CN101278181A - 检查装置及检查方法 - Google Patents
检查装置及检查方法 Download PDFInfo
- Publication number
- CN101278181A CN101278181A CNA2006800362792A CN200680036279A CN101278181A CN 101278181 A CN101278181 A CN 101278181A CN A2006800362792 A CNA2006800362792 A CN A2006800362792A CN 200680036279 A CN200680036279 A CN 200680036279A CN 101278181 A CN101278181 A CN 101278181A
- Authority
- CN
- China
- Prior art keywords
- mentioned
- piezoelectric element
- electronic component
- pressurization
- testing fixture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 30
- 238000007689 inspection Methods 0.000 claims abstract description 64
- 238000012360 testing method Methods 0.000 claims description 104
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- 238000007789 sealing Methods 0.000 claims description 8
- 238000005538 encapsulation Methods 0.000 description 139
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- 229910000679 solder Inorganic materials 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000007767 bonding agent Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 125000001153 fluoro group Chemical class F* 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- -1 pottery Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000011179 visual inspection Methods 0.000 description 2
- 229910000967 As alloy Inorganic materials 0.000 description 1
- 229910001128 Sn alloy Inorganic materials 0.000 description 1
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- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- JVPLOXQKFGYFMN-UHFFFAOYSA-N gold tin Chemical compound [Sn].[Au] JVPLOXQKFGYFMN-UHFFFAOYSA-N 0.000 description 1
- 230000005055 memory storage Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000003534 oscillatory effect Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
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- 230000008054 signal transmission Effects 0.000 description 1
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- 239000010930 yellow gold Substances 0.000 description 1
- 229910001097 yellow gold Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/16—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means
- G01M3/18—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
- G01M3/186—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
- G01M3/187—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators for flexible or elastic containers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
Description
Claims (11)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2006/319357 WO2008038383A1 (fr) | 2006-09-28 | 2006-09-28 | Appareil et procédé de contrôle |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101278181A true CN101278181A (zh) | 2008-10-01 |
CN101278181B CN101278181B (zh) | 2011-05-04 |
Family
ID=39229831
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2006800362792A Expired - Fee Related CN101278181B (zh) | 2006-09-28 | 2006-09-28 | 检查装置及检查方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4588788B2 (zh) |
CN (1) | CN101278181B (zh) |
WO (1) | WO2008038383A1 (zh) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102484465A (zh) * | 2009-09-14 | 2012-05-30 | 株式会社村田制作所 | 晶体振荡装置 |
CN102944362A (zh) * | 2012-10-26 | 2013-02-27 | 铜陵市晶赛电子有限责任公司 | 石英晶体谐振器真空检漏法 |
CN104535282A (zh) * | 2014-11-24 | 2015-04-22 | 应达利电子(深圳)有限公司 | 一种石英晶体谐振器气密性检测方法和装置 |
CN107290115A (zh) * | 2017-07-05 | 2017-10-24 | 应达利电子股份有限公司 | 一种压电元件气密性的检测装置及其检测方法 |
CN106052981B (zh) * | 2016-08-01 | 2018-09-18 | 中国航空综合技术研究所 | 一种对于安装在线路板上的电子元器件的密封性检测方法 |
CN110657925A (zh) * | 2018-06-29 | 2020-01-07 | 意法半导体股份有限公司 | 用于测试封装的气密密封的方法 |
CN111562072A (zh) * | 2020-05-12 | 2020-08-21 | 东晶电子金华有限公司 | 检测方法、检测设备和计算机可读存储介质 |
CN116659758A (zh) * | 2023-08-02 | 2023-08-29 | 烟台盈德精密机械有限公司 | 气驱尿素喷嘴气密性试验平台 |
TWI829304B (zh) * | 2021-08-30 | 2024-01-11 | 日商川崎重工業股份有限公司 | 發泡洩漏測試方法及真空箱 |
US11945714B2 (en) | 2020-07-30 | 2024-04-02 | Stmicroelectronics S.R.L. | Electronic device and corresponding method |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5757793B2 (ja) * | 2011-06-10 | 2015-07-29 | 株式会社大真空 | 圧電振動デバイスの製造装置 |
KR101308935B1 (ko) * | 2011-11-25 | 2013-09-23 | 주식회사 로보스타 | 압전소자 패키지의 리크 검사용 패키지의 검사장치 |
CN105935662B (zh) * | 2016-03-31 | 2018-11-30 | 珠海格力新元电子有限公司 | 薄膜电容在线密封性检测设备及检测方法 |
JP7470373B2 (ja) | 2020-02-28 | 2024-04-18 | 株式会社昭和真空 | リーク検査方法及びリーク検査装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5877266U (ja) * | 1981-11-20 | 1983-05-25 | 社団法人日本喫煙具協会 | ガスライタ−用ガス漏れ選別装置 |
JPS6313467A (ja) * | 1986-07-02 | 1988-01-20 | Minolta Camera Co Ltd | レ−ザ走査型画像形成装置 |
JP3920426B2 (ja) * | 1996-12-20 | 2007-05-30 | 株式会社コスモ計器 | 洩れ検査装置 |
JPH1151802A (ja) * | 1997-07-31 | 1999-02-26 | River Eletec Kk | 圧電素子用パッケージの気密検査方法 |
JP2000208861A (ja) * | 1999-01-14 | 2000-07-28 | Matsushita Electronics Industry Corp | 半導体レ―ザ装置の製造方法および製造装置 |
-
2006
- 2006-09-28 WO PCT/JP2006/319357 patent/WO2008038383A1/ja active Application Filing
- 2006-09-28 CN CN2006800362792A patent/CN101278181B/zh not_active Expired - Fee Related
- 2006-09-28 JP JP2008514986A patent/JP4588788B2/ja not_active Expired - Fee Related
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102484465B (zh) * | 2009-09-14 | 2015-04-08 | 株式会社村田制作所 | 晶体振荡装置 |
CN102484465A (zh) * | 2009-09-14 | 2012-05-30 | 株式会社村田制作所 | 晶体振荡装置 |
CN102944362A (zh) * | 2012-10-26 | 2013-02-27 | 铜陵市晶赛电子有限责任公司 | 石英晶体谐振器真空检漏法 |
CN104535282B (zh) * | 2014-11-24 | 2017-12-22 | 应达利电子股份有限公司 | 一种石英晶体谐振器气密性检测方法和装置 |
CN104535282A (zh) * | 2014-11-24 | 2015-04-22 | 应达利电子(深圳)有限公司 | 一种石英晶体谐振器气密性检测方法和装置 |
CN106052981B (zh) * | 2016-08-01 | 2018-09-18 | 中国航空综合技术研究所 | 一种对于安装在线路板上的电子元器件的密封性检测方法 |
CN107290115A (zh) * | 2017-07-05 | 2017-10-24 | 应达利电子股份有限公司 | 一种压电元件气密性的检测装置及其检测方法 |
CN110657925A (zh) * | 2018-06-29 | 2020-01-07 | 意法半导体股份有限公司 | 用于测试封装的气密密封的方法 |
US11353503B2 (en) | 2018-06-29 | 2022-06-07 | Stmicroelectronics S.R.L. | Method for testing the hermetic seal of a package |
CN111562072A (zh) * | 2020-05-12 | 2020-08-21 | 东晶电子金华有限公司 | 检测方法、检测设备和计算机可读存储介质 |
US11945714B2 (en) | 2020-07-30 | 2024-04-02 | Stmicroelectronics S.R.L. | Electronic device and corresponding method |
TWI829304B (zh) * | 2021-08-30 | 2024-01-11 | 日商川崎重工業股份有限公司 | 發泡洩漏測試方法及真空箱 |
CN116659758A (zh) * | 2023-08-02 | 2023-08-29 | 烟台盈德精密机械有限公司 | 气驱尿素喷嘴气密性试验平台 |
CN116659758B (zh) * | 2023-08-02 | 2023-10-10 | 烟台盈德精密机械有限公司 | 气驱尿素喷嘴气密性试验平台 |
Also Published As
Publication number | Publication date |
---|---|
WO2008038383A1 (fr) | 2008-04-03 |
JPWO2008038383A1 (ja) | 2010-01-28 |
CN101278181B (zh) | 2011-05-04 |
JP4588788B2 (ja) | 2010-12-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP02 | Change in the address of a patent holder |
Address after: Tokyo, Japan Co-patentee after: Pioneer Fa Corp. Patentee after: PIONEER Corp. Address before: Tokyo, Japan Co-patentee before: Pioneer Fa Corp. Patentee before: PIONEER Corp. |
|
CP02 | Change in the address of a patent holder | ||
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: Tokyo, Japan Co-patentee after: PFA Co. Patentee after: PIONEER Corp. Address before: Tokyo, Japan Co-patentee before: Pioneer Fa Corp. Patentee before: PIONEER Corp. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20180827 Address after: Tokyo, Japan Co-patentee after: PFA Co. Patentee after: SHINKAWA Ltd. Address before: Tokyo, Japan Co-patentee before: PFA Co. Patentee before: PIONEER Corp. |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110504 Termination date: 20200928 |