TWI255886B - Diaphragm pump and cooling system provided with diaphragm pump - Google Patents

Diaphragm pump and cooling system provided with diaphragm pump

Info

Publication number
TWI255886B
TWI255886B TW093122278A TW93122278A TWI255886B TW I255886 B TWI255886 B TW I255886B TW 093122278 A TW093122278 A TW 093122278A TW 93122278 A TW93122278 A TW 93122278A TW I255886 B TWI255886 B TW I255886B
Authority
TW
Taiwan
Prior art keywords
side passage
diaphragm pump
pump
pressure chamber
valve
Prior art date
Application number
TW093122278A
Other languages
English (en)
Other versions
TW200508489A (en
Inventor
Mitsuru Yamamoto
Yasuhiro Sasaki
Atsushi Ochi
Sakae Kitajo
Original Assignee
Nec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nec Corp filed Critical Nec Corp
Publication of TW200508489A publication Critical patent/TW200508489A/zh
Application granted granted Critical
Publication of TWI255886B publication Critical patent/TWI255886B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Details Of Reciprocating Pumps (AREA)
TW093122278A 2003-08-04 2004-07-26 Diaphragm pump and cooling system provided with diaphragm pump TWI255886B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003285915 2003-08-04

Publications (2)

Publication Number Publication Date
TW200508489A TW200508489A (en) 2005-03-01
TWI255886B true TWI255886B (en) 2006-06-01

Family

ID=34113910

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093122278A TWI255886B (en) 2003-08-04 2004-07-26 Diaphragm pump and cooling system provided with diaphragm pump

Country Status (5)

Country Link
US (1) US20070065308A1 (zh)
JP (1) JPWO2005012729A1 (zh)
CN (1) CN100510400C (zh)
TW (1) TWI255886B (zh)
WO (1) WO2005012729A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI412716B (zh) * 2010-10-13 2013-10-21 Microjet Technology Co Ltd 可吸熱式流體輸送裝置

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* Cited by examiner, † Cited by third party
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CN100338361C (zh) * 2005-08-12 2007-09-19 北京工业大学 无阀压电泵
CN101360679B (zh) * 2005-12-09 2013-07-10 京瓷株式会社 流体驱动器和使用该流体驱动器的发热装置以及分析装置
TW200839495A (en) * 2007-03-30 2008-10-01 Cooler Master Co Ltd Structure of water cooling head
GB0804739D0 (en) * 2008-03-14 2008-04-16 The Technology Partnership Plc Pump
EP3073114B1 (en) * 2008-06-03 2018-07-25 Murata Manufacturing Co., Ltd. Piezoelectric micro-blower
TWI360517B (en) * 2008-12-19 2012-03-21 Benq Materials Corp Method of making bubble-type micro-pump
EP2508758B1 (en) 2009-12-04 2019-05-29 Murata Manufacturing Co., Ltd. Piezoelectric micro-blower
WO2011075706A1 (en) * 2009-12-18 2011-06-23 K&Y Corporation Infusion pump
DE102011052432A1 (de) * 2011-04-15 2012-10-18 Reinhausen Plasma Gmbh Membranpumpe und Verfahren zum Fördern von feinkörnigen Pulvern mit Hilfe einer Membranpumpe
EP2511529A1 (en) * 2011-04-15 2012-10-17 Ikerlan, S. Coop. Impulsion core for a fluid micropump
DE102016201182A1 (de) * 2016-01-27 2017-07-27 Siemens Aktiengesellschaft Membranpumpe mit Staubansaugung von unten
DE102016216016A1 (de) 2016-08-25 2018-03-15 Siemens Aktiengesellschaft Herstellung eines porösen Aluminiumfilters für eine Membranpumpe
DE102016216012A1 (de) 2016-08-25 2018-03-01 Siemens Aktiengesellschaft Membranpumpe mit porösem, gewölbtem Aluminiumfilter
DE102016216006A1 (de) 2016-08-25 2018-03-01 Siemens Aktiengesellschaft Doppelmembran für eine Staubpumpe
JP2018103380A (ja) * 2016-12-22 2018-07-05 東芝テック株式会社 液体循環モジュール、液体吐出装置、及び液体吐出方法
CN107381701B (zh) * 2017-08-22 2020-09-01 西安建筑科技大学 一种利用恒压微气泡发生器供气的臭氧气浮装置及方法
CN108678880A (zh) * 2018-05-22 2018-10-19 湖北赛恩斯科技股份有限公司 一种燃油泵
CN108591031A (zh) * 2018-05-31 2018-09-28 东莞市创点智能卫浴实业有限公司 一种新型水气自吸流体混合一体式泡沫泵及应用其卫浴装置
EP3751141B1 (en) * 2018-05-31 2023-09-20 Murata Manufacturing Co., Ltd. Pump
JP7214500B2 (ja) * 2019-02-20 2023-01-30 東芝テック株式会社 圧電ポンプ、及び、液体吐出装置
US20220260067A1 (en) * 2019-06-03 2022-08-18 Sony Group Corporation Fluid control apparatus and electronic apparatus
JP7370739B2 (ja) * 2019-06-21 2023-10-30 東芝テック株式会社 圧電ポンプ、及び、液体吐出装置
CN111255667B (zh) * 2020-01-15 2021-11-02 东方红卫星移动通信有限公司 一种低轨卫星微流控系统的压电致动微驱动器
JP2022039456A (ja) * 2020-08-28 2022-03-10 日本電産トーソク株式会社 電動ポンプ

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JPS6154566U (zh) * 1984-09-14 1986-04-12
JP2671412B2 (ja) * 1988-08-02 1997-10-29 日本電気株式会社 圧電型マイクロポンプ
US5611214A (en) * 1994-07-29 1997-03-18 Battelle Memorial Institute Microcomponent sheet architecture
JP2971412B2 (ja) * 1997-03-07 1999-11-08 バンドー化学株式会社 突起付き搬送ベルト及びその製造方法
US6042345A (en) * 1997-04-15 2000-03-28 Face International Corporation Piezoelectrically actuated fluid pumps
JP2000087862A (ja) * 1998-09-11 2000-03-28 Citizen Watch Co Ltd マイクロポンプ及びその製造方法
US6520753B1 (en) * 1999-06-04 2003-02-18 California Institute Of Technology Planar micropump
WO2001066947A1 (fr) * 2000-03-06 2001-09-13 Hitachi, Ltd. Systeme de distribution de liquide et dispositif associe
JP4365564B2 (ja) * 2001-07-18 2009-11-18 パナソニック株式会社 小型ポンプ
TW558611B (en) * 2001-07-18 2003-10-21 Matsushita Electric Ind Co Ltd Small pump, cooling system and portable equipment
CN1378041A (zh) * 2002-05-20 2002-11-06 张建辉 高频阀压电泵及其泵腔设计方法
JP6056150B2 (ja) * 2011-04-08 2017-01-11 日亜化学工業株式会社 半導体発光素子

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI412716B (zh) * 2010-10-13 2013-10-21 Microjet Technology Co Ltd 可吸熱式流體輸送裝置

Also Published As

Publication number Publication date
TW200508489A (en) 2005-03-01
WO2005012729A1 (ja) 2005-02-10
JPWO2005012729A1 (ja) 2007-11-01
CN100510400C (zh) 2009-07-08
US20070065308A1 (en) 2007-03-22
CN1833105A (zh) 2006-09-13

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