CN101458966B - 存储器及半导体装置 - Google Patents

存储器及半导体装置 Download PDF

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Publication number
CN101458966B
CN101458966B CN200810190316.6A CN200810190316A CN101458966B CN 101458966 B CN101458966 B CN 101458966B CN 200810190316 A CN200810190316 A CN 200810190316A CN 101458966 B CN101458966 B CN 101458966B
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CN
China
Prior art keywords
state
layer
electrode
antifuse
memory
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200810190316.6A
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English (en)
Chinese (zh)
Other versions
CN101458966A (zh
Inventor
德永肇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Publication of CN101458966A publication Critical patent/CN101458966A/zh
Application granted granted Critical
Publication of CN101458966B publication Critical patent/CN101458966B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49855Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers for flat-cards, e.g. credit cards
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B63/00Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C17/00Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards
    • G11C17/14Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM
    • G11C17/16Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM using electrically-fusible links
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/525Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections
    • H01L23/5252Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections comprising anti-fuses, i.e. connections having their state changed from non-conductive to conductive
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/6729Thin-film transistors [TFT] characterised by the electrodes
    • H10D30/6737Thin-film transistors [TFT] characterised by the electrodes characterised by the electrode materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • H10D30/674Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6741Group IV materials, e.g. germanium or silicon carbide
    • H10D30/6743Silicon
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/441Interconnections, e.g. scanning lines
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Semiconductor Memories (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Read Only Memory (AREA)
CN200810190316.6A 2007-12-14 2008-12-15 存储器及半导体装置 Expired - Fee Related CN101458966B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007-323241 2007-12-14
JP2007323241 2007-12-14
JP2007323241 2007-12-14

Publications (2)

Publication Number Publication Date
CN101458966A CN101458966A (zh) 2009-06-17
CN101458966B true CN101458966B (zh) 2015-04-01

Family

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Family Applications (1)

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CN200810190316.6A Expired - Fee Related CN101458966B (zh) 2007-12-14 2008-12-15 存储器及半导体装置

Country Status (4)

Country Link
US (1) US8735885B2 (enExample)
JP (1) JP5371400B2 (enExample)
CN (1) CN101458966B (enExample)
TW (1) TWI478408B (enExample)

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US20090193676A1 (en) * 2008-01-31 2009-08-06 Guo Shengguang Shoe Drying Apparatus
JP5641840B2 (ja) * 2009-10-01 2014-12-17 株式会社半導体エネルギー研究所 半導体装置
US8519509B2 (en) * 2010-04-16 2013-08-27 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US9342775B2 (en) * 2011-11-01 2016-05-17 Avery Dennison Corporation Dual mode chip having radio frequency identification and electronic article surveillance capability
CN104463266B (zh) * 2014-10-31 2018-07-10 江苏凯路威电子科技有限公司 Rfid防伪方法及芯片
US10476680B2 (en) * 2016-02-03 2019-11-12 Ememory Technology Inc. Electronic device with self-protection and anti-cloning capabilities and related method
CN106372498B (zh) * 2016-09-05 2020-08-28 新华三技术有限公司 一种软件保护的方法和装置
US10446248B1 (en) 2018-04-23 2019-10-15 Micron Technology, Inc. Non-volatile memory devices and systems with read-only memory features and methods for operating the same
US11049565B2 (en) * 2018-04-23 2021-06-29 Micron Technology, Inc. Non-volatile memory devices and systems with volatile memory features and methods for operating the same
CN113540076B (zh) * 2021-07-20 2024-11-05 立讯电子科技(昆山)有限公司 一种开关元件和电子设备

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CN1169016A (zh) * 1996-03-01 1997-12-31 三菱电机株式会社 半导体存储装置
CN1519861A (zh) * 2003-01-10 2004-08-11 ���µ�����ҵ��ʽ���� 半导体存储装置

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JPS60117660A (ja) 1983-11-30 1985-06-25 Fujitsu Ltd 半導体記憶装置
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EP0592078A1 (en) * 1992-09-23 1994-04-13 Actel Corporation Antifuse element and fabrication method
US5426614A (en) * 1994-01-13 1995-06-20 Texas Instruments Incorporated Memory cell with programmable antifuse technology
JPH07263647A (ja) * 1994-02-04 1995-10-13 Canon Inc 電子回路装置
US5468680A (en) * 1994-03-18 1995-11-21 Massachusetts Institute Of Technology Method of making a three-terminal fuse
JP3501416B2 (ja) 1994-04-28 2004-03-02 忠弘 大見 半導体装置
DE69700241T2 (de) 1996-03-01 1999-11-04 Mitsubishi Denki K.K., Tokio/Tokyo Halbleiterspeichergerät, um Fehlfunktion durch Zeilenauswahlleitungsunterbrechung zu vermeiden
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CN1519861A (zh) * 2003-01-10 2004-08-11 ���µ�����ҵ��ʽ���� 半导体存储装置

Also Published As

Publication number Publication date
CN101458966A (zh) 2009-06-17
JP2009164587A (ja) 2009-07-23
US8735885B2 (en) 2014-05-27
TW200937692A (en) 2009-09-01
US20090152549A1 (en) 2009-06-18
TWI478408B (zh) 2015-03-21
JP5371400B2 (ja) 2013-12-18

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Granted publication date: 20150401

Termination date: 20201215