CN101003349B - 桥式吊车系统 - Google Patents

桥式吊车系统 Download PDF

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CN101003349B
CN101003349B CN2006101640602A CN200610164060A CN101003349B CN 101003349 B CN101003349 B CN 101003349B CN 2006101640602 A CN2006101640602 A CN 2006101640602A CN 200610164060 A CN200610164060 A CN 200610164060A CN 101003349 B CN101003349 B CN 101003349B
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盐饱保
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Abstract

本发明提供一种桥式吊车系统，在行走轨道(10)的两侧设置暂存区(6、8)，在桥式吊车(4)中设置左右双向进退自由的SCARA型臂(20)，使旋转部(22)和升降驱动部(24)自由地进退到暂存区(6、8)中的任何一个的上部。可提高桥式吊车系统的暂存能力。

Description

桥式吊车系统
技术领域
本发明涉及在行走轨道的左右两侧设置了暂存区的桥式吊车系统。 
背景技术
申请人曾提出过在行走轨道的一侧设置了暂存区的桥式吊车系统的方案(专利文献1)。然后，申请人对进一步增加暂存区的存放能力进行了研究，得出此发明。 
[专利文献1]日本特开2005-206371号公报 
发明内容
本发明的目的是要利用顶棚空间暂存更多的物品、进一步提高桥式吊车系统的搬送效率。本发明的第2个目的是要利用处理装置上方的空间暂存物品。本发明的第3个目的是要设置在通常行走通道侧的桥式吊车和超越用行走通道侧的桥式吊车之间共用的暂存区。 
本发明为桥式吊车系统，沿着具备装载口的处理装置设置有桥式吊车的行走轨道，并在桥式吊车上设置有使用于支持和交接物品的升降台向行走轨道的左右移动的横向移动装置，其特征在于，上述横向移动装置使升降台自由地横向移动到行走轨道的左右两侧，上述桥式吊车系统设置有用于将物品暂时保管在行走轨道左右两侧的各空间中的暂存区； 
将上述行走轨道作为通常行走用的行走轨道，并且设置有与该行走轨道平行的超越用的行走轨道；而且在通常行走用的行走轨道与超 越用的行走轨道之间，设置有通过使升降台横向移动从而可从在任何一条行走轨道上行走的桥式吊车交接物品的暂存区。。 
最好是使行走轨道通过装载口上方地设置，并且在处理装置的上部和从行走轨道看去为处理装置的相反一侧都设置有暂存区。 
本发明由于利用在行走轨道的左右两侧设置暂存区，因此能够设置较多的暂存区，结果提高了搬运效率。 
在通常行走用的行走轨道与超越用的行走轨道之间设置能够从在任何一条轨道中行走的桥式吊车移载物品的共用暂存区。这是可能的是因为桥式吊车使升降台自由地横向移动到行走轨道的左右两侧。因此，虽然没有特别的限制，但可以用通常行走用的行走轨道中的桥式吊车将物品从装载口搬出到共用暂存区内，用超越用的行走轨道中的桥式吊车将物品从共用暂存区搬运到目的地，或者反过来，用超越用的行走轨道中的桥式吊车将物品搬入共用暂存区，接着将该物品搬入装载口等。并且，无论是对于超越用行走轨道还是对于通常行走用的行走轨道，都能增加可以利用的暂存区的数量。 
第2方案由于能够将暂存区设置在处理装置上部的空的空间中，因此能够设置更多的暂存区。 
附图说明
图1是实施例的桥式吊车系统的主要部分的主视图，单点划线表示SCARA型臂向处理装置的相反侧进退的姿态，双点划线表示SCARA型臂向处理装置一侧进退的姿态。 
图2是变形例的桥式吊车系统的主要部分的主视图，单点划线表示2级倍速输送带向处理装置的相反侧进退的姿态，双点划线表示倍速输送带向处理装置一侧进退的姿态。 
图3是表示实施例的桥式吊车系统的主要部分的布局的俯视图。 
图4是沿IV-IV线从图3的下面向上看图3的放大图。 
图5是表示使用了从通常通道向旁路通道中移载物品的从装载口连续搬出的算法的流程图。 
图6是表示实施例的桥式吊车系统中使暂存区的数量最大的布局的主要部分的主视图。 
图7是表示实施例的桥式吊车系统中适用于低速处理装置的布局的主要部分的主视图。 
图8是图7的布局的主要部分的俯视图。 
具体实施方式
下面说明用于实施本发明的优选实施例。 
[实施例] 
图1～图8表示实施例及其变形例。在各图中，2为桥式吊车系统，利用例如洁净室内的顶部空间配置，在处理装置或检查装置等的装载口之间搬运收容有半导体晶片的FOUP等物品28，在本说明书中，检查装置视作处理装置的一种。搬运物品的种类可以是任意的，行走轨道由并排设置有处理装置的框内的U字形框内路径、和将框内路径互相连接起来的框间路径2种构成，每种轨道中桥式吊车4都只沿一个方向行走。在各图中以框内路径为中心进行说明，在桥式吊车4的行走轨道10的左右两侧设置侧暂存区6、8，这里，侧暂存区8为处理装置侧的暂存区，侧暂存区6为从行走轨道10看去与处理装置相反一侧的暂存区。 
行走轨道10通过支柱11等被支持在洁净室的顶棚等上，包括行走轨道主体12和供电轨道13。桥式吊车4上设置有行走驱动部14，在行走轨道主体12内行走，由受电部16从供电轨道13受电，并与图中没有表示的系统控制装置之间进行通信。在行走轨道10的下方为桥式吊车4的主体基座18，设置有作为横向移动装置的示例的SCARA型臂(selective compliance assembly robot arm：具有选择顺应 性的装配机器人手臂)20，使旋转部22、升降驱动部24、升降台26以及物品28向左右方向与行走轨道10的行进方向几乎垂直地横向移动。在桥式吊车4的前后，从前后夹着物品28地设置一对防落下盖29，在图1、图2中拆除前侧的防掉下盖29地表示。 
SCARA型臂20具备上下一对臂20a、20b，行走过程中使臂20a、20b沿与行走轨道10平行的方向上下重合，因此旋转部22位于主体基座18的正下方。当横向移动物品28时，如果使臂20a、20b像图1的单点划线所示伸展的话，则物品28横向移动到侧暂存区6的上部。而如果像图1的双点划线所示那样伸展SCARA型臂20的话，则物品28移动到侧暂存区8的上部。虽然使旋转部22的旋转角度在例如±5°内等小范围内就可以，但最好是用旋转部22使物品28的朝向能够例如90°旋转，改变成适合于处理装置的方向。升降驱动部24由旋转部22支持，用带、钢丝绳或绳索等吊持构件使升降台26升降，升降台26用机械手等自由地闭锁或释放物品28上部的凸缘。桥式吊车4利用SCARA型臂20～升降台26能够在其正下方的位置和行走轨道10左右两侧的位置与装载口或暂存区6、8交接物品28。并且，还能够根据必要改变物品28的朝向。另外，图1的30为侧暂存区6、8的支柱。 
横向移动装置只要是能够使物品28横向移动到行走轨道10的左右两侧的装置就可以。图2的桥式吊车34具备上下2级倍速输送带机构36、38，使物品28横向移动。连接部40将上侧倍速输送带机构36的输送带固定在主体基座18上。并且上侧的倍速输送带机构36在滚珠丝杠46等驱动机构的作用下以预定的行程相对于主体基座18左右移动。连接部42连接上下的倍速输送带机构36、38的输送带，下侧的倍速输送带机构38在滚珠丝杠48等驱动机构的作用下相对于上侧的倍速输送带机构36左右移动。这里，例如用滚珠丝杠46、48使上下的倍速输送带机构36、38向图2的左侧移动相同的行程。 由于倍速输送带机构36的输送带用连接部40固定在主体基座18上，因此连接部42向左侧移动其2倍的行程。接着，连接部44相对于连接部42向左移动滚珠丝杠48的行程的2倍的距离。这样一来，如图2的单点划线那样，物品28向行走轨道的左侧(与处理装置相反的一侧)移动。当向相反的方向驱动滚珠丝杠46、48时，像图2的双点划线那样，物品28向行走轨道10的右侧(处理装置一侧)移动。 
图3、图4表示桥式吊车系统2的布局。50、52为半导体等的处理装置，也可以是检查装置，处理装置50的高度低，其上部可以设置侧暂存区8，处理装置52的高度高，侧暂存区8可以设置在通道等的空的空间54中。56为分支部、58为合并部、60为通常通道，为用于与处理装置50、52的装载口64之间移载物品的行走轨道，62为旁通通道，为超越用的行走轨道。并且，通常通道60与旁通通道62平行，用分支部56或合并部58连接。 
对于高度低的处理装置50，在其上部的顶棚空间或空的空间54等中设置侧暂存区8，而对于高度高的处理装置52，在空的空间54内设置侧暂存区8。在装载口64之间的空的空间内，设置例如由桥式吊车的行走轨道等支持的下部暂存区70，但也可以不设置下部暂存区70。在通常通道60与旁通通道62之间设置共用的侧暂存区6，既可以与在通常通道60中行走的桥式吊车自由地交接物品，也可以与在旁通通道62中行走的桥式吊车自由地交接物品。而且，在左右的旁通通道62、62之间设置有使物品从在任一条旁通通道中行走的桥式吊车上自由地横向移动过来的侧暂存区68。另外，也可以不设置侧暂存区68。 
这些布局的结果，飞跃地提高了桥式吊车系统2的暂存能力。尤其是通过使物品自由地在桥式吊车4等的左右两侧之间横向移动，能够利用处理装置50上部的空间，能够在左右两侧设置侧暂存区6、8。并且对于在旁通通道62中行走的桥式吊车也能够在其左右两侧设置 侧暂存区6、68。在需要进一步增加暂存能力的情况下，设置下部暂存区70。左右的旁通通道62中的任何一个都能将侧暂存区68作为暂存区使用，并且还可以用于逆转物品的搬运方向，缩短搬运路径。例如，将在右侧的旁通通道中从图3的下面往上搬运的物品暂时保管在侧暂存区68中。如果用在图3的左侧的旁通通道62中行走的桥式吊车搬出该物品的话，则能够将搬运方向从图3的上逆转到向下。如果这样物品的朝向不适合于处理装置的话，用旋转部将物品旋转2次，每次90°。如果利用通常通道60与旁通通道62之间的侧暂存区6的话，则在通常通道60中行走的桥式吊车4等可以专用于在装载口64与侧暂存区6之间交接物品，而从侧暂存区6到搬运目的地或从出发地到侧暂存区6的搬运可以由在旁通通道62中的行走的桥式吊车4等负担。 
利用了侧暂存区的从装载口连续地搬出多件物品的算法表示在图5中。使搬出物品的装载口附近的通常通道停止，确认只有1辆桥式吊车在停止区间内行走，前进、后退自由。期间，其他的桥式吊车在旁通通道62内行走。然后，使通常通道内的桥式吊车在停止区间内前进、后退，将装载口的物品移载到处理装置相反侧的侧暂存区6内。此时如果在侧暂存区6内设置有积蓄输送机(accumulationconveyer)等的话，不用使通常通道内的桥式吊车前进、后退，只要使升降台升降和横向移动就可以。在旁通通道62内行走的桥式吊车从侧暂存区6装载物品28搬运到目的地。持续进行这一作业，直到没有从装载口搬出的物品为止，然后解除通常通道的停止。另外，图5的算法也可以用于连续地向装载口64内搬入多件物品。此时，可以用通常通道内的桥式吊车将物品从侧暂存区6卸货到装载口64，用旁通通道62内的桥式吊车将物品搬入侧暂存区6。 
装载口64设置在行走轨道10或通常通道60的正下方，使物品横向移动，这样有利于消除位置精度的降低。但是，也可以像图6那 样在通常通道60左右方向的一侧设置装载口64，通过升降台的横向移动和升降来交接物品。此时，最好在装载口64之间的空的空间内设置侧暂存区8，在行走方向相反的左右一对通常通道60之间设置共用的侧暂存区68。 
图7、图8为在框内设置行走轨道的直线区间78而非桥式吊车在框内作U字形移动的例子。71为处理装置，72为分支合并部，74为侧暂存区，自由地与在直线区间78内行走的桥式吊车进行物品交接，76、77为主通道，其行走方向用图8的箭头表示。 
在该例中，将能够同时进入1个直线区间78内的桥式吊车的辆数限制在例如1辆以下等，用侧暂存区74或下部暂存区70暂时保管物品。对于使用了处理速度慢的处理装置71的框，将行走轨道的根数从2根减到1根，能够节省空间。并且通过设置分支合并部72，使桥式吊车在直线区间78内前进、后退自由，能够自由地选择桥式吊车的行走轨道。另外，图6或图7、图8的布局作为桥式吊车系统2的布局的一部分使用。 

Claims (2)

1.一种桥式吊车系统，沿着具备装载口的处理装置设置有桥式吊车的行走轨道，并在桥式吊车上设置有使用于支持和交接物品的升降台向行走轨道的左右移动的横向移动装置，其特征在于，上述横向移动装置使升降台自由地横向移动到行走轨道的左右两侧，上述桥式吊车系统设置有用于将物品暂时保管在行走轨道左右两侧的各空间中的暂存区；
将上述行走轨道作为通常行走用的行走轨道，并设置有与该行走轨道平行的超越用的行走轨道；而且在通常行走用的行走轨道与超越用的行走轨道之间，设置有通过使升降台横向移动从而可从在任何一条行走轨道上行走的桥式吊车交接物品的暂存区。
2.如权利要求1所述的桥式吊车系统，其特征在于，使行走轨道通过装载口上方地设置，并且在处理装置的上部和从行走轨道看去为处理装置的相反一侧都设置有暂存区。
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