WO2008038383A1 - Appareil et procédé de contrôle - Google Patents

Appareil et procédé de contrôle Download PDF

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Publication number
WO2008038383A1
WO2008038383A1 PCT/JP2006/319357 JP2006319357W WO2008038383A1 WO 2008038383 A1 WO2008038383 A1 WO 2008038383A1 JP 2006319357 W JP2006319357 W JP 2006319357W WO 2008038383 A1 WO2008038383 A1 WO 2008038383A1
Authority
WO
WIPO (PCT)
Prior art keywords
unit
inspection
piezoelectric
package
electronic component
Prior art date
Application number
PCT/JP2006/319357
Other languages
English (en)
Japanese (ja)
Inventor
Yoshikazu Sakaguchi
Koji Namiki
Original Assignee
Pioneer Corporation
Pioneer Fa Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Corporation, Pioneer Fa Corporation filed Critical Pioneer Corporation
Priority to PCT/JP2006/319357 priority Critical patent/WO2008038383A1/fr
Publication of WO2008038383A1 publication Critical patent/WO2008038383A1/fr

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/16Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means
    • G01M3/18Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G01M3/186Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
    • G01M3/187Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators for flexible or elastic containers

Abstract

L'invention concerne un appareil relativement compact permettant de contrôler rapidement l'étanchéité d'une quantité relativement grande d'objets à contrôler, par ex. de boîtiers d'éléments piézoélectriques. L'appareil de contrôle (1) contrôle l'étanchéité d'un composant électronique (par ex. un boîtier d'élément piézoélectrique) (2) dans lequel un élément piézoélectrique est scellé de façon étanche. L'appareil de contrôle comprend une partie de mise sous pression (1401) (enceinte de mise sous pression (140), module de mise sous pression (146)) conçue pour mettre sous pression la périphérie du boîtier (2) pour élément piézoélectrique, le boîtier (2) étant introduit dans l'enceinte de mise sous pression (140) à ouverture/fermeture libres ; une partie de mesure (145) conçue pour mesurer l'impédance du boîtier (2) placé dans la partie de mise sous pression (1401) ; et une partie de commande (17) conçue pour calculer une variation de l'impédance mesurée à la partie de mesure (145) en présence ou en l'absence d'une mise sous pression, et pour estimer l'étanchéité du composant électronique en comparant la variation calculée à une valeur de consigne.
PCT/JP2006/319357 2006-09-28 2006-09-28 Appareil et procédé de contrôle WO2008038383A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2006/319357 WO2008038383A1 (fr) 2006-09-28 2006-09-28 Appareil et procédé de contrôle

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
PCT/JP2006/319357 WO2008038383A1 (fr) 2006-09-28 2006-09-28 Appareil et procédé de contrôle
CN2006800362792A CN101278181B (zh) 2006-09-28 2006-09-28 检查装置及检查方法
JP2008514986A JP4588788B2 (ja) 2006-09-28 2006-09-28 検査装置、および検査方法

Publications (1)

Publication Number Publication Date
WO2008038383A1 true WO2008038383A1 (fr) 2008-04-03

Family

ID=39229831

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2006/319357 WO2008038383A1 (fr) 2006-09-28 2006-09-28 Appareil et procédé de contrôle

Country Status (3)

Country Link
JP (1) JP4588788B2 (fr)
CN (1) CN101278181B (fr)
WO (1) WO2008038383A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110657925A (zh) * 2018-06-29 2020-01-07 意法半导体股份有限公司 用于测试封装的气密密封的方法

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5093355B2 (ja) * 2009-09-14 2012-12-12 株式会社村田製作所 水晶発振装置
JP5757793B2 (ja) * 2011-06-10 2015-07-29 株式会社大真空 圧電振動デバイスの製造装置
KR101308935B1 (ko) * 2011-11-25 2013-09-23 주식회사 로보스타 압전소자 패키지의 리크 검사용 패키지의 검사장치
CN102944362A (zh) * 2012-10-26 2013-02-27 铜陵市晶赛电子有限责任公司 石英晶体谐振器真空检漏法
CN104535282B (zh) * 2014-11-24 2017-12-22 应达利电子股份有限公司 一种石英晶体谐振器气密性检测方法和装置
CN105935662B (zh) * 2016-03-31 2018-11-30 珠海格力新元电子有限公司 薄膜电容在线密封性检测设备及检测方法
CN106052981B (zh) * 2016-08-01 2018-09-18 中国航空综合技术研究所 一种对于安装在线路板上的电子元器件的密封性检测方法
CN107290115B (zh) * 2017-07-05 2019-07-12 应达利电子股份有限公司 一种压电元件气密性的检测装置及其检测方法
CN111562072A (zh) * 2020-05-12 2020-08-21 东晶电子金华有限公司 检测方法、检测设备和计算机可读存储介质

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6313467Y2 (fr) * 1981-11-20 1988-04-16
JPH10232179A (ja) * 1996-12-20 1998-09-02 Cosmo Keiki:Kk 微小部品の洩れ検査方法及びこの検査方法を用いた洩れ検査装置
JPH1151802A (ja) * 1997-07-31 1999-02-26 River Eletec Kk 圧電素子用パッケージの気密検査方法
JP2000208861A (ja) * 1999-01-14 2000-07-28 Matsushita Electronics Industry Corp 半導体レ―ザ装置の製造方法および製造装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6313467A (en) * 1986-07-02 1988-01-20 Minolta Camera Co Ltd Laser scanning type image forming device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6313467Y2 (fr) * 1981-11-20 1988-04-16
JPH10232179A (ja) * 1996-12-20 1998-09-02 Cosmo Keiki:Kk 微小部品の洩れ検査方法及びこの検査方法を用いた洩れ検査装置
JPH1151802A (ja) * 1997-07-31 1999-02-26 River Eletec Kk 圧電素子用パッケージの気密検査方法
JP2000208861A (ja) * 1999-01-14 2000-07-28 Matsushita Electronics Industry Corp 半導体レ―ザ装置の製造方法および製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110657925A (zh) * 2018-06-29 2020-01-07 意法半导体股份有限公司 用于测试封装的气密密封的方法

Also Published As

Publication number Publication date
JP4588788B2 (ja) 2010-12-01
CN101278181B (zh) 2011-05-04
JPWO2008038383A1 (ja) 2010-01-28
CN101278181A (zh) 2008-10-01

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