CN101320726B - 混入磁性体粉末的半导体装置及其制造方法 - Google Patents
混入磁性体粉末的半导体装置及其制造方法 Download PDFInfo
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- CN101320726B CN101320726B CN2008100881988A CN200810088198A CN101320726B CN 101320726 B CN101320726 B CN 101320726B CN 2008100881988 A CN2008100881988 A CN 2008100881988A CN 200810088198 A CN200810088198 A CN 200810088198A CN 101320726 B CN101320726 B CN 101320726B
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- semiconductor device
- magnetic
- inductor element
- thin film
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 128
- 239000006247 magnetic powder Substances 0.000 title claims abstract description 21
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 17
- 239000000758 substrate Substances 0.000 claims abstract description 99
- 239000011347 resin Substances 0.000 claims abstract description 46
- 229920005989 resin Polymers 0.000 claims abstract description 46
- 239000000463 material Substances 0.000 claims abstract description 22
- 239000010408 film Substances 0.000 claims description 123
- 239000010409 thin film Substances 0.000 claims description 87
- 239000000843 powder Substances 0.000 claims description 15
- 230000015572 biosynthetic process Effects 0.000 claims description 14
- 229910000679 solder Inorganic materials 0.000 claims description 8
- 230000005670 electromagnetic radiation Effects 0.000 abstract description 6
- 239000012528 membrane Substances 0.000 abstract 5
- 230000001939 inductive effect Effects 0.000 abstract 3
- 230000002452 interceptive effect Effects 0.000 abstract 1
- 238000007789 sealing Methods 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 description 41
- 239000002184 metal Substances 0.000 description 41
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 19
- 229910052710 silicon Inorganic materials 0.000 description 19
- 239000010703 silicon Substances 0.000 description 19
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 16
- 239000010949 copper Substances 0.000 description 16
- 229910052802 copper Inorganic materials 0.000 description 16
- 239000004642 Polyimide Substances 0.000 description 13
- 238000000034 method Methods 0.000 description 13
- 229920001721 polyimide Polymers 0.000 description 13
- 229920001187 thermosetting polymer Polymers 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 239000004411 aluminium Substances 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- -1 aluminium metalloid Chemical class 0.000 description 6
- 230000006866 deterioration Effects 0.000 description 6
- 229910052752 metalloid Inorganic materials 0.000 description 6
- 238000007747 plating Methods 0.000 description 6
- 238000004528 spin coating Methods 0.000 description 6
- 238000009713 electroplating Methods 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/552—Protection against radiation, e.g. light or electromagnetic waves
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3114—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the device being a chip scale package, e.g. CSP
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- H—ELECTRICITY
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- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/64—Impedance arrangements
- H01L23/645—Inductive arrangements
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/023—Redistribution layers [RDL] for bonding areas
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- H—ELECTRICITY
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/0401—Bonding areas specifically adapted for bump connectors, e.g. under bump metallisation [UBM]
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/93—Batch processes
- H01L2224/94—Batch processes at wafer-level, i.e. with connecting carried out on a wafer comprising a plurality of undiced individual devices
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- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/525—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/03—Manufacturing methods
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
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- H—ELECTRICITY
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/93—Batch processes
- H01L24/94—Batch processes at wafer-level, i.e. with connecting carried out on a wafer comprising a plurality of undiced individual devices
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
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- H01L2924/01—Chemical elements
- H01L2924/01027—Cobalt [Co]
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- H—ELECTRICITY
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- H01L2924/01—Chemical elements
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- H01L2924/0103—Zinc [Zn]
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01046—Palladium [Pd]
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01072—Hafnium [Hf]
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01073—Tantalum [Ta]
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Health & Medical Sciences (AREA)
- Electromagnetism (AREA)
- Toxicology (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
Description
Claims (25)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP031757/2007 | 2007-02-13 | ||
JP2007031757A JP4492621B2 (ja) | 2007-02-13 | 2007-02-13 | 半導体装置およびその製造方法 |
JP2007043355A JP2008210828A (ja) | 2007-02-23 | 2007-02-23 | 半導体装置およびその製造方法 |
JP043355/2007 | 2007-02-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101320726A CN101320726A (zh) | 2008-12-10 |
CN101320726B true CN101320726B (zh) | 2012-02-22 |
Family
ID=39757452
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008100881988A Expired - Fee Related CN101320726B (zh) | 2007-02-13 | 2008-02-13 | 混入磁性体粉末的半导体装置及其制造方法 |
Country Status (2)
Country | Link |
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JP (1) | JP4492621B2 (zh) |
CN (1) | CN101320726B (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010040817A (ja) * | 2008-08-06 | 2010-02-18 | Casio Comput Co Ltd | 半導体装置およびその製造方法 |
JP2013232620A (ja) | 2012-01-27 | 2013-11-14 | Rohm Co Ltd | チップ部品 |
US9245940B2 (en) * | 2014-02-12 | 2016-01-26 | Qualcomm Incorporated | Inductor design on floating UBM balls for wafer level package (WLP) |
KR20160004090A (ko) * | 2014-07-02 | 2016-01-12 | 삼성전기주식회사 | 박막 인덕터용 코일 유닛, 박막 인덕터용 코일 유닛의 제조방법, 박막 인덕터 및 박막 인덕터의 제조방법 |
CN115250636A (zh) * | 2021-02-27 | 2022-10-28 | 华为技术有限公司 | 一种磁基板结构及电子装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1494372A (zh) * | 2002-09-25 | 2004-05-05 | ס�ѵ�����ҵ��ʽ���� | 印刷电路配线用基板 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005235944A (ja) * | 2004-02-18 | 2005-09-02 | Tdk Corp | 電子デバイスおよびその製造方法 |
JP2006059839A (ja) * | 2004-08-17 | 2006-03-02 | Oki Electric Ind Co Ltd | 半導体装置およびその製造方法 |
-
2007
- 2007-02-13 JP JP2007031757A patent/JP4492621B2/ja not_active Expired - Fee Related
-
2008
- 2008-02-13 CN CN2008100881988A patent/CN101320726B/zh not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1494372A (zh) * | 2002-09-25 | 2004-05-05 | ס�ѵ�����ҵ��ʽ���� | 印刷电路配线用基板 |
Also Published As
Publication number | Publication date |
---|---|
JP4492621B2 (ja) | 2010-06-30 |
JP2008198766A (ja) | 2008-08-28 |
CN101320726A (zh) | 2008-12-10 |
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Effective date of registration: 20170421 Address after: Kagawa Patentee after: AOI ELECTRONICS Co.,Ltd. Address before: Kanagawa Patentee before: Zhao Tan Jing Co.,Ltd. Effective date of registration: 20170421 Address after: Kanagawa Patentee after: Zhao Tan Jing Co.,Ltd. Address before: Tokyo, Japan Patentee before: Zhaozhuang Micro Co.,Ltd. |
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