CN101048530A - 涂层产品及其制造方法 - Google Patents

涂层产品及其制造方法 Download PDF

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Publication number
CN101048530A
CN101048530A CNA2005800370188A CN200580037018A CN101048530A CN 101048530 A CN101048530 A CN 101048530A CN A2005800370188 A CNA2005800370188 A CN A2005800370188A CN 200580037018 A CN200580037018 A CN 200580037018A CN 101048530 A CN101048530 A CN 101048530A
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CN
China
Prior art keywords
coating
composition
matrix
compound coating
group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2005800370188A
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English (en)
Chinese (zh)
Inventor
米卡埃尔·舒伊斯基
延斯－彼得·帕尔姆奎斯特
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sandvik Intellectual Property AB
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Sandvik Intellectual Property AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sandvik Intellectual Property AB filed Critical Sandvik Intellectual Property AB
Publication of CN101048530A publication Critical patent/CN101048530A/zh
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0676—Oxynitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0688—Cermets, e.g. mixtures of metal and one or more of carbides, nitrides, oxides or borides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/221—Ion beam deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/266—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension of base or substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Reduction Rolling/Reduction Stand/Operation Of Reduction Machine (AREA)
  • Laminated Bodies (AREA)
CNA2005800370188A 2004-11-26 2005-11-28 涂层产品及其制造方法 Pending CN101048530A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE04029047 2004-11-26
SE0402904A SE0402904L (sv) 2004-11-26 2004-11-26 Belagd produkt och produktionsmetod för denna

Publications (1)

Publication Number Publication Date
CN101048530A true CN101048530A (zh) 2007-10-03

Family

ID=33538404

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2005800370188A Pending CN101048530A (zh) 2004-11-26 2005-11-28 涂层产品及其制造方法

Country Status (7)

Country Link
US (1) US20090047510A1 (https=)
EP (1) EP1851353A2 (https=)
JP (1) JP2008522026A (https=)
KR (1) KR20070083961A (https=)
CN (1) CN101048530A (https=)
SE (1) SE0402904L (https=)
WO (1) WO2006057618A2 (https=)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102054497B (zh) * 2009-11-06 2013-01-02 中国科学院上海硅酸盐研究所 磁头衬底材料及其制备方法
KR20140098826A (ko) * 2011-11-28 2014-08-08 페더럴-모걸 코오포레이숀 탄소 퇴적 방지 코팅물질을 가진 피스톤 및 그 구성 방법
CN106083117A (zh) * 2016-06-21 2016-11-09 中国科学院宁波材料技术与工程研究所 具有三元层状max相界面层的纤维增韧陶瓷基复合材料及其制备方法
CN107217231A (zh) * 2017-05-16 2017-09-29 福建新越金属材料科技有限公司 基于磁控共同溅射技术在铝基材上制备的装饰性涂层
CN109722637A (zh) * 2018-12-24 2019-05-07 中国科学院宁波材料技术与工程研究所 润滑涂层及其制备方法
CN112695282A (zh) * 2020-12-15 2021-04-23 中国科学院宁波材料技术与工程研究所 一种抗中高温水蒸气腐蚀的防护涂层及其制备方法与应用
CN114450380A (zh) * 2019-07-30 2022-05-06 德雷塞尔大学 Max相-金复合材料及其制造方法
CN115896726A (zh) * 2023-02-22 2023-04-04 中国科学院宁波材料技术与工程研究所 一种MAX-Ag相复合涂层及其制备方法和应用

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SE0402865L (sv) * 2004-11-04 2006-05-05 Sandvik Intellectual Property Belagd produkt och framställningsmetod för denna
SE530443C2 (sv) * 2006-10-19 2008-06-10 Totalfoersvarets Forskningsins Mikrovågsabsorbent, speciellt för högtemperaturtillämpning
US20080131686A1 (en) * 2006-12-05 2008-06-05 United Technologies Corporation Environmentally friendly wear resistant carbide coating
SE531749C2 (sv) * 2007-09-17 2009-07-28 Seco Tools Ab Metod att utfälla slitstarka skikt på hårdmetall med bågförångning och katod med Ti3SiC2 som huvudbeståndsdel
US9023493B2 (en) * 2010-07-13 2015-05-05 L. Pierre de Rochemont Chemically complex ablative max-phase material and method of manufacture
CN103770397B (zh) * 2012-10-26 2016-04-27 南昌航空大学 一种(Ti,Al,Si)N-Mo(S,N)2-Ag/TiAlN纳米多层涂层
KR20140090754A (ko) * 2013-01-10 2014-07-18 부산대학교 산학협력단 Ｍａｘ 상 박막의 제조방법
WO2014149097A2 (en) * 2013-03-15 2014-09-25 United Technologies Corporation Maxmet composites for turbine engine component tips
EP3074619B1 (en) * 2013-11-26 2024-04-10 RTX Corporation Method of providing a self-healing coating
EP2945207A1 (en) 2014-05-14 2015-11-18 Haldor Topsøe A/S MAX phase materials for use in solid oxide fuel cells and solid oxide electrolysis cells
EP2944624A1 (en) 2014-05-14 2015-11-18 Haldor Topsøe A/S MAX phase materials free of the elements Al and Si
FR3032449B1 (fr) 2015-02-09 2017-01-27 Office Nat D'etudes Et De Rech Aerospatiales (Onera) Materiaux en cermet et procede de fabrication de tels materiaux
CN104805327B (zh) * 2015-04-17 2017-01-25 安徽工程大学 一种铜‑碳化锡钛自润滑导电涂层及其制备方法
US10199788B1 (en) * 2015-05-28 2019-02-05 National Technology & Engineering Solutions Of Sandia, Llc Monolithic MAX phase ternary alloys for sliding electrical contacts
CA2939288A1 (en) 2015-08-28 2017-02-28 Rolls-Royce High Temperature Composites, Inc. Ceramic matrix composite including silicon carbide fibers in a ceramic matrix comprising a max phase compound
DE102016216428A1 (de) 2016-08-31 2018-03-01 Federal-Mogul Burscheid Gmbh Gleitelement mit MAX-Phasen-Beschichtung
CN111286701B (zh) * 2018-12-07 2022-03-15 中国科学院宁波材料技术与工程研究所 一种宽温域耐磨润滑涂层及其制备方法与应用
CN115961259B (zh) * 2022-12-09 2024-05-03 中国科学院宁波材料技术与工程研究所 一种强韧耐蚀max相多层复合涂层及其制备方法与应用
CN116855886A (zh) * 2023-04-25 2023-10-10 青岛大学 一种燃料电池用金属双极板双层涂层TiC/(Ti,Ta)3SnC2及其制备方法

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CN1868096B (zh) * 2003-10-16 2010-10-13 Abb研究有限公司 用于电接触元件的Mn+1AXn材料涂层
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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102054497B (zh) * 2009-11-06 2013-01-02 中国科学院上海硅酸盐研究所 磁头衬底材料及其制备方法
KR20140098826A (ko) * 2011-11-28 2014-08-08 페더럴-모걸 코오포레이숀 탄소 퇴적 방지 코팅물질을 가진 피스톤 및 그 구성 방법
CN104081030A (zh) * 2011-11-28 2014-10-01 费德罗-莫格尔公司 具有防积碳的涂层的活塞及其制造方法
KR101981565B1 (ko) 2011-11-28 2019-06-04 테네코 인코퍼레이티드 탄소 퇴적 방지 코팅물질을 가진 피스톤 및 그 구성 방법
CN106083117A (zh) * 2016-06-21 2016-11-09 中国科学院宁波材料技术与工程研究所 具有三元层状max相界面层的纤维增韧陶瓷基复合材料及其制备方法
CN107217231A (zh) * 2017-05-16 2017-09-29 福建新越金属材料科技有限公司 基于磁控共同溅射技术在铝基材上制备的装饰性涂层
CN109722637A (zh) * 2018-12-24 2019-05-07 中国科学院宁波材料技术与工程研究所 润滑涂层及其制备方法
CN109722637B (zh) * 2018-12-24 2021-09-07 中国科学院宁波材料技术与工程研究所 润滑涂层及其制备方法
CN114450380A (zh) * 2019-07-30 2022-05-06 德雷塞尔大学 Max相-金复合材料及其制造方法
CN112695282A (zh) * 2020-12-15 2021-04-23 中国科学院宁波材料技术与工程研究所 一种抗中高温水蒸气腐蚀的防护涂层及其制备方法与应用
CN115896726A (zh) * 2023-02-22 2023-04-04 中国科学院宁波材料技术与工程研究所 一种MAX-Ag相复合涂层及其制备方法和应用

Also Published As

Publication number Publication date
EP1851353A2 (en) 2007-11-07
JP2008522026A (ja) 2008-06-26
KR20070083961A (ko) 2007-08-24
SE0402904D0 (sv) 2004-11-26
WO2006057618A2 (en) 2006-06-01
SE0402904L (sv) 2006-05-27
WO2006057618A3 (en) 2006-10-26
US20090047510A1 (en) 2009-02-19

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