株式会社日立製作所 磁気記録媒体、磁気記録装置
US8481181B2 (en) 2011-03-31 2013-07-09 Seagate Technology Llc Exchange coupled magnetic elements
US8742518B2 (en) 2011-03-31 2014-06-03 Seagate Technology Llc Magnetic tunnel junction with free layer having exchange coupled magnetic elements
JP5901975B2 (ja) * 2012-01-13 2016-04-13 株式会社東芝 情報記録装置、及び情報記録方法
TWI514373B (zh) * 2012-02-15 2015-12-21 Ind Tech Res Inst 上固定型垂直磁化穿隧磁阻元件
KR102017623B1 (ko) * 2012-08-30 2019-09-03 삼성전자주식회사 자기 메모리 소자
JP6083163B2 (ja) 2012-09-11 2017-02-22 富士電機株式会社 垂直磁気記録媒体およびその製造方法
WO2014087665A1 (ja) 2012-12-06 2014-06-12 富士電機株式会社 垂直磁気記録媒体
WO2020090914A1 (ja) * 2018-10-30 2020-05-07 田中貴金属工業株式会社 面内磁化膜、面内磁化膜多層構造、ハードバイアス層、磁気抵抗効果素子、およびスパッタリングターゲット
WO2020230771A1 (ja) * 2019-05-16 2020-11-19 Tdk株式会社 磁壁移動素子及び磁気記録アレイ

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JP3434476B2 (ja) 1999-09-29 2003-08-11 秋田県 高密度情報記録媒体及びその媒体の製造方法
JP3762277B2 (ja) * 2000-09-29 2006-04-05 キヤノン株式会社 磁気記録媒体及びその製造方法
JP2002208129A (ja) 2000-11-09 2002-07-26 Hitachi Maxell Ltd 磁気記録媒体及びその製造方法並びに磁気記録装置
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JP4199194B2 (ja) 2002-10-10 2008-12-17 富士通株式会社 多結晶構造膜の製造方法
JP4207769B2 (ja) * 2002-12-20 2009-01-14 富士電機デバイステクノロジー株式会社 垂直磁気記録媒体およびその製造方法
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JP2004311607A (ja) 2003-04-04 2004-11-04 Canon Inc 磁性体、磁気記録媒体、磁気記録再生装置、情報処理装置及びその製造方法
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JP5067739B2 (ja) 2012-11-07
US20100055503A1 (en) 2010-03-04
JP2010034182A (ja) 2010-02-12
CN101640098A (zh) 2010-02-03
US8076012B2 (en) 2011-12-13

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Address after: Miyagi Prefecture in Japan

Applicant after: Tokoku University of National University Corp.

Co-applicant after: Fuji Electric Co., Ltd.

Address before: Miyagi Prefecture in Japan

Applicant before: Tokoku University of National University Corp.

Co-applicant before: Fuji Electronic Device Technol

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