CN101396898B - 感光性层叠体的制造装置和制造方法 - Google Patents

感光性层叠体的制造装置和制造方法 Download PDF

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Publication number
CN101396898B
CN101396898B CN2008101689302A CN200810168930A CN101396898B CN 101396898 B CN101396898 B CN 101396898B CN 2008101689302 A CN2008101689302 A CN 2008101689302A CN 200810168930 A CN200810168930 A CN 200810168930A CN 101396898 B CN101396898 B CN 101396898B
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CN
China
Prior art keywords
heating
substrate
temperature
glass substrate
photosensitive laminate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2008101689302A
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English (en)
Chinese (zh)
Other versions
CN101396898A (zh
Inventor
远藤惠介
中泽直子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
Original Assignee
Fujifilm Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Corp filed Critical Fujifilm Corp
Publication of CN101396898A publication Critical patent/CN101396898A/zh
Application granted granted Critical
Publication of CN101396898B publication Critical patent/CN101396898B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/02—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by a sequence of laminating steps, e.g. by adding new layers at consecutive laminating stations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/0046—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by constructional aspects of the apparatus
    • B32B37/0053—Constructional details of laminating machines comprising rollers; Constructional features of the rollers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/06—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the heating method
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/10—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/40—Properties of the layers or laminate having particular optical properties

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Materials For Photolithography (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Laminated Bodies (AREA)
CN2008101689302A 2007-09-28 2008-09-27 感光性层叠体的制造装置和制造方法 Expired - Fee Related CN101396898B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007252930A JP4987656B2 (ja) 2007-09-28 2007-09-28 感光性積層体の製造装置及び製造方法
JP2007252930 2007-09-28
JP2007-252930 2007-09-28

Publications (2)

Publication Number Publication Date
CN101396898A CN101396898A (zh) 2009-04-01
CN101396898B true CN101396898B (zh) 2012-10-10

Family

ID=40515854

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008101689302A Expired - Fee Related CN101396898B (zh) 2007-09-28 2008-09-27 感光性层叠体的制造装置和制造方法

Country Status (4)

Country Link
JP (1) JP4987656B2 (enExample)
KR (1) KR20090032952A (enExample)
CN (1) CN101396898B (enExample)
TW (1) TW200922786A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6916641B2 (ja) * 2017-03-15 2021-08-11 株式会社Ｓｃｒｅｅｎホールディングス 基材処理装置および基材処理方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0622199B2 (ja) * 1988-03-25 1994-03-23 ソマール株式会社 薄膜圧着方法及び薄膜圧着装置
JP3195123B2 (ja) * 1993-06-11 2001-08-06 富士写真フイルム株式会社 感光層積層方法及び装置
JP3042970B2 (ja) * 1994-12-28 2000-05-22 シャープ株式会社 ドライレジストフィルムのラミネート方法
JP2000181080A (ja) * 1998-12-21 2000-06-30 Fuji Photo Film Co Ltd 感光性樹脂層積層方法
JP2002127250A (ja) * 2000-10-20 2002-05-08 Nec Corp ドライフィルムラミネータ
JP3756402B2 (ja) * 2000-12-08 2006-03-15 富士写真フイルム株式会社 基板搬送装置及び方法
JP4744713B2 (ja) * 2001-04-05 2011-08-10 東芝モバイルディスプレイ株式会社 ラミネート装置およびラミネート方法
JP4774243B2 (ja) * 2004-07-06 2011-09-14 富士フイルム株式会社 感光性積層体の製造装置及び製造方法
JP2006088511A (ja) * 2004-09-24 2006-04-06 Eco & Engineering Co Ltd ラミネート装置
JP4741307B2 (ja) * 2005-05-20 2011-08-03 富士フイルム株式会社 加熱装置及び加熱方法

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
JP平1-244467A 1989.09.28
JP特开2000-181080A 2000.06.30
JP特开平6-349727A 1994.12.22
JP特开平8-183146A 1996.07.16

Also Published As

Publication number Publication date
JP4987656B2 (ja) 2012-07-25
TW200922786A (en) 2009-06-01
KR20090032952A (ko) 2009-04-01
CN101396898A (zh) 2009-04-01
JP2009083170A (ja) 2009-04-23

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SE01 Entry into force of request for substantive examination
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GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20121010

Termination date: 20130927