CN101088049A - 用于补偿不对称光瞳照明的滤光装置 - Google Patents

用于补偿不对称光瞳照明的滤光装置 Download PDF

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Publication number
CN101088049A
CN101088049A CNA2005800448498A CN200580044849A CN101088049A CN 101088049 A CN101088049 A CN 101088049A CN A2005800448498 A CNA2005800448498 A CN A2005800448498A CN 200580044849 A CN200580044849 A CN 200580044849A CN 101088049 A CN101088049 A CN 101088049A
Authority
CN
China
Prior art keywords
filtering apparatus
filter element
illuminator
pupil
illumination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2005800448498A
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English (en)
Chinese (zh)
Inventor
曼弗雷德·毛尔
达米安·菲奥尔卡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Publication of CN101088049A publication Critical patent/CN101088049A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/007—Optical devices or arrangements for the control of light using movable or deformable optical elements the movable or deformable optical element controlling the colour, i.e. a spectral characteristic, of the light
    • G02B26/008—Optical devices or arrangements for the control of light using movable or deformable optical elements the movable or deformable optical element controlling the colour, i.e. a spectral characteristic, of the light in the form of devices for effecting sequential colour changes, e.g. colour wheels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0933—Systems for active beam shaping by rapid movement of an element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0488—Optical or mechanical part supplementary adjustable parts with spectral filtering
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0994—Fibers, light pipes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70191—Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Astronomy & Astrophysics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Microscoopes, Condenser (AREA)
CNA2005800448498A 2004-12-23 2005-08-25 用于补偿不对称光瞳照明的滤光装置 Pending CN101088049A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004063314A DE102004063314A1 (de) 2004-12-23 2004-12-23 Filtereinrichtung für die Kompensation einer asymmetrischen Pupillenausleuchtung
DE102004063314.2 2004-12-23

Publications (1)

Publication Number Publication Date
CN101088049A true CN101088049A (zh) 2007-12-12

Family

ID=35033385

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2005800448498A Pending CN101088049A (zh) 2004-12-23 2005-08-25 用于补偿不对称光瞳照明的滤光装置

Country Status (8)

Country Link
US (5) US7798676B2 (enExample)
EP (2) EP2278403A1 (enExample)
JP (1) JP4700697B2 (enExample)
KR (2) KR101156369B1 (enExample)
CN (1) CN101088049A (enExample)
DE (1) DE102004063314A1 (enExample)
TW (1) TW200622313A (enExample)
WO (1) WO2006066638A1 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103512594A (zh) * 2012-06-20 2014-01-15 通用电气公司 架空占用传感器
CN104216234A (zh) * 2013-06-05 2014-12-17 中芯国际集成电路制造(上海)有限公司 光刻系统光源对称性的检测方法
CN105739250A (zh) * 2016-05-13 2016-07-06 上海华力微电子有限公司 一种光刻机之照明光瞳均一性补偿装置及其补偿方法
CN108983559A (zh) * 2018-08-08 2018-12-11 中国科学院上海光学精密机械研究所 光刻机光瞳校正器及其使用方法

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JP4599936B2 (ja) 2004-08-17 2010-12-15 株式会社ニコン 照明光学装置、照明光学装置の調整方法、露光装置、および露光方法
DE102006059024A1 (de) * 2006-12-14 2008-06-19 Carl Zeiss Smt Ag Projektionsbelichtungsanlage für die Mikrolithographie, Beleuchtungsoptik für eine derartige Projektionsbelichtungsanlage, Verfahren zum Betrieb einer derartigen Projektionsbelichtungsanlage, Verfahren zur Herstellung eines mikrostrukturierten Bauteils sowie durch das Verfahren hergestelltes mikrostrukturiertes Bauteil
US7990520B2 (en) 2006-12-18 2011-08-02 Carl Zeiss Smt Gmbh Microlithography illumination systems, components and methods
JP2010517310A (ja) 2007-01-30 2010-05-20 カール・ツァイス・エスエムティー・アーゲー マイクロリソグラフィ投影露光装置の照明システム
US7843549B2 (en) * 2007-05-23 2010-11-30 Asml Holding N.V. Light attenuating filter for correcting field dependent ellipticity and uniformity
US8908151B2 (en) 2008-02-14 2014-12-09 Nikon Corporation Illumination optical system, exposure apparatus, device manufacturing method, compensation filter, and exposure optical system
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NL1036905A1 (nl) * 2008-06-03 2009-12-04 Asml Netherlands Bv Lithographic apparatus and device manufacturing method.
CN102203675B (zh) * 2008-10-31 2014-02-26 卡尔蔡司Smt有限责任公司 用于euv微光刻的照明光学部件
KR101960153B1 (ko) 2008-12-24 2019-03-19 가부시키가이샤 니콘 조명 광학계, 노광 장치 및 디바이스의 제조 방법
DE102010042901B3 (de) * 2010-10-26 2012-04-05 Carl Zeiss Smt Gmbh Polarisationsaktuator
EP2689427B1 (en) 2011-03-23 2017-05-03 Carl Zeiss SMT GmbH Euv mirror arrangement, optical system comprising euv mirror arrangement and method for operating an optical system comprising an euv mirror arrangement
DE102011005940A1 (de) 2011-03-23 2012-09-27 Carl Zeiss Smt Gmbh EUV-Spiegelanordnung, optisches System mit EUV-Spiegelanordnung und Verfahren zum Betreiben eines optischen Systems mit EUV-Spiegelanordnung
DE102011077234A1 (de) 2011-06-08 2012-12-13 Carl Zeiss Smt Gmbh EUV-Spiegelanordnung, optisches System mit EUV-Spiegelanordnung und Verfahren zum Betreiben eines optischen Systems mit EUV-Spiegelanordnung
CN102331688B (zh) * 2011-10-25 2013-06-26 中国科学院光电技术研究所 一种光瞳均匀性补偿装置
US9261793B2 (en) 2012-09-14 2016-02-16 Globalfoundries Inc. Image optimization using pupil filters in projecting printing systems with fixed or restricted illumination angular distribution
DE102013213545A1 (de) * 2013-07-10 2015-01-15 Carl Zeiss Smt Gmbh Beleuchtungsoptik für die Projektionslithografie
US9721421B2 (en) 2015-05-05 2017-08-01 Mladen Blazevic Electronic gaming system with physical gaming chips and wager display
DE102015220144A1 (de) * 2015-10-16 2017-04-20 Carl Zeiss Smt Gmbh Optisches System und Lithographieanlage
CN106556974B (zh) * 2015-09-30 2019-04-26 中芯国际集成电路制造(上海)有限公司 光刻照明系统以及光刻设备
WO2017144265A1 (en) 2016-02-25 2017-08-31 Asml Netherlands B.V. Beam homogenizer, illumination system and metrology system
DE102021120952B3 (de) 2021-08-11 2022-11-10 Carl Zeiss Smt Gmbh Verfahren zur Korrektur eines Telezentriefehlers einer Abbildungsvorrichtung und Maskeninspektionsmikroskop
CN121057979A (zh) 2023-05-04 2025-12-02 卡尔蔡司Smt有限责任公司 用于调整微光刻的投射曝光系统中的远心的方法

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103512594A (zh) * 2012-06-20 2014-01-15 通用电气公司 架空占用传感器
CN103512594B (zh) * 2012-06-20 2017-09-01 通用电气公司 架空占用传感器
CN104216234A (zh) * 2013-06-05 2014-12-17 中芯国际集成电路制造(上海)有限公司 光刻系统光源对称性的检测方法
CN105739250A (zh) * 2016-05-13 2016-07-06 上海华力微电子有限公司 一种光刻机之照明光瞳均一性补偿装置及其补偿方法
CN108983559A (zh) * 2018-08-08 2018-12-11 中国科学院上海光学精密机械研究所 光刻机光瞳校正器及其使用方法

Also Published As

Publication number Publication date
US20100309450A1 (en) 2010-12-09
US8246211B2 (en) 2012-08-21
US20120281198A1 (en) 2012-11-08
US20130278913A1 (en) 2013-10-24
WO2006066638A8 (en) 2006-08-24
KR20110094121A (ko) 2011-08-19
US8636386B2 (en) 2014-01-28
KR101156369B1 (ko) 2012-06-13
US20110299285A1 (en) 2011-12-08
WO2006066638A1 (en) 2006-06-29
US8480261B2 (en) 2013-07-09
DE102004063314A1 (de) 2006-07-13
US20080113281A1 (en) 2008-05-15
KR20070085995A (ko) 2007-08-27
US8025427B2 (en) 2011-09-27
US7798676B2 (en) 2010-09-21
JP2008525828A (ja) 2008-07-17
JP4700697B2 (ja) 2011-06-15
EP2278403A1 (en) 2011-01-26
TWI303325B (enExample) 2008-11-21
EP1828844A1 (en) 2007-09-05
KR101182940B1 (ko) 2012-09-13
TW200622313A (en) 2006-07-01

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