CN101323396A - 基板吸附装置和基板搬送装置以及外观检查装置 - Google Patents

基板吸附装置和基板搬送装置以及外观检查装置 Download PDF

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Publication number
CN101323396A
CN101323396A CNA2008101089197A CN200810108919A CN101323396A CN 101323396 A CN101323396 A CN 101323396A CN A2008101089197 A CNA2008101089197 A CN A2008101089197A CN 200810108919 A CN200810108919 A CN 200810108919A CN 101323396 A CN101323396 A CN 101323396A
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China
Prior art keywords
substrate
suction
adsorption
glass substrate
mentioned
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CNA2008101089197A
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Chinese (zh)
Inventor
木内智一
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Olympus Corp
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Olympus Corp
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Application filed by Olympus Corp filed Critical Olympus Corp
Publication of CN101323396A publication Critical patent/CN101323396A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106—General arrangement of respective parts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

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  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
  • Manipulator (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
CNA2008101089197A 2007-06-11 2008-06-06 基板吸附装置和基板搬送装置以及外观检查装置 Pending CN101323396A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007153922A JP2008302487A (ja) 2007-06-11 2007-06-11 基板吸着装置及び基板搬送装置並びに外観検査装置
JP2007153922 2007-06-11

Publications (1)

Publication Number Publication Date
CN101323396A true CN101323396A (zh) 2008-12-17

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ID=40187135

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2008101089197A Pending CN101323396A (zh) 2007-06-11 2008-06-06 基板吸附装置和基板搬送装置以及外观检查装置

Country Status (4)

Country Link
JP (1) JP2008302487A (https=)
KR (1) KR20080108904A (https=)
CN (1) CN101323396A (https=)
TW (1) TW200906695A (https=)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102666323A (zh) * 2009-11-26 2012-09-12 株式会社尼康 基板处理装置以及显示元件的制造方法
TWI480216B (zh) * 2011-11-14 2015-04-11 川崎重工業股份有限公司 Sheet conveyance system
CN105091779A (zh) * 2014-04-30 2015-11-25 平田机工株式会社 工件形状测定系统及控制方法
CN106927258A (zh) * 2017-01-26 2017-07-07 江苏东旭亿泰智能装备有限公司 一种用于玻璃基板的传送装置及其传送方法
CN108136596A (zh) * 2015-08-26 2018-06-08 伯克希尔格雷股份有限公司 提供用于末端执行器的真空阀组件的系统和方法
CN108202339A (zh) * 2016-12-20 2018-06-26 亚智科技股份有限公司 吸取基板的方法与吸取装置
CN108238447A (zh) * 2018-01-16 2018-07-03 京东方科技集团股份有限公司 传输系统
CN109071129A (zh) * 2016-03-31 2018-12-21 科福罗有限公司 具有真空轮的输送系统
CN110625540A (zh) * 2014-05-03 2019-12-31 株式会社半导体能源研究所 薄膜状部件支撑设备

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI465313B (zh) * 2009-04-07 2014-12-21 Kromax Internat Corp 非接觸式定位平臺與定位方法
KR101309144B1 (ko) * 2011-01-10 2013-09-17 엘아이지에이디피 주식회사 분사노즐, 이를 이용한 기판 반송장치 및 기판 검사장치
KR102099882B1 (ko) * 2012-12-27 2020-04-13 세메스 주식회사 기판 처리 장치 및 기판 처리 방법
CN104058257B (zh) * 2013-03-22 2017-07-04 北京北方微电子基地设备工艺研究中心有限责任公司 晶片的辅助取片机构、取片系统及取片方法
CN105058401A (zh) * 2015-08-07 2015-11-18 天津联欣盈塑胶科技有限公司 一种夹取塑料产品的机械手
CN105397828B (zh) * 2015-11-27 2017-03-29 大连理工大学 一种用于管桩端板加工的大尺寸变直径机器人夹具
CN105428290B (zh) * 2015-12-23 2018-06-29 上海华虹宏力半导体制造有限公司 晶圆传输装置及其真空吸附机械手
WO2022202396A1 (ja) * 2021-03-25 2022-09-29 東京エレクトロン株式会社 基板搬送装置、塗布処理装置、基板搬送方法および基板搬送プログラム
TW202306651A (zh) * 2021-03-31 2023-02-16 日商東京威力科創股份有限公司 基板搬送裝置、塗佈處理裝置及基板搬送方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI327986B (en) * 2003-05-06 2010-08-01 Olympus Corp Substrate absorption device

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102666323A (zh) * 2009-11-26 2012-09-12 株式会社尼康 基板处理装置以及显示元件的制造方法
CN102666323B (zh) * 2009-11-26 2015-06-03 株式会社尼康 基板处理装置以及显示元件的制造方法
TWI480216B (zh) * 2011-11-14 2015-04-11 川崎重工業股份有限公司 Sheet conveyance system
CN105091779A (zh) * 2014-04-30 2015-11-25 平田机工株式会社 工件形状测定系统及控制方法
CN110625540A (zh) * 2014-05-03 2019-12-31 株式会社半导体能源研究所 薄膜状部件支撑设备
CN108136596A (zh) * 2015-08-26 2018-06-08 伯克希尔格雷股份有限公司 提供用于末端执行器的真空阀组件的系统和方法
CN108136596B (zh) * 2015-08-26 2021-08-24 伯克希尔格雷股份有限公司 提供用于末端执行器的真空阀组件的系统和方法
US11185996B2 (en) 2015-08-26 2021-11-30 Berkshire Grey, Inc. Systems and methods for providing vacuum valve assemblies for end effectors
US11660763B2 (en) 2015-08-26 2023-05-30 Berkshire Grey Operating Company, Inc. Systems and methods for providing vacuum valve assemblies for end effectors
CN109071129A (zh) * 2016-03-31 2018-12-21 科福罗有限公司 具有真空轮的输送系统
CN108202339A (zh) * 2016-12-20 2018-06-26 亚智科技股份有限公司 吸取基板的方法与吸取装置
CN106927258A (zh) * 2017-01-26 2017-07-07 江苏东旭亿泰智能装备有限公司 一种用于玻璃基板的传送装置及其传送方法
CN108238447A (zh) * 2018-01-16 2018-07-03 京东方科技集团股份有限公司 传输系统

Also Published As

Publication number Publication date
JP2008302487A (ja) 2008-12-18
TW200906695A (en) 2009-02-16
KR20080108904A (ko) 2008-12-16

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Application publication date: 20081217