CN101479206B - 人造石英部件、制造该人造石英部件的方法以及包括该人造石英部件的光学元件 - Google Patents

人造石英部件、制造该人造石英部件的方法以及包括该人造石英部件的光学元件 Download PDF

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Publication number
CN101479206B
CN101479206B CN2007800225624A CN200780022562A CN101479206B CN 101479206 B CN101479206 B CN 101479206B CN 2007800225624 A CN2007800225624 A CN 2007800225624A CN 200780022562 A CN200780022562 A CN 200780022562A CN 101479206 B CN101479206 B CN 101479206B
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China
Prior art keywords
optical element
artificial quartz
quartz member
wavelength
artificial
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CN2007800225624A
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Chinese (zh)
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CN101479206A (zh
Inventor
阿形纪之
菊川信也
清水汤隆
吉田和美
西本正俊
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Murata Manufacturing Co Ltd
AGC Inc
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Asahi Glass Co Ltd
Tokyo Denpa Co Ltd
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Publication of CN101479206A publication Critical patent/CN101479206A/zh
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/16—Oxides
    • C30B29/18—Quartz
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B7/00—Single-crystal growth from solutions using solvents which are liquid at normal temperature, e.g. aqueous solutions
    • C30B7/10—Single-crystal growth from solutions using solvents which are liquid at normal temperature, e.g. aqueous solutions by application of pressure, e.g. hydrothermal processes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/02—Pure silica glass, e.g. pure fused quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/06—Doped silica-based glasses
    • C03C2201/30—Doped silica-based glasses containing metals
    • C03C2201/32—Doped silica-based glasses containing metals containing aluminium
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/06—Doped silica-based glasses
    • C03C2201/30—Doped silica-based glasses containing metals
    • C03C2201/50—Doped silica-based glasses containing metals containing alkali metals
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1004—Apparatus with means for measuring, testing, or sensing
    • Y10T117/1008—Apparatus with means for measuring, testing, or sensing with responsive control means

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Glass Compositions (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Silicon Compounds (AREA)
CN2007800225624A 2006-06-16 2007-06-13 人造石英部件、制造该人造石英部件的方法以及包括该人造石英部件的光学元件 Active CN101479206B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP167890/2006 2006-06-16
JP2006167890A JP4316589B2 (ja) 2006-06-16 2006-06-16 人工水晶部材およびその製造方法、ならびにそれを用いた光学素子
PCT/JP2007/062366 WO2007145369A1 (en) 2006-06-16 2007-06-13 Artificial quartz member, process for producing the same, and optical element comprising the same

Publications (2)

Publication Number Publication Date
CN101479206A CN101479206A (zh) 2009-07-08
CN101479206B true CN101479206B (zh) 2012-12-19

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN2007800225624A Active CN101479206B (zh) 2006-06-16 2007-06-13 人造石英部件、制造该人造石英部件的方法以及包括该人造石英部件的光学元件

Country Status (6)

Country Link
US (1) US8257675B2 (ja)
EP (1) EP2038229B1 (ja)
JP (1) JP4316589B2 (ja)
CN (1) CN101479206B (ja)
RU (1) RU2441840C2 (ja)
WO (1) WO2007145369A1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5042907B2 (ja) * 2007-11-03 2012-10-03 日本電波工業株式会社 光学部材用人工水晶の製造方法、光学部材用人工水晶、耐放射線人工水晶の製造方法及び耐放射線人工水晶
JP2009137828A (ja) * 2007-11-15 2009-06-25 Nippon Dempa Kogyo Co Ltd 水晶デバイス
US10952942B2 (en) 2015-09-03 2021-03-23 International Business Machines Corporation Plasmonic enhancement of zinc oxide light absorption for sunscreen applications
WO2020012733A1 (ja) * 2018-07-09 2020-01-16 株式会社村田製作所 人工水晶部材及びそれを用いた光学素子

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4956047A (en) * 1988-08-08 1990-09-11 The United States Of America As Represented By The Secretary Of The Air Force Process of making high quality single quartz crystal using silica glass nutrient

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3757476B2 (ja) * 1996-08-05 2006-03-22 株式会社ニコン 石英ガラス光学部材、その製造方法、及び投影露光装置
JP3393063B2 (ja) * 1998-04-21 2003-04-07 信越石英株式会社 不純物金属遮蔽用耐熱性合成シリカガラス及びその製造方法
TW581747B (en) * 1999-02-16 2004-04-01 Nikon Corp Synthetic quartz glass optical member for ultraviolet light
JP2001010897A (ja) 1999-06-28 2001-01-16 Meidensha Corp 人工水晶の製造方法
EP1456143A1 (en) 2001-12-21 2004-09-15 Corning Incorporated Fused silica containing aluminum
US6672111B2 (en) * 2001-12-21 2004-01-06 Corning Incorporated Method and apparatus for adding metals to fused silica
AU2003235105A1 (en) * 2002-04-23 2003-11-10 Asahi Glass Company, Limited Synthetic quartz glass for optical member, projection exposure device, and projection exposure method
JP4666157B2 (ja) * 2003-07-10 2011-04-06 株式会社ニコン 人工水晶部材、露光装置、及び露光装置の製造方法
JP4470479B2 (ja) 2003-12-17 2010-06-02 旭硝子株式会社 光学部材用合成石英ガラスおよびその製造方法
EP1979279A1 (en) 2006-01-30 2008-10-15 Asahi Glass Co., Ltd. Synthetic quartz glass with fast axes of birefringence distributed in concentric-circle tangent directions and process for producing the same
EP1979283A1 (en) 2006-01-30 2008-10-15 Asahi Glass Company, Limited Synthetic quartz glass with radial distribution of fast axes of birefringence and process for producing the same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4956047A (en) * 1988-08-08 1990-09-11 The United States Of America As Represented By The Secretary Of The Air Force Process of making high quality single quartz crystal using silica glass nutrient

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP特开平10-53432A 1998.02.24

Also Published As

Publication number Publication date
WO2007145369A1 (en) 2007-12-21
RU2009101197A (ru) 2010-07-27
JP4316589B2 (ja) 2009-08-19
JP2007332000A (ja) 2007-12-27
CN101479206A (zh) 2009-07-08
RU2441840C2 (ru) 2012-02-10
EP2038229B1 (en) 2011-11-30
US20090104103A1 (en) 2009-04-23
EP2038229A1 (en) 2009-03-25
US8257675B2 (en) 2012-09-04

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C06 Publication
PB01 Publication
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SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
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Owner name: MURATA MANUFACTURING CO. LTD.

Free format text: FORMER OWNER: TOKYO DENPA KK

Effective date: 20141104

C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20141104

Address after: Kyoto Japan

Patentee after: Murata Manufacturing Co., Ltd.

Patentee after: Asahi Glass Co., Ltd.

Address before: Tokyo, Japan

Patentee before: Tokyo Denpa KK

Patentee before: Asahi Glass Co., Ltd.

CP01 Change in the name or title of a patent holder

Address after: Kyoto Japan

Co-patentee after: AGC Corporation

Patentee after: Murata Manufacturing Co., Ltd.

Address before: Kyoto Japan

Co-patentee before: Asahi Glass Co., Ltd.

Patentee before: Murata Manufacturing Co., Ltd.

CP01 Change in the name or title of a patent holder