CN101073157A - 半导体装置及用于其制造的方法 - Google Patents
半导体装置及用于其制造的方法 Download PDFInfo
- Publication number
- CN101073157A CN101073157A CNA2005800420134A CN200580042013A CN101073157A CN 101073157 A CN101073157 A CN 101073157A CN A2005800420134 A CNA2005800420134 A CN A2005800420134A CN 200580042013 A CN200580042013 A CN 200580042013A CN 101073157 A CN101073157 A CN 101073157A
- Authority
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- China
- Prior art keywords
- diode
- semiconductor device
- grooves
- schottky
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 25
- 238000004519 manufacturing process Methods 0.000 title description 6
- 230000004888 barrier function Effects 0.000 claims abstract description 16
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 239000002184 metal Substances 0.000 claims description 44
- 229910052751 metal Inorganic materials 0.000 claims description 44
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 15
- 238000005530 etching Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- 229920005591 polysilicon Polymers 0.000 claims description 6
- 238000001465 metallisation Methods 0.000 claims description 3
- 230000015556 catabolic process Effects 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 4
- 238000000407 epitaxy Methods 0.000 claims 1
- 238000010301 surface-oxidation reaction Methods 0.000 claims 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 abstract 2
- 230000008901 benefit Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 150000002739 metals Chemical class 0.000 description 6
- 238000005036 potential barrier Methods 0.000 description 4
- 230000005611 electricity Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000002800 charge carrier Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66083—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices
- H01L29/6609—Diodes
- H01L29/66143—Schottky diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/866—Zener diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/872—Schottky diodes
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
Description
Claims (15)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102004059640.9 | 2004-12-10 | ||
DE102004059640A DE102004059640A1 (de) | 2004-12-10 | 2004-12-10 | Halbleitereinrichtung und Verfahren zu deren Herstellung |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101073157A true CN101073157A (zh) | 2007-11-14 |
CN100557823C CN100557823C (zh) | 2009-11-04 |
Family
ID=35463694
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005800420134A Expired - Fee Related CN100557823C (zh) | 2004-12-10 | 2005-10-13 | 半导体装置及用于其制造的方法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US7902626B2 (zh) |
EP (1) | EP1825520B1 (zh) |
JP (1) | JP4928463B2 (zh) |
KR (1) | KR101044209B1 (zh) |
CN (1) | CN100557823C (zh) |
DE (1) | DE102004059640A1 (zh) |
TW (1) | TWI446550B (zh) |
WO (1) | WO2006061277A1 (zh) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102376568A (zh) * | 2010-08-19 | 2012-03-14 | 北大方正集团有限公司 | 在深沟槽肖特基二极管晶圆的深沟槽内淀积多晶硅的方法 |
CN101645448B (zh) * | 2008-08-06 | 2013-11-13 | 飞兆半导体公司 | 用于在沟槽下形成pn嵌位区的结构和方法 |
CN104425569A (zh) * | 2013-09-11 | 2015-03-18 | 英飞凌科技股份有限公司 | 半导体器件、结型场效应晶体管和垂直场效应晶体管 |
CN105957864A (zh) * | 2015-03-09 | 2016-09-21 | 罗伯特·博世有限公司 | 具有沟槽型mos势垒肖特基二极管的半导体装置 |
CN105957901A (zh) * | 2015-03-09 | 2016-09-21 | 罗伯特·博世有限公司 | 具有沟槽-肖特基-势垒-肖特基-二极管的半导体装置 |
CN106783954A (zh) * | 2016-12-26 | 2017-05-31 | 东莞市联洲知识产权运营管理有限公司 | 一种低功率沟槽式肖特基整流器件及其制造方法 |
CN106784071A (zh) * | 2016-12-07 | 2017-05-31 | 同方威视技术股份有限公司 | 光电二极管器件、光电二极管探测器及其制造方法 |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007009227B4 (de) * | 2007-02-26 | 2009-01-02 | Infineon Technologies Ag | Halbleiterbauelement mit gleichrichtenden Übergängen sowie Herstellungsverfahren zur Herstellung desselben |
DE102007045185A1 (de) * | 2007-09-21 | 2009-04-02 | Robert Bosch Gmbh | Halbleitervorrichtung und Verfahren zu deren Herstellung |
KR101038993B1 (ko) * | 2009-06-29 | 2011-06-07 | 주식회사 하이닉스반도체 | 상변화 메모리 장치 및 그 제조 방법 |
DE102009028252A1 (de) * | 2009-08-05 | 2011-02-10 | Robert Bosch Gmbh | Halbleiteranordnung |
US8816468B2 (en) | 2010-10-21 | 2014-08-26 | Vishay General Semiconductor Llc | Schottky rectifier |
DE102010043088A1 (de) * | 2010-10-29 | 2012-05-03 | Robert Bosch Gmbh | Halbleiteranordnung mit Schottkydiode |
DE102011087596A1 (de) * | 2011-12-01 | 2013-06-06 | Robert Bosch Gmbh | Super Trench Schottky Barrier Schottkydiode |
US9401355B2 (en) | 2011-12-16 | 2016-07-26 | Infineon Technologies Ag | Semiconductor device including a diode arranged in a trench |
CN103199119B (zh) * | 2012-01-06 | 2017-05-17 | 盛况 | 一种具有超结结构的沟槽肖特基半导体装置及其制备方法 |
JP2014120685A (ja) | 2012-12-18 | 2014-06-30 | Toshiba Corp | 半導体装置 |
JP6411258B2 (ja) * | 2015-03-19 | 2018-10-24 | 新電元工業株式会社 | 半導体装置 |
DE102015111479B4 (de) * | 2015-07-15 | 2020-09-24 | Infineon Technologies Austria Ag | Halbleitervorrichtung mit einer klemmstruktur |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61166164A (ja) | 1985-01-18 | 1986-07-26 | Sanyo Electric Co Ltd | シヨツトキバリア半導体装置 |
US4982260A (en) * | 1989-10-02 | 1991-01-01 | General Electric Company | Power rectifier with trenches |
JP3076638B2 (ja) * | 1991-09-03 | 2000-08-14 | 新電元工業株式会社 | 整流用半導体装置 |
JP3182446B2 (ja) | 1992-03-13 | 2001-07-03 | 新電元工業株式会社 | ショットキバリア整流半導体装置 |
US5262668A (en) * | 1992-08-13 | 1993-11-16 | North Carolina State University At Raleigh | Schottky barrier rectifier including schottky barrier regions of differing barrier heights |
JP3099557B2 (ja) | 1992-11-09 | 2000-10-16 | 富士電機株式会社 | ダイオード |
JPH08116072A (ja) * | 1994-10-17 | 1996-05-07 | Murata Mfg Co Ltd | ショットキーバリア半導体装置 |
US6049108A (en) * | 1995-06-02 | 2000-04-11 | Siliconix Incorporated | Trench-gated MOSFET with bidirectional voltage clamping |
US6078090A (en) * | 1997-04-02 | 2000-06-20 | Siliconix Incorporated | Trench-gated Schottky diode with integral clamping diode |
JP3618517B2 (ja) * | 1997-06-18 | 2005-02-09 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
US6362495B1 (en) * | 1998-03-05 | 2002-03-26 | Purdue Research Foundation | Dual-metal-trench silicon carbide Schottky pinch rectifier |
US6252288B1 (en) * | 1999-01-19 | 2001-06-26 | Rockwell Science Center, Llc | High power trench-based rectifier with improved reverse breakdown characteristic |
US6351018B1 (en) * | 1999-02-26 | 2002-02-26 | Fairchild Semiconductor Corporation | Monolithically integrated trench MOSFET and Schottky diode |
US7186609B2 (en) * | 1999-12-30 | 2007-03-06 | Siliconix Incorporated | Method of fabricating trench junction barrier rectifier |
JP3860705B2 (ja) | 2000-03-31 | 2006-12-20 | 新電元工業株式会社 | 半導体装置 |
JP2002009082A (ja) * | 2000-06-21 | 2002-01-11 | Fuji Electric Co Ltd | 半導体装置および半導体装置の製造方法 |
US6426541B2 (en) * | 2000-07-20 | 2002-07-30 | Apd Semiconductor, Inc. | Schottky diode having increased forward current with improved reverse bias characteristics and method of fabrication |
US6593620B1 (en) * | 2000-10-06 | 2003-07-15 | General Semiconductor, Inc. | Trench DMOS transistor with embedded trench schottky rectifier |
JP2002305309A (ja) * | 2001-02-01 | 2002-10-18 | Hitachi Ltd | 半導体装置およびその製造方法 |
US7061066B2 (en) * | 2001-10-17 | 2006-06-13 | Fairchild Semiconductor Corporation | Schottky diode using charge balance structure |
JP4097417B2 (ja) * | 2001-10-26 | 2008-06-11 | 株式会社ルネサステクノロジ | 半導体装置 |
US6562706B1 (en) * | 2001-12-03 | 2003-05-13 | Industrial Technology Research Institute | Structure and manufacturing method of SiC dual metal trench Schottky diode |
US6855593B2 (en) * | 2002-07-11 | 2005-02-15 | International Rectifier Corporation | Trench Schottky barrier diode |
CN2707075Y (zh) * | 2004-05-28 | 2005-07-06 | 帝福企业有限公司 | 一种可快速与表链拆卸、连接的表带扣 |
DE102004053760A1 (de) * | 2004-11-08 | 2006-05-11 | Robert Bosch Gmbh | Halbleitereinrichtung und Verfahren für deren Herstellung |
DE102004053761A1 (de) * | 2004-11-08 | 2006-05-18 | Robert Bosch Gmbh | Halbleitereinrichtung und Verfahren für deren Herstellung |
-
2004
- 2004-12-10 DE DE102004059640A patent/DE102004059640A1/de not_active Withdrawn
-
2005
- 2005-10-13 EP EP05796933.9A patent/EP1825520B1/de not_active Ceased
- 2005-10-13 KR KR1020077012870A patent/KR101044209B1/ko active IP Right Grant
- 2005-10-13 CN CNB2005800420134A patent/CN100557823C/zh not_active Expired - Fee Related
- 2005-10-13 JP JP2007544854A patent/JP4928463B2/ja not_active Expired - Fee Related
- 2005-10-13 WO PCT/EP2005/055227 patent/WO2006061277A1/de active Application Filing
- 2005-10-13 US US11/792,896 patent/US7902626B2/en not_active Expired - Fee Related
- 2005-10-25 TW TW094137258A patent/TWI446550B/zh not_active IP Right Cessation
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101645448B (zh) * | 2008-08-06 | 2013-11-13 | 飞兆半导体公司 | 用于在沟槽下形成pn嵌位区的结构和方法 |
CN102376568A (zh) * | 2010-08-19 | 2012-03-14 | 北大方正集团有限公司 | 在深沟槽肖特基二极管晶圆的深沟槽内淀积多晶硅的方法 |
CN102376568B (zh) * | 2010-08-19 | 2015-08-05 | 北大方正集团有限公司 | 在深沟槽肖特基二极管晶圆的深沟槽内淀积多晶硅的方法 |
CN104425569A (zh) * | 2013-09-11 | 2015-03-18 | 英飞凌科技股份有限公司 | 半导体器件、结型场效应晶体管和垂直场效应晶体管 |
CN104425569B (zh) * | 2013-09-11 | 2018-02-23 | 英飞凌科技股份有限公司 | 半导体器件、结型场效应晶体管和垂直场效应晶体管 |
CN105957864A (zh) * | 2015-03-09 | 2016-09-21 | 罗伯特·博世有限公司 | 具有沟槽型mos势垒肖特基二极管的半导体装置 |
CN105957901A (zh) * | 2015-03-09 | 2016-09-21 | 罗伯特·博世有限公司 | 具有沟槽-肖特基-势垒-肖特基-二极管的半导体装置 |
CN106784071A (zh) * | 2016-12-07 | 2017-05-31 | 同方威视技术股份有限公司 | 光电二极管器件、光电二极管探测器及其制造方法 |
CN106783954A (zh) * | 2016-12-26 | 2017-05-31 | 东莞市联洲知识产权运营管理有限公司 | 一种低功率沟槽式肖特基整流器件及其制造方法 |
CN106783954B (zh) * | 2016-12-26 | 2019-09-20 | 杭州易正科技有限公司 | 一种低功率沟槽式肖特基整流器件及其制造方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2006061277A1 (de) | 2006-06-15 |
KR20070092225A (ko) | 2007-09-12 |
CN100557823C (zh) | 2009-11-04 |
US20090032897A1 (en) | 2009-02-05 |
TW200620681A (en) | 2006-06-16 |
EP1825520A1 (de) | 2007-08-29 |
TWI446550B (zh) | 2014-07-21 |
KR101044209B1 (ko) | 2011-06-29 |
JP2008523596A (ja) | 2008-07-03 |
JP4928463B2 (ja) | 2012-05-09 |
US7902626B2 (en) | 2011-03-08 |
DE102004059640A1 (de) | 2006-06-22 |
EP1825520B1 (de) | 2019-12-11 |
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CI01 | Publication of corrected invention patent application |
Correction item: Second inventor Correct: Qu Ning Number: 44 Page: 1358 Volume: 25 |
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