CN101176007A - 电子部件试验装置 - Google Patents

电子部件试验装置 Download PDF

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Publication number
CN101176007A
CN101176007A CNA2006800164255A CN200680016425A CN101176007A CN 101176007 A CN101176007 A CN 101176007A CN A2006800164255 A CNA2006800164255 A CN A2006800164255A CN 200680016425 A CN200680016425 A CN 200680016425A CN 101176007 A CN101176007 A CN 101176007A
Authority
CN
China
Prior art keywords
electrical verification
mentioned
tested electrical
verification subassembly
test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2006800164255A
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English (en)
Chinese (zh)
Inventor
铃木克彦
金子茂树
池田浩树
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Publication of CN101176007A publication Critical patent/CN101176007A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/01—Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
CNA2006800164255A 2005-07-13 2006-07-13 电子部件试验装置 Pending CN101176007A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPPCT/JP2005/012947 2005-07-13
PCT/JP2005/012947 WO2007007406A1 (ja) 2005-07-13 2005-07-13 電子部品試験装置

Publications (1)

Publication Number Publication Date
CN101176007A true CN101176007A (zh) 2008-05-07

Family

ID=37636814

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2006800164255A Pending CN101176007A (zh) 2005-07-13 2006-07-13 电子部件试验装置

Country Status (5)

Country Link
US (1) US7859286B2 (https=)
KR (1) KR100922145B1 (https=)
CN (1) CN101176007A (https=)
TW (1) TW200720675A (https=)
WO (2) WO2007007406A1 (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104880618A (zh) * 2014-02-28 2015-09-02 惠州市德赛西威汽车电子有限公司 一种复合并行测试系统及方法
CN107199183A (zh) * 2016-03-18 2017-09-26 泰克元有限公司 电子部件测试用分选机
CN117368684A (zh) * 2022-06-30 2024-01-09 金士顿数位股份有限公司 用于集成电路装置的自动化测试系统及自动化测试方法

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100800312B1 (ko) * 2006-01-25 2008-02-04 (주)테크윙 테스트핸들러 및 테스트핸들러의 로딩방법
JP2011197203A (ja) * 2010-03-18 2011-10-06 Renesas Electronics Corp ドライバ及び表示装置
JP4955792B2 (ja) * 2010-04-28 2012-06-20 シャープ株式会社 電子部品動作機能測定装置および電子部品動作機能測定方法
TWI416652B (zh) * 2010-08-20 2013-11-21 Chroma Ate Inc With a single through the shuttle shuttle of the semiconductor components test machine
TWI398654B (zh) * 2011-11-22 2013-06-11 Chroma Ate Inc Semiconductor automation testing machine with temperature control system
KR101235285B1 (ko) 2012-11-15 2013-02-21 유호전기공업주식회사 3차원 패턴을 이용한 부분방전 검출장치의 시험 방법
JP6094733B2 (ja) * 2012-11-26 2017-03-15 澁谷工業株式会社 物品分類装置
TWI472778B (zh) * 2013-08-30 2015-02-11 Chroma Ate Inc System - level IC test machine automatic retest method and the test machine
CN104670892B (zh) * 2013-11-29 2017-02-08 鸿富锦精密工业（深圳）有限公司 取放料装置
JP6245445B2 (ja) * 2014-07-07 2017-12-13 Smc株式会社 アクチュエータのタクト計測装置及びセンサ信号検知装置
CN106017727B (zh) * 2016-05-16 2018-11-06 合肥市芯海电子科技有限公司 一种多芯片温度测试及标定系统及方法
KR102538843B1 (ko) 2016-07-21 2023-05-31 세메스 주식회사 반도체 소자 테스트 방법
KR102548782B1 (ko) 2016-07-26 2023-06-27 세메스 주식회사 반도체 소자 테스트 장치
KR102538845B1 (ko) 2016-07-28 2023-05-31 세메스 주식회사 반도체 소자 테스트 장치
KR102548788B1 (ko) 2016-08-10 2023-06-27 세메스 주식회사 반도체 소자 테스트 장치
KR102270760B1 (ko) * 2019-11-29 2021-06-30 에이엠티 주식회사 미세 피치를 갖는 디바이스의 테스트장치
TWI832311B (zh) 2022-06-30 2024-02-11 美商金士頓數位股份有限公司 用於積體電路裝置的自動化測試系統及自動化測試方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001033514A (ja) 1999-07-23 2001-02-09 Advantest Corp 電子部品試験装置用加熱板
JP2001230481A (ja) * 2000-02-21 2001-08-24 Sharp Corp 半導体レーザチップのスクリーニング装置
JP4553492B2 (ja) * 2001-01-09 2010-09-29 株式会社アドバンテスト 電子部品試験装置におけるソケットの電気特性相関取得方法、ハンドラ、ハンドラの制御方法および電子部品試験装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104880618A (zh) * 2014-02-28 2015-09-02 惠州市德赛西威汽车电子有限公司 一种复合并行测试系统及方法
CN104880618B (zh) * 2014-02-28 2019-06-07 惠州市德赛西威汽车电子股份有限公司 一种复合并行测试系统及方法
CN107199183A (zh) * 2016-03-18 2017-09-26 泰克元有限公司 电子部件测试用分选机
CN117368684A (zh) * 2022-06-30 2024-01-09 金士顿数位股份有限公司 用于集成电路装置的自动化测试系统及自动化测试方法

Also Published As

Publication number Publication date
US20090058439A1 (en) 2009-03-05
KR100922145B1 (ko) 2009-10-19
WO2007007406A1 (ja) 2007-01-18
TW200720675A (en) 2007-06-01
TWI303719B (https=) 2008-12-01
US7859286B2 (en) 2010-12-28
WO2007007835A1 (ja) 2007-01-18
KR20080004579A (ko) 2008-01-09

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