CN101617190B - 用于快速热处理腔室的灯 - Google Patents

用于快速热处理腔室的灯 Download PDF

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Publication number
CN101617190B
CN101617190B CN200880005300.1A CN200880005300A CN101617190B CN 101617190 B CN101617190 B CN 101617190B CN 200880005300 A CN200880005300 A CN 200880005300A CN 101617190 B CN101617190 B CN 101617190B
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CN
China
Prior art keywords
potting compound
lamp assembly
sleeve
lamp
thermal conductivity
Prior art date
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Application number
CN200880005300.1A
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English (en)
Chinese (zh)
Other versions
CN101617190A (zh
Inventor
J·M·瑞尼西
K·索拉吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
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Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to CN201110125224.1A priority Critical patent/CN102306619B/zh
Publication of CN101617190A publication Critical patent/CN101617190A/zh
Application granted granted Critical
Publication of CN101617190B publication Critical patent/CN101617190B/zh
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01K—ELECTRIC INCANDESCENT LAMPS
    • H01K1/00—Details
    • H01K1/58—Cooling arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01K—ELECTRIC INCANDESCENT LAMPS
    • H01K1/00—Details
    • H01K1/42—Means forming part of the lamp for the purpose of providing electrical connection, or support for, the lamp
    • H01K1/46—Means forming part of the lamp for the purpose of providing electrical connection, or support for, the lamp supported by a separate part, e.g. base, cap
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0436—Apparatus for thermal treatment mainly by radiation

Landscapes

  • Resistance Heating (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
CN200880005300.1A 2007-02-15 2008-02-14 用于快速热处理腔室的灯 Active CN101617190B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201110125224.1A CN102306619B (zh) 2007-02-15 2008-02-14 用于快速热处理腔室的灯

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/675,145 US7612491B2 (en) 2007-02-15 2007-02-15 Lamp for rapid thermal processing chamber
US11/675,145 2007-02-15
PCT/US2008/053905 WO2008101044A2 (en) 2007-02-15 2008-02-14 Lamp for rapid thermal processing chamber

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201110125224.1A Division CN102306619B (zh) 2007-02-15 2008-02-14 用于快速热处理腔室的灯

Publications (2)

Publication Number Publication Date
CN101617190A CN101617190A (zh) 2009-12-30
CN101617190B true CN101617190B (zh) 2016-01-20

Family

ID=39690784

Family Applications (2)

Application Number Title Priority Date Filing Date
CN200880005300.1A Active CN101617190B (zh) 2007-02-15 2008-02-14 用于快速热处理腔室的灯
CN201110125224.1A Active CN102306619B (zh) 2007-02-15 2008-02-14 用于快速热处理腔室的灯

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201110125224.1A Active CN102306619B (zh) 2007-02-15 2008-02-14 用于快速热处理腔室的灯

Country Status (6)

Country Link
US (2) US7612491B2 (enExample)
EP (1) EP2115371A2 (enExample)
JP (3) JP2010519736A (enExample)
CN (2) CN101617190B (enExample)
TW (1) TWI351712B (enExample)
WO (1) WO2008101044A2 (enExample)

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US9635713B2 (en) * 2005-05-18 2017-04-25 Judco Manufacturing, Inc. Cordless handheld heater
EP2111082A1 (en) * 2007-02-02 2009-10-21 Panasonic Corporation Heat generating body unit and heating apparatus
JP6038503B2 (ja) * 2011-07-01 2016-12-07 株式会社日立国際電気 基板処理装置及び半導体装置の製造方法
US9232622B2 (en) 2013-02-22 2016-01-05 Kla-Tencor Corporation Gas refraction compensation for laser-sustained plasma bulbs
US10405375B2 (en) * 2013-03-11 2019-09-03 Applied Materials, Inc. Lamphead PCB with flexible standoffs
US9613835B2 (en) * 2013-03-15 2017-04-04 Applied Materials, Inc. Heating lamp assembly
US9842753B2 (en) * 2013-04-26 2017-12-12 Applied Materials, Inc. Absorbing lamphead face
JP6431073B2 (ja) * 2013-12-19 2018-11-28 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 交換可能ランプ向けのアダプタ
US9462636B2 (en) * 2013-12-31 2016-10-04 Applied Materials, Inc. RTP lamp base with removal features
US10026630B2 (en) * 2014-05-27 2018-07-17 Applied Materials, Inc. Retention and insulation features for lamp
US11184954B2 (en) * 2017-10-03 2021-11-23 Altria Client Services Llc Heater for aerosol-generating device with connectors
CN111050582B (zh) 2017-10-03 2023-11-24 菲利普莫里斯生产公司 用于带连接器的气溶胶生成装置的加热器
KR20250174900A (ko) 2020-03-02 2025-12-15 어플라이드 머티어리얼스, 인코포레이티드 급속 열 어닐링 램프들을 위한 원뿔형 코일
TWI908777B (zh) 2020-03-13 2025-12-21 美商應用材料股份有限公司 用於檢查燈的設備及方法
US12198922B2 (en) 2020-03-13 2025-01-14 Applied Materials, Inc. Lamp filament having a pitch gradient and method of making

Citations (2)

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Publication number Priority date Publication date Assignee Title
US6707011B2 (en) * 2001-04-17 2004-03-16 Mattson Technology, Inc. Rapid thermal processing system for integrated circuits
WO2006036644A2 (en) * 2004-09-27 2006-04-06 Applied Materials, Inc. Lamp array for thermal processing exhibiting improved radial uniformity

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US4360862A (en) * 1980-12-12 1982-11-23 Gulf & Western Manufacturing Company Nautical light
NL8102594A (nl) * 1981-05-27 1982-12-16 Philips Nv Elektrische lamp met een mechanisch bevestigde lampvoet.
DE3221290A1 (de) * 1982-06-05 1983-12-08 Philips Patentverwaltung Gmbh, 2000 Hamburg Elektrische lampe mit einem huelsenfoermigen sockel
JPS5980959U (ja) * 1982-11-25 1984-05-31 ウシオ電機株式会社 電球の絶縁構造
US4791290A (en) * 1984-10-18 1988-12-13 Sean Noone Photoelectric control unit with cooling chamber
US4647137A (en) * 1985-03-26 1987-03-03 Voltarc Tubes, Inc. Lamp base connector assembly
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JPH0735296Y2 (ja) * 1989-01-30 1995-08-09 株式会社小糸製作所 口金付電球
JP2940047B2 (ja) * 1989-02-14 1999-08-25 株式会社日本自動車部品総合研究所 熱処理装置および熱処理方法
US5245246A (en) * 1991-12-09 1993-09-14 Bhk, Inc. Gas discharge lamp temperature control
JP2877241B2 (ja) * 1992-06-24 1999-03-31 松下電子工業株式会社 反射鏡付き白熱電球
JP3042229B2 (ja) * 1992-09-29 2000-05-15 富士電機株式会社 基板加熱装置
US5506761A (en) * 1994-03-01 1996-04-09 Strauss; Gary J. Lighting fixture and modular lighting system incorporating same
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US6286206B1 (en) * 1997-02-25 2001-09-11 Chou H. Li Heat-resistant electronic systems and circuit boards
JPH11116899A (ja) * 1997-10-13 1999-04-27 Nishimura Togyo Kk 放熱性無機接着剤
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JP3555536B2 (ja) * 2000-01-31 2004-08-18 ウシオ電機株式会社 ランプユニット
US6679619B2 (en) * 2000-02-18 2004-01-20 Carl Saieva High intensity discharge (HID) lamp with integral ballast and underwater lighting systems incorporating same
US6805466B1 (en) * 2000-06-16 2004-10-19 Applied Materials, Inc. Lamphead for a rapid thermal processing chamber
WO2002003418A1 (en) 2000-06-30 2002-01-10 Applied Materials, Inc. Lamp for a rapid thermal processing chamber
US6612728B2 (en) * 2000-07-07 2003-09-02 Truck-Lite Co., Inc. Marker lamp with picture frame optics
US6744187B1 (en) * 2001-12-05 2004-06-01 Randal L. Wimberly Lamp assembly with internal reflector
DE10342801A1 (de) * 2003-09-16 2005-04-28 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Zweiseitig verschlossene elektrische Lampe und Verfahren zu deren Herstellung
US7147359B2 (en) * 2004-06-25 2006-12-12 Applied Materials, Inc. Lamp assembly having flexibly positioned rigid plug
CN101015036A (zh) * 2004-09-10 2007-08-08 皇家飞利浦电子股份有限公司 卤素灯
US7112763B2 (en) * 2004-10-26 2006-09-26 Applied Materials, Inc. Method and apparatus for low temperature pyrometry useful for thermally processing silicon wafers

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
US6707011B2 (en) * 2001-04-17 2004-03-16 Mattson Technology, Inc. Rapid thermal processing system for integrated circuits
WO2006036644A2 (en) * 2004-09-27 2006-04-06 Applied Materials, Inc. Lamp array for thermal processing exhibiting improved radial uniformity

Also Published As

Publication number Publication date
WO2008101044A2 (en) 2008-08-21
CN101617190A (zh) 2009-12-30
TW200845105A (en) 2008-11-16
JP2012124173A (ja) 2012-06-28
TWI351712B (en) 2011-11-01
JP5755579B2 (ja) 2015-07-29
JP2010519736A (ja) 2010-06-03
CN102306619B (zh) 2016-01-20
WO2008101044A3 (en) 2008-10-23
JP5865531B2 (ja) 2016-02-17
JP2015146313A (ja) 2015-08-13
US20080199162A1 (en) 2008-08-21
US7612491B2 (en) 2009-11-03
EP2115371A2 (en) 2009-11-11
CN102306619A (zh) 2012-01-04
USRE44712E1 (en) 2014-01-21

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SE01 Entry into force of request for substantive examination
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Address after: American California

Applicant after: Applied Materials Inc.

Address before: American California

Applicant before: Applied Materials Inc.

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