CN101223611B - 可调整膜式电阻器以及形成和调整膜式电阻器的方法 - Google Patents

可调整膜式电阻器以及形成和调整膜式电阻器的方法 Download PDF

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Publication number
CN101223611B
CN101223611B CN2006800257368A CN200680025736A CN101223611B CN 101223611 B CN101223611 B CN 101223611B CN 2006800257368 A CN2006800257368 A CN 2006800257368A CN 200680025736 A CN200680025736 A CN 200680025736A CN 101223611 B CN101223611 B CN 101223611B
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China
Prior art keywords
resistive film
impedance element
ultrafilter
low impedance
adjustment
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Chinese (zh)
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CN101223611A (zh
Inventor
帕特里克·M.·马克吉尼斯
伯纳尔德·P.·斯坦森
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Analog Devices Inc
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Analog Devices Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006—Thin film resistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/40—Resistors
    • H10D1/47—Resistors having no potential barriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/80—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple passive components, e.g. resistors, capacitors or inductors
    • H10D86/85—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple passive components, e.g. resistors, capacitors or inductors characterised by only passive components
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/498—Resistive arrangements or effects of, or between, wiring layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Semiconductor Integrated Circuits (AREA)
CN2006800257368A 2005-09-20 2006-09-14 可调整膜式电阻器以及形成和调整膜式电阻器的方法 Active CN101223611B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/231,054 US7598841B2 (en) 2005-09-20 2005-09-20 Film resistor and a method for forming and trimming a film resistor
US11/231,054 2005-09-20
PCT/IE2006/000100 WO2007034463A1 (en) 2005-09-20 2006-09-14 A trimmable film resistor and a method for forming and trimming a film resistor

Publications (2)

Publication Number Publication Date
CN101223611A CN101223611A (zh) 2008-07-16
CN101223611B true CN101223611B (zh) 2011-04-06

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CN2006800257368A Active CN101223611B (zh) 2005-09-20 2006-09-14 可调整膜式电阻器以及形成和调整膜式电阻器的方法

Country Status (6)

Country Link
US (2) US7598841B2 (https=)
EP (1) EP1927117B1 (https=)
JP (1) JP5165572B2 (https=)
CN (1) CN101223611B (https=)
AT (1) ATE556416T1 (https=)
WO (1) WO2007034463A1 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5601566B2 (ja) * 2010-01-28 2014-10-08 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
KR101141401B1 (ko) 2010-05-06 2012-05-03 삼성전기주식회사 병렬 구조의 저항기와 그 제조 방법
US8441335B2 (en) * 2010-10-21 2013-05-14 Analog Devices, Inc. Method of trimming a thin film resistor, and an integrated circuit including trimmable thin film resistors
JP2018037693A (ja) * 2012-02-03 2018-03-08 ローム株式会社 チップ抵抗器
US8723637B2 (en) 2012-04-10 2014-05-13 Analog Devices, Inc. Method for altering electrical and thermal properties of resistive materials
US9963777B2 (en) 2012-10-08 2018-05-08 Analog Devices, Inc. Methods of forming a thin film resistor
US9887687B2 (en) * 2015-01-28 2018-02-06 Analog Devices Global Method of trimming a component and a component trimmed by such a method
US11476045B2 (en) 2020-05-29 2022-10-18 Analog Devices International Unlimited Company Electric field grading protection design surrounding a galvanic or capacitive isolator
CN118969423B (zh) * 2024-10-17 2025-02-11 东莞市爱伦电子科技有限公司 一种树脂封装金属膜贴片电阻器

Citations (5)

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CN1162825A (zh) * 1996-03-11 1997-10-22 松下电器产业株式会社 电阻器及其制造方法
US5929746A (en) * 1995-10-13 1999-07-27 International Resistive Company, Inc. Surface mounted thin film voltage divider
EP0955678A1 (en) * 1998-04-24 1999-11-10 Texas Instruments Incorporated Improvements in or relating to digital-to-analog converters
CN1261978A (zh) * 1997-07-09 2000-08-02 松下电器产业株式会社 电阻器及其制造方法
US6667683B1 (en) * 1999-10-15 2003-12-23 Robert Bosch Gmbh Planar trimming resistor, applications and method for its manufacture

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DE2348589C2 (de) 1973-09-27 1982-04-01 Robert Bosch Gmbh, 7000 Stuttgart Oxidkeramischer Widerstand
GB1477007A (en) 1974-07-09 1977-06-22 Welwyn Electric Ltd Resistors
US4286249A (en) 1978-03-31 1981-08-25 Vishay Intertechnology, Inc. Attachment of leads to precision resistors
US4196411A (en) 1978-06-26 1980-04-01 Gentron Corporation Dual resistor element
US4298856A (en) 1979-09-04 1981-11-03 Western Electric Company, Incorporated Metallized resistor and methods of manufacturing and adjusting the resistance of same
US4862136A (en) 1983-04-13 1989-08-29 Birkner John M Programmable resistance network
JPS59161601U (ja) * 1983-04-14 1984-10-29 三洋電機株式会社 厚膜トリミング用抵抗体パタ−ン
US4505032A (en) 1983-06-27 1985-03-19 Analogic Corporation Method of making a voltage divider
US4682143A (en) 1985-10-30 1987-07-21 Advanced Micro Devices, Inc. Thin film chromium-silicon-carbon resistor
US4999731A (en) 1986-08-22 1991-03-12 Northern Telecom Limited Surge protector for telecommunications systems
US5015989A (en) 1989-07-28 1991-05-14 Pacific Hybrid Microelectronics, Inc. Film resistor with enhanced trimming characteristics
JPH0366103A (ja) * 1989-08-04 1991-03-20 Fujitsu Ltd 膜抵抗体の形成方法
JPH0497501A (ja) * 1990-08-14 1992-03-30 Matsushita Electric Ind Co Ltd 抵抗器及びその製造方法
FR2679662B1 (fr) 1991-07-26 1994-08-05 Schlumberger Services Petrol Circuit electrique tel qu'un pont de wheatstone pourvu d'une partie d'ajustage de resistance.
US5268651A (en) 1991-09-23 1993-12-07 Crystal Semiconductor Corporation Low drift resistor structure
JPH0684621A (ja) 1992-08-31 1994-03-25 Murata Mfg Co Ltd 抵抗体のトリミング方法
JP2545740B2 (ja) 1994-03-18 1996-10-23 工業技術院長 温度センサ
US5640137A (en) 1995-01-24 1997-06-17 Zilog, Inc. Polysilicon resistor cooling
DE19601135C1 (de) 1996-01-13 1997-05-28 Itt Ind Gmbh Deutsche Halbleiterstruktur
JPH1032110A (ja) 1996-07-16 1998-02-03 Matsushita Refrig Co Ltd 厚膜抵抗体のレーザトリミング方法
JP2000357601A (ja) * 1999-06-17 2000-12-26 Rohm Co Ltd チップ抵抗器、およびその製造方法
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5929746A (en) * 1995-10-13 1999-07-27 International Resistive Company, Inc. Surface mounted thin film voltage divider
CN1162825A (zh) * 1996-03-11 1997-10-22 松下电器产业株式会社 电阻器及其制造方法
CN1261978A (zh) * 1997-07-09 2000-08-02 松下电器产业株式会社 电阻器及其制造方法
EP0955678A1 (en) * 1998-04-24 1999-11-10 Texas Instruments Incorporated Improvements in or relating to digital-to-analog converters
US6667683B1 (en) * 1999-10-15 2003-12-23 Robert Bosch Gmbh Planar trimming resistor, applications and method for its manufacture

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Also Published As

Publication number Publication date
EP1927117A1 (en) 2008-06-04
US7598841B2 (en) 2009-10-06
JP5165572B2 (ja) 2013-03-21
US7719403B2 (en) 2010-05-18
EP1927117B1 (en) 2012-05-02
US20090322466A1 (en) 2009-12-31
JP2009509327A (ja) 2009-03-05
US20070063813A1 (en) 2007-03-22
WO2007034463A1 (en) 2007-03-29
ATE556416T1 (de) 2012-05-15
CN101223611A (zh) 2008-07-16

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