CN101460653B - 高强度光记录介质保护膜形成用溅镀靶材 - Google Patents

高强度光记录介质保护膜形成用溅镀靶材 Download PDF

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CN101460653B
CN101460653B CN2007800210934A CN200780021093A CN101460653B CN 101460653 B CN101460653 B CN 101460653B CN 2007800210934 A CN2007800210934 A CN 2007800210934A CN 200780021093 A CN200780021093 A CN 200780021093A CN 101460653 B CN101460653 B CN 101460653B
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target material
composition
optical recording
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protective film
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CN101460653A (zh
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张守斌
佐佐木勇人
小见山昌三
三岛昭史
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Mitsubishi Materials Corp
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  • Manufacturing Optical Record Carriers (AREA)
  • Compositions Of Oxide Ceramics (AREA)
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WO2007142333A1 (ja) 2007-12-13
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JP5088464B2 (ja) 2012-12-05
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