TWI351712B - Lamp for rapid thermal processing chamber - Google Patents

Lamp for rapid thermal processing chamber Download PDF

Info

Publication number
TWI351712B
TWI351712B TW097103789A TW97103789A TWI351712B TW I351712 B TWI351712 B TW I351712B TW 097103789 A TW097103789 A TW 097103789A TW 97103789 A TW97103789 A TW 97103789A TW I351712 B TWI351712 B TW I351712B
Authority
TW
Taiwan
Prior art keywords
lamp assembly
encapsulating compound
compound
lamp
sleeve
Prior art date
Application number
TW097103789A
Other languages
English (en)
Chinese (zh)
Other versions
TW200845105A (en
Inventor
Joseph Michal Ranish
Khurshed Sorabji
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of TW200845105A publication Critical patent/TW200845105A/zh
Application granted granted Critical
Publication of TWI351712B publication Critical patent/TWI351712B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01K—ELECTRIC INCANDESCENT LAMPS
    • H01K1/00—Details
    • H01K1/58—Cooling arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01K—ELECTRIC INCANDESCENT LAMPS
    • H01K1/00—Details
    • H01K1/42—Means forming part of the lamp for the purpose of providing electrical connection, or support for, the lamp
    • H01K1/46—Means forming part of the lamp for the purpose of providing electrical connection, or support for, the lamp supported by a separate part, e.g. base, cap
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0436—Apparatus for thermal treatment mainly by radiation

Landscapes

  • Resistance Heating (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
TW097103789A 2007-02-15 2008-01-31 Lamp for rapid thermal processing chamber TWI351712B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/675,145 US7612491B2 (en) 2007-02-15 2007-02-15 Lamp for rapid thermal processing chamber

Publications (2)

Publication Number Publication Date
TW200845105A TW200845105A (en) 2008-11-16
TWI351712B true TWI351712B (en) 2011-11-01

Family

ID=39690784

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097103789A TWI351712B (en) 2007-02-15 2008-01-31 Lamp for rapid thermal processing chamber

Country Status (6)

Country Link
US (2) US7612491B2 (enExample)
EP (1) EP2115371A2 (enExample)
JP (3) JP2010519736A (enExample)
CN (2) CN101617190B (enExample)
TW (1) TWI351712B (enExample)
WO (1) WO2008101044A2 (enExample)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9635713B2 (en) * 2005-05-18 2017-04-25 Judco Manufacturing, Inc. Cordless handheld heater
EP2111082A1 (en) * 2007-02-02 2009-10-21 Panasonic Corporation Heat generating body unit and heating apparatus
JP6038503B2 (ja) * 2011-07-01 2016-12-07 株式会社日立国際電気 基板処理装置及び半導体装置の製造方法
US9232622B2 (en) 2013-02-22 2016-01-05 Kla-Tencor Corporation Gas refraction compensation for laser-sustained plasma bulbs
US10405375B2 (en) * 2013-03-11 2019-09-03 Applied Materials, Inc. Lamphead PCB with flexible standoffs
US9613835B2 (en) * 2013-03-15 2017-04-04 Applied Materials, Inc. Heating lamp assembly
US9842753B2 (en) * 2013-04-26 2017-12-12 Applied Materials, Inc. Absorbing lamphead face
JP6431073B2 (ja) * 2013-12-19 2018-11-28 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 交換可能ランプ向けのアダプタ
US9462636B2 (en) * 2013-12-31 2016-10-04 Applied Materials, Inc. RTP lamp base with removal features
US10026630B2 (en) * 2014-05-27 2018-07-17 Applied Materials, Inc. Retention and insulation features for lamp
US11184954B2 (en) * 2017-10-03 2021-11-23 Altria Client Services Llc Heater for aerosol-generating device with connectors
CN111050582B (zh) 2017-10-03 2023-11-24 菲利普莫里斯生产公司 用于带连接器的气溶胶生成装置的加热器
KR20250174900A (ko) 2020-03-02 2025-12-15 어플라이드 머티어리얼스, 인코포레이티드 급속 열 어닐링 램프들을 위한 원뿔형 코일
TWI908777B (zh) 2020-03-13 2025-12-21 美商應用材料股份有限公司 用於檢查燈的設備及方法
US12198922B2 (en) 2020-03-13 2025-01-14 Applied Materials, Inc. Lamp filament having a pitch gradient and method of making

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JPS5980959U (ja) * 1982-11-25 1984-05-31 ウシオ電機株式会社 電球の絶縁構造
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US5245246A (en) * 1991-12-09 1993-09-14 Bhk, Inc. Gas discharge lamp temperature control
JP2877241B2 (ja) * 1992-06-24 1999-03-31 松下電子工業株式会社 反射鏡付き白熱電球
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US5506761A (en) * 1994-03-01 1996-04-09 Strauss; Gary J. Lighting fixture and modular lighting system incorporating same
US5754055A (en) * 1996-01-04 1998-05-19 Mission Research Corporation Lubricating fluid condition monitor
US6072160A (en) * 1996-06-03 2000-06-06 Applied Materials, Inc. Method and apparatus for enhancing the efficiency of radiant energy sources used in rapid thermal processing of substrates by energy reflection
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JPH11116899A (ja) * 1997-10-13 1999-04-27 Nishimura Togyo Kk 放熱性無機接着剤
DE19842795A1 (de) * 1998-09-18 2000-03-23 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Leuchtstofflampe
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JP3555536B2 (ja) * 2000-01-31 2004-08-18 ウシオ電機株式会社 ランプユニット
US6679619B2 (en) * 2000-02-18 2004-01-20 Carl Saieva High intensity discharge (HID) lamp with integral ballast and underwater lighting systems incorporating same
US6805466B1 (en) * 2000-06-16 2004-10-19 Applied Materials, Inc. Lamphead for a rapid thermal processing chamber
WO2002003418A1 (en) 2000-06-30 2002-01-10 Applied Materials, Inc. Lamp for a rapid thermal processing chamber
US6612728B2 (en) * 2000-07-07 2003-09-02 Truck-Lite Co., Inc. Marker lamp with picture frame optics
US6707011B2 (en) * 2001-04-17 2004-03-16 Mattson Technology, Inc. Rapid thermal processing system for integrated circuits
US6744187B1 (en) * 2001-12-05 2004-06-01 Randal L. Wimberly Lamp assembly with internal reflector
DE10342801A1 (de) * 2003-09-16 2005-04-28 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Zweiseitig verschlossene elektrische Lampe und Verfahren zu deren Herstellung
US7147359B2 (en) * 2004-06-25 2006-12-12 Applied Materials, Inc. Lamp assembly having flexibly positioned rigid plug
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US7509035B2 (en) * 2004-09-27 2009-03-24 Applied Materials, Inc. Lamp array for thermal processing exhibiting improved radial uniformity
US7112763B2 (en) * 2004-10-26 2006-09-26 Applied Materials, Inc. Method and apparatus for low temperature pyrometry useful for thermally processing silicon wafers

Also Published As

Publication number Publication date
WO2008101044A2 (en) 2008-08-21
CN101617190A (zh) 2009-12-30
TW200845105A (en) 2008-11-16
JP2012124173A (ja) 2012-06-28
CN101617190B (zh) 2016-01-20
JP5755579B2 (ja) 2015-07-29
JP2010519736A (ja) 2010-06-03
CN102306619B (zh) 2016-01-20
WO2008101044A3 (en) 2008-10-23
JP5865531B2 (ja) 2016-02-17
JP2015146313A (ja) 2015-08-13
US20080199162A1 (en) 2008-08-21
US7612491B2 (en) 2009-11-03
EP2115371A2 (en) 2009-11-11
CN102306619A (zh) 2012-01-04
USRE44712E1 (en) 2014-01-21

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