CN100510400C - 隔膜泵和具有隔膜泵的冷却系统 - Google Patents

隔膜泵和具有隔膜泵的冷却系统 Download PDF

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Publication number
CN100510400C
CN100510400C CNB2004800222872A CN200480022287A CN100510400C CN 100510400 C CN100510400 C CN 100510400C CN B2004800222872 A CNB2004800222872 A CN B2004800222872A CN 200480022287 A CN200480022287 A CN 200480022287A CN 100510400 C CN100510400 C CN 100510400C
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CN
China
Prior art keywords
pressure chamber
runner
liquid
side runner
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2004800222872A
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English (en)
Chinese (zh)
Other versions
CN1833105A (zh
Inventor
山本满
佐佐木康弘
越智笃
北城荣
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NEC Corp
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NEC Corp
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Publication date
Application filed by NEC Corp filed Critical NEC Corp
Publication of CN1833105A publication Critical patent/CN1833105A/zh
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Publication of CN100510400C publication Critical patent/CN100510400C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Details Of Reciprocating Pumps (AREA)
CNB2004800222872A 2003-08-04 2004-07-21 隔膜泵和具有隔膜泵的冷却系统 Expired - Fee Related CN100510400C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003285915 2003-08-04
JP285915/2003 2003-08-04

Publications (2)

Publication Number Publication Date
CN1833105A CN1833105A (zh) 2006-09-13
CN100510400C true CN100510400C (zh) 2009-07-08

Family

ID=34113910

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2004800222872A Expired - Fee Related CN100510400C (zh) 2003-08-04 2004-07-21 隔膜泵和具有隔膜泵的冷却系统

Country Status (5)

Country Link
US (1) US20070065308A1 (fr)
JP (1) JPWO2005012729A1 (fr)
CN (1) CN100510400C (fr)
TW (1) TWI255886B (fr)
WO (1) WO2005012729A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111255667A (zh) * 2020-01-15 2020-06-09 东方红卫星移动通信有限公司 一种低轨卫星微流控系统的压电致动微驱动器

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CN100338361C (zh) * 2005-08-12 2007-09-19 北京工业大学 无阀压电泵
EP1958920A4 (fr) * 2005-12-09 2011-06-15 Kyocera Corp Actionneur de fluide, dispositif générateur de chaleur utilisant ledit actionneur de fluide, et dispositif d analyse
TW200839495A (en) * 2007-03-30 2008-10-01 Cooler Master Co Ltd Structure of water cooling head
GB0804739D0 (en) * 2008-03-14 2008-04-16 The Technology Partnership Plc Pump
EP2306018B1 (fr) * 2008-06-03 2016-05-11 Murata Manufacturing Co. Ltd. Microsoufflante piézoélectrique
TWI360517B (en) * 2008-12-19 2012-03-21 Benq Materials Corp Method of making bubble-type micro-pump
CN102597519B (zh) * 2009-12-04 2015-07-08 株式会社村田制作所 压电微型鼓风机
US8480622B2 (en) * 2009-12-18 2013-07-09 Sims Infusion pump
TWI412716B (zh) * 2010-10-13 2013-10-21 Microjet Technology Co Ltd 可吸熱式流體輸送裝置
DE102011052432A1 (de) * 2011-04-15 2012-10-18 Reinhausen Plasma Gmbh Membranpumpe und Verfahren zum Fördern von feinkörnigen Pulvern mit Hilfe einer Membranpumpe
EP2511529A1 (fr) * 2011-04-15 2012-10-17 Ikerlan, S. Coop. Cýur d'impulsion pour micropompe de fluides
DE102016201182A1 (de) 2016-01-27 2017-07-27 Siemens Aktiengesellschaft Membranpumpe mit Staubansaugung von unten
DE102016216006A1 (de) 2016-08-25 2018-03-01 Siemens Aktiengesellschaft Doppelmembran für eine Staubpumpe
DE102016216016A1 (de) 2016-08-25 2018-03-15 Siemens Aktiengesellschaft Herstellung eines porösen Aluminiumfilters für eine Membranpumpe
DE102016216012A1 (de) 2016-08-25 2018-03-01 Siemens Aktiengesellschaft Membranpumpe mit porösem, gewölbtem Aluminiumfilter
JP2018103380A (ja) * 2016-12-22 2018-07-05 東芝テック株式会社 液体循環モジュール、液体吐出装置、及び液体吐出方法
CN107381701B (zh) * 2017-08-22 2020-09-01 西安建筑科技大学 一种利用恒压微气泡发生器供气的臭氧气浮装置及方法
CN108678880A (zh) * 2018-05-22 2018-10-19 湖北赛恩斯科技股份有限公司 一种燃油泵
JP6912004B2 (ja) * 2018-05-31 2021-07-28 株式会社村田製作所 流体制御装置
CN108591031A (zh) * 2018-05-31 2018-09-28 东莞市创点智能卫浴实业有限公司 一种新型水气自吸流体混合一体式泡沫泵及应用其卫浴装置
JP7214500B2 (ja) * 2019-02-20 2023-01-30 東芝テック株式会社 圧電ポンプ、及び、液体吐出装置
US20220260067A1 (en) * 2019-06-03 2022-08-18 Sony Group Corporation Fluid control apparatus and electronic apparatus
JP7370739B2 (ja) * 2019-06-21 2023-10-30 東芝テック株式会社 圧電ポンプ、及び、液体吐出装置
JP2022039456A (ja) * 2020-08-28 2022-03-10 日本電産トーソク株式会社 電動ポンプ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2671412B2 (ja) * 1988-08-02 1997-10-29 日本電気株式会社 圧電型マイクロポンプ
CN1378041A (zh) * 2002-05-20 2002-11-06 张建辉 高频阀压电泵及其泵腔设计方法
US6520753B1 (en) * 1999-06-04 2003-02-18 California Institute Of Technology Planar micropump

Family Cites Families (9)

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Publication number Priority date Publication date Assignee Title
JPS6154566U (fr) * 1984-09-14 1986-04-12
US5611214A (en) * 1994-07-29 1997-03-18 Battelle Memorial Institute Microcomponent sheet architecture
JP2971412B2 (ja) * 1997-03-07 1999-11-08 バンドー化学株式会社 突起付き搬送ベルト及びその製造方法
US6042345A (en) * 1997-04-15 2000-03-28 Face International Corporation Piezoelectrically actuated fluid pumps
JP2000087862A (ja) * 1998-09-11 2000-03-28 Citizen Watch Co Ltd マイクロポンプ及びその製造方法
WO2001066947A1 (fr) * 2000-03-06 2001-09-13 Hitachi, Ltd. Systeme de distribution de liquide et dispositif associe
TW558611B (en) * 2001-07-18 2003-10-21 Matsushita Electric Ind Co Ltd Small pump, cooling system and portable equipment
JP4365564B2 (ja) * 2001-07-18 2009-11-18 パナソニック株式会社 小型ポンプ
JP6056150B2 (ja) * 2011-04-08 2017-01-11 日亜化学工業株式会社 半導体発光素子

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2671412B2 (ja) * 1988-08-02 1997-10-29 日本電気株式会社 圧電型マイクロポンプ
US6520753B1 (en) * 1999-06-04 2003-02-18 California Institute Of Technology Planar micropump
CN1378041A (zh) * 2002-05-20 2002-11-06 张建辉 高频阀压电泵及其泵腔设计方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111255667A (zh) * 2020-01-15 2020-06-09 东方红卫星移动通信有限公司 一种低轨卫星微流控系统的压电致动微驱动器

Also Published As

Publication number Publication date
TW200508489A (en) 2005-03-01
CN1833105A (zh) 2006-09-13
WO2005012729A1 (fr) 2005-02-10
US20070065308A1 (en) 2007-03-22
JPWO2005012729A1 (ja) 2007-11-01
TWI255886B (en) 2006-06-01

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Granted publication date: 20090708

Termination date: 20100721