CN100526962C - 显示装置及其制造方法 - Google Patents
显示装置及其制造方法 Download PDFInfo
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- CN100526962C CN100526962C CNB2007101540577A CN200710154057A CN100526962C CN 100526962 C CN100526962 C CN 100526962C CN B2007101540577 A CNB2007101540577 A CN B2007101540577A CN 200710154057 A CN200710154057 A CN 200710154057A CN 100526962 C CN100526962 C CN 100526962C
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- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 239000010408 film Substances 0.000 claims abstract description 119
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 62
- 229920005591 polysilicon Polymers 0.000 claims abstract description 62
- 239000000758 substrate Substances 0.000 claims abstract description 39
- 238000002425 crystallisation Methods 0.000 claims abstract description 31
- 230000008025 crystallization Effects 0.000 claims abstract description 25
- 239000010409 thin film Substances 0.000 claims abstract description 22
- 230000002093 peripheral effect Effects 0.000 claims abstract description 15
- 238000005224 laser annealing Methods 0.000 claims abstract description 8
- 238000012423 maintenance Methods 0.000 claims description 63
- 239000002245 particle Substances 0.000 claims description 19
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 11
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 238000000059 patterning Methods 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 3
- 239000003990 capacitor Substances 0.000 abstract description 10
- 239000010410 layer Substances 0.000 description 67
- 229910052751 metal Inorganic materials 0.000 description 21
- 239000002184 metal Substances 0.000 description 21
- 239000004973 liquid crystal related substance Substances 0.000 description 17
- 239000012535 impurity Substances 0.000 description 7
- 239000011229 interlayer Substances 0.000 description 5
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 239000011651 chromium Substances 0.000 description 4
- 229910052750 molybdenum Inorganic materials 0.000 description 4
- 239000011733 molybdenum Substances 0.000 description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical group [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000012447 hatching Effects 0.000 description 2
- 239000007943 implant Substances 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000000137 annealing Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
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Abstract
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Claims (12)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006249671 | 2006-09-14 | ||
JP2006249670 | 2006-09-14 | ||
JP2006249670 | 2006-09-14 | ||
JP2007179898 | 2007-07-09 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101145566A CN101145566A (zh) | 2008-03-19 |
CN100526962C true CN100526962C (zh) | 2009-08-12 |
Family
ID=39207962
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2007101540577A Active CN100526962C (zh) | 2006-09-14 | 2007-09-13 | 显示装置及其制造方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN100526962C (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104393018A (zh) * | 2014-01-21 | 2015-03-04 | 苹果公司 | 具有底部屏蔽的有机发光二极管显示器 |
CN104900655A (zh) * | 2015-04-14 | 2015-09-09 | 京东方科技集团股份有限公司 | 阵列基板及其制备方法、显示装置 |
US9716134B2 (en) | 2014-01-21 | 2017-07-25 | Apple Inc. | Organic light-emitting diode display with bottom shields |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2284891B1 (en) * | 2009-08-07 | 2019-07-24 | Semiconductor Energy Laboratory Co, Ltd. | Semiconductor device and manufacturing method thereof |
JP2015015440A (ja) * | 2013-07-08 | 2015-01-22 | ソニー株式会社 | 半導体装置およびその製造方法、並びに表示装置および電子機器 |
CN105334680A (zh) * | 2014-08-15 | 2016-02-17 | 群创光电股份有限公司 | 阵列基板结构及接触结构 |
JP6432222B2 (ja) * | 2014-09-03 | 2018-12-05 | セイコーエプソン株式会社 | 有機エレクトロルミネッセンス装置および電子機器 |
KR102471668B1 (ko) * | 2014-11-10 | 2022-11-29 | 엘지디스플레이 주식회사 | 유기발광 다이오드 표시장치 및 그 제조방법 |
KR102441882B1 (ko) * | 2015-12-28 | 2022-09-08 | 삼성디스플레이 주식회사 | 액정 표시 장치 |
KR102526611B1 (ko) * | 2016-05-31 | 2023-04-28 | 엘지디스플레이 주식회사 | 표시장치 |
CN106952964B (zh) * | 2017-05-22 | 2020-02-14 | 京东方科技集团股份有限公司 | 一种薄膜晶体管及其制备方法、阵列基板和显示面板 |
CN107331669B (zh) * | 2017-06-19 | 2020-01-31 | 深圳市华星光电半导体显示技术有限公司 | Tft驱动背板的制作方法 |
-
2007
- 2007-09-13 CN CNB2007101540577A patent/CN100526962C/zh active Active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104393018A (zh) * | 2014-01-21 | 2015-03-04 | 苹果公司 | 具有底部屏蔽的有机发光二极管显示器 |
US9716134B2 (en) | 2014-01-21 | 2017-07-25 | Apple Inc. | Organic light-emitting diode display with bottom shields |
CN104900655A (zh) * | 2015-04-14 | 2015-09-09 | 京东方科技集团股份有限公司 | 阵列基板及其制备方法、显示装置 |
Also Published As
Publication number | Publication date |
---|---|
CN101145566A (zh) | 2008-03-19 |
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Owner name: NANKAI UNIVERSITY Free format text: FORMER OWNER: SANYO EPSON IMAGING DEVICES CO. Effective date: 20110518 |
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Free format text: CORRECT: ADDRESS; FROM: NAGANO PREFECTURE, JAPAN TO: TOKYO, JAPAN |
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Effective date of registration: 20110518 Address after: Tokyo, Japan Patentee after: Sony Corp. Address before: Nagano Patentee before: Sanyo Epson Imaging Devices Co. |
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Owner name: NIPPON DISPLAY CO., LTD. Free format text: FORMER OWNER: SONY CORPORATION Effective date: 20121123 |
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Effective date of registration: 20121123 Address after: Aichi Patentee after: Japan display West Co.,Ltd. Address before: Tokyo, Japan Patentee before: Sony Corp. |
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Effective date of registration: 20211027 Address after: Tokyo, Japan Patentee after: JAPAN DISPLAY Inc. Address before: Aichi Patentee before: Japan display West Co.,Ltd. |
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