EP1253320A3 - Pump and method of manufacturing same - Google Patents
Pump and method of manufacturing same Download PDFInfo
- Publication number
- EP1253320A3 EP1253320A3 EP02008979A EP02008979A EP1253320A3 EP 1253320 A3 EP1253320 A3 EP 1253320A3 EP 02008979 A EP02008979 A EP 02008979A EP 02008979 A EP02008979 A EP 02008979A EP 1253320 A3 EP1253320 A3 EP 1253320A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- check valve
- pump
- pump chamber
- manufacturing same
- inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000012528 membrane Substances 0.000 abstract 2
- 239000010409 thin film Substances 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
- F04B53/1037—Flap valves
- F04B53/1047—Flap valves the valve being formed by one or more flexible elements
- F04B53/106—Flap valves the valve being formed by one or more flexible elements the valve being a membrane
- F04B53/1062—Flap valves the valve being formed by one or more flexible elements the valve being a membrane fixed at two or more points at its periphery
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001125904 | 2001-04-24 | ||
JP2001125904 | 2001-04-24 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1253320A2 EP1253320A2 (en) | 2002-10-30 |
EP1253320A3 true EP1253320A3 (en) | 2004-02-04 |
EP1253320B1 EP1253320B1 (en) | 2006-02-08 |
Family
ID=18975035
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP02008979A Expired - Lifetime EP1253320B1 (en) | 2001-04-24 | 2002-04-23 | Pump and method of manufacturing same |
Country Status (7)
Country | Link |
---|---|
US (1) | US20030002995A1 (en) |
EP (1) | EP1253320B1 (en) |
KR (1) | KR100494262B1 (en) |
CN (1) | CN1212476C (en) |
DE (1) | DE60209054T2 (en) |
HK (1) | HK1051061B (en) |
TW (1) | TW561223B (en) |
Families Citing this family (47)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10242110A1 (en) * | 2002-09-11 | 2004-03-25 | Thinxxs Gmbh | Micro-pump for chemical and biochemical analysis has valves arranged in recesses in the base part and formed by a valve seat and a valve body |
US6986649B2 (en) * | 2003-04-09 | 2006-01-17 | Motorola, Inc. | Micropump with integrated pressure sensor |
DE102004002078A1 (en) | 2004-01-15 | 2005-08-18 | Knf Flodos Ag | Valve |
WO2005075093A1 (en) * | 2004-02-09 | 2005-08-18 | Matsushita Electric Works, Ltd. | Electrostatic spraying device |
US7790325B2 (en) * | 2004-03-31 | 2010-09-07 | Canon Kabushiki Kaisha | Valve having valve element displaced by at least one of a movement of a diaphragm and a movement of an actuator, and fuel cell using the valve |
US7219848B2 (en) * | 2004-11-03 | 2007-05-22 | Meadwestvaco Corporation | Fluid sprayer employing piezoelectric pump |
CN100406731C (en) * | 2005-03-10 | 2008-07-30 | 张坤林 | Vacuum pump capable of block |
US20080106071A1 (en) * | 2006-11-03 | 2008-05-08 | Chien-Tien Huang | Air venting assembly of air pump |
WO2008101196A1 (en) * | 2007-02-15 | 2008-08-21 | Osmetech Molecular Diagnostics | Fluidics devices |
CN101255858B (en) * | 2007-03-01 | 2010-05-26 | 讯凯国际股份有限公司 | Film pump and apparatus having the same |
TWI398577B (en) * | 2007-08-31 | 2013-06-11 | Microjet Technology Co Ltd | Fluid transmission device cable of transmitting fluid at relatively large fluid rate |
US20090199904A1 (en) * | 2008-02-13 | 2009-08-13 | Babbitt Guy R | Low shear pumps for use with bioreactors |
CN101608610A (en) * | 2008-06-20 | 2009-12-23 | 微创医疗器械(上海)有限公司 | A kind of micropump |
JP5853587B2 (en) * | 2011-10-26 | 2016-02-09 | オムロンヘルスケア株式会社 | Electronic blood pressure monitor |
DE102012202103A1 (en) | 2012-02-13 | 2013-08-14 | Robert Bosch Gmbh | Pressure compensation element with a membrane, housing, battery cell module and motor vehicle |
TWI475180B (en) * | 2012-05-31 | 2015-03-01 | Ind Tech Res Inst | Synthetic jet equipment |
KR20140147345A (en) * | 2013-06-19 | 2014-12-30 | 삼성전기주식회사 | Micro pump device |
US20150057594A1 (en) * | 2013-08-24 | 2015-02-26 | Alcon Research, Ltd. | Bubble-free microfluidic valve systems and methods |
JP2015117647A (en) * | 2013-12-19 | 2015-06-25 | 東芝テック株式会社 | Piezoelectric pump and ink jet recording device with piezoelectric pump |
JP6695154B2 (en) * | 2016-01-28 | 2020-05-20 | 東芝テック株式会社 | Ink circulation device and printer |
US9976673B2 (en) | 2016-01-29 | 2018-05-22 | Microjet Technology Co., Ltd. | Miniature fluid control device |
US10451051B2 (en) | 2016-01-29 | 2019-10-22 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
US10388850B2 (en) | 2016-01-29 | 2019-08-20 | Microjet Technology Co., Ltd. | Piezoelectric actuator |
EP3203078B1 (en) | 2016-01-29 | 2021-05-26 | Microjet Technology Co., Ltd | Miniature pneumatic device |
US10487821B2 (en) | 2016-01-29 | 2019-11-26 | Microjet Technology Co., Ltd. | Miniature fluid control device |
US10487820B2 (en) | 2016-01-29 | 2019-11-26 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
EP3203080B1 (en) | 2016-01-29 | 2021-09-22 | Microjet Technology Co., Ltd | Miniature pneumatic device |
US10529911B2 (en) | 2016-01-29 | 2020-01-07 | Microjet Technology Co., Ltd. | Piezoelectric actuator |
US10584695B2 (en) | 2016-01-29 | 2020-03-10 | Microjet Technology Co., Ltd. | Miniature fluid control device |
EP3203081B1 (en) | 2016-01-29 | 2021-06-16 | Microjet Technology Co., Ltd | Miniature fluid control device |
TWI722012B (en) * | 2016-01-29 | 2021-03-21 | 研能科技股份有限公司 | Actuator |
US10615329B2 (en) | 2016-01-29 | 2020-04-07 | Microjet Technology Co., Ltd. | Piezoelectric actuator |
US10388849B2 (en) | 2016-01-29 | 2019-08-20 | Microjet Technology Co., Ltd. | Piezoelectric actuator |
KR101910932B1 (en) * | 2016-08-31 | 2018-10-23 | 이오플로우(주) | Electoosmotic pump |
US10746169B2 (en) | 2016-11-10 | 2020-08-18 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
CN108071578A (en) * | 2016-11-10 | 2018-05-25 | 研能科技股份有限公司 | Micro pressure power set |
CN108071577B (en) * | 2016-11-10 | 2020-11-24 | 研能科技股份有限公司 | Micro fluid control device |
CN108071580A (en) * | 2016-11-10 | 2018-05-25 | 研能科技股份有限公司 | Micro pressure power set |
US10655620B2 (en) | 2016-11-10 | 2020-05-19 | Microjet Technology Co., Ltd. | Miniature fluid control device |
US10683861B2 (en) | 2016-11-10 | 2020-06-16 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
DE102018207858B4 (en) * | 2018-05-18 | 2021-06-17 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method and holding device for manufacturing a micropump with a mechanically preloaded diaphragm actuator |
CN110832202B (en) * | 2018-09-30 | 2021-10-29 | 深圳市大疆软件科技有限公司 | Diaphragm pump and agricultural unmanned aerial vehicle |
CN208950819U (en) * | 2018-09-30 | 2019-06-07 | 深圳市大疆软件科技有限公司 | Diaphragm pump and agriculture unmanned plane |
CN208950820U (en) * | 2018-09-30 | 2019-06-07 | 深圳市大疆软件科技有限公司 | Diaphragm pump and agriculture unmanned plane |
WO2020062289A1 (en) * | 2018-09-30 | 2020-04-02 | 深圳市大疆软件科技有限公司 | Diaphragm pump and agricultural plant protection machine having same |
CN110869613B (en) * | 2018-09-30 | 2022-08-19 | 深圳市大疆软件科技有限公司 | Diaphragm pump and agricultural unmanned aerial vehicle |
CN216984886U (en) * | 2021-11-25 | 2022-07-19 | 华为技术有限公司 | Miniature piezoelectric pump and electronic equipment |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0424087A1 (en) * | 1989-10-17 | 1991-04-24 | Seiko Epson Corporation | Micro-pump or micro-discharge device |
EP0789146A1 (en) * | 1995-07-27 | 1997-08-13 | Seiko Epson Corporation | Microvalve and method of manufacturing the same, micropump using the microvalve and method of manufacturing the same, and apparatus using the micropump |
US5759014A (en) * | 1994-01-14 | 1998-06-02 | Westonbridge International Limited | Micropump |
DE19711270A1 (en) * | 1997-03-18 | 1998-09-24 | Schwerionenforsch Gmbh | Micro-pump for fluid media |
US6033191A (en) * | 1997-05-16 | 2000-03-07 | Institut Fur Mikrotechnik Mainz Gmbh | Micromembrane pump |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3107630A (en) * | 1955-01-31 | 1963-10-22 | Textron Inc | Non-magnetic electro-hydraulic pump |
US4519751A (en) * | 1982-12-16 | 1985-05-28 | The Abet Group | Piezoelectric pump with internal load sensor |
US4581624A (en) * | 1984-03-01 | 1986-04-08 | Allied Corporation | Microminiature semiconductor valve |
JPH01174278A (en) * | 1987-12-28 | 1989-07-10 | Misuzu Erii:Kk | Inverter |
CH679555A5 (en) * | 1989-04-11 | 1992-03-13 | Westonbridge Int Ltd | |
JPH03134274A (en) * | 1989-10-17 | 1991-06-07 | Seiko Epson Corp | Valve unit structure for micropump |
SE508435C2 (en) * | 1993-02-23 | 1998-10-05 | Erik Stemme | Diaphragm pump type pump |
US5507318A (en) * | 1994-10-04 | 1996-04-16 | Walbro Corporation | Umbrella check valves |
US5542821A (en) * | 1995-06-28 | 1996-08-06 | Basf Corporation | Plate-type diaphragm pump and method of use |
US5725017A (en) * | 1997-01-27 | 1998-03-10 | Medtronic, Inc. | In-line pressure check valve for drug-delivery systems |
JPH10213077A (en) * | 1997-01-30 | 1998-08-11 | Kasei Optonix Co Ltd | Reed valve for pump |
DE19719861A1 (en) * | 1997-05-12 | 1998-11-19 | Fraunhofer Ges Forschung | Method of manufacturing a micromembrane pump body |
US6575715B1 (en) * | 1997-09-19 | 2003-06-10 | Omnitek Research & Development, Inc. | Structural elements forming a pump |
DE19918694C2 (en) * | 1998-04-27 | 2002-03-14 | Matsushita Electric Works Ltd | Process for measuring the pressure of a fluid and miniature pump for carrying out this process |
US6334761B1 (en) * | 2000-03-02 | 2002-01-01 | California Institute Of Technology | Check-valved silicon diaphragm pump and method of fabricating the same |
US6554591B1 (en) * | 2001-11-26 | 2003-04-29 | Motorola, Inc. | Micropump including ball check valve utilizing ceramic technology and method of fabrication |
-
2002
- 2002-04-16 TW TW091107782A patent/TW561223B/en not_active IP Right Cessation
- 2002-04-23 US US10/127,535 patent/US20030002995A1/en not_active Abandoned
- 2002-04-23 EP EP02008979A patent/EP1253320B1/en not_active Expired - Lifetime
- 2002-04-23 DE DE60209054T patent/DE60209054T2/en not_active Expired - Lifetime
- 2002-04-24 KR KR10-2002-0022511A patent/KR100494262B1/en not_active IP Right Cessation
- 2002-04-24 CN CNB021184593A patent/CN1212476C/en not_active Expired - Fee Related
-
2003
- 2003-03-14 HK HK03101906.8A patent/HK1051061B/en not_active IP Right Cessation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0424087A1 (en) * | 1989-10-17 | 1991-04-24 | Seiko Epson Corporation | Micro-pump or micro-discharge device |
US5759014A (en) * | 1994-01-14 | 1998-06-02 | Westonbridge International Limited | Micropump |
EP0789146A1 (en) * | 1995-07-27 | 1997-08-13 | Seiko Epson Corporation | Microvalve and method of manufacturing the same, micropump using the microvalve and method of manufacturing the same, and apparatus using the micropump |
DE19711270A1 (en) * | 1997-03-18 | 1998-09-24 | Schwerionenforsch Gmbh | Micro-pump for fluid media |
US6033191A (en) * | 1997-05-16 | 2000-03-07 | Institut Fur Mikrotechnik Mainz Gmbh | Micromembrane pump |
Also Published As
Publication number | Publication date |
---|---|
KR100494262B1 (en) | 2005-06-13 |
EP1253320A2 (en) | 2002-10-30 |
EP1253320B1 (en) | 2006-02-08 |
TW561223B (en) | 2003-11-11 |
CN1382909A (en) | 2002-12-04 |
HK1051061A1 (en) | 2003-07-18 |
KR20020082800A (en) | 2002-10-31 |
DE60209054T2 (en) | 2006-08-31 |
US20030002995A1 (en) | 2003-01-02 |
DE60209054D1 (en) | 2006-04-20 |
CN1212476C (en) | 2005-07-27 |
HK1051061B (en) | 2006-08-25 |
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