CN111255667A - 一种低轨卫星微流控系统的压电致动微驱动器 - Google Patents
一种低轨卫星微流控系统的压电致动微驱动器 Download PDFInfo
- Publication number
- CN111255667A CN111255667A CN202010044191.7A CN202010044191A CN111255667A CN 111255667 A CN111255667 A CN 111255667A CN 202010044191 A CN202010044191 A CN 202010044191A CN 111255667 A CN111255667 A CN 111255667A
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- Prior art keywords
- pcb
- micro
- piezoelectric
- pump body
- driver
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims abstract description 54
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 28
- 239000013078 crystal Substances 0.000 claims abstract description 26
- 229910052802 copper Inorganic materials 0.000 claims abstract description 24
- 239000010949 copper Substances 0.000 claims abstract description 24
- 239000000758 substrate Substances 0.000 claims abstract description 23
- 239000000919 ceramic Substances 0.000 claims abstract description 13
- 238000003466 welding Methods 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims description 10
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 9
- 230000010354 integration Effects 0.000 abstract description 9
- 239000000446 fuel Substances 0.000 abstract 1
- 230000017525 heat dissipation Effects 0.000 abstract 1
- 239000012530 fluid Substances 0.000 description 13
- 238000005086 pumping Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000002826 coolant Substances 0.000 description 1
- 150000001879 copper Chemical class 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000010094 polymer processing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B64—AIRCRAFT; AVIATION; COSMONAUTICS
- B64G—COSMONAUTICS; VEHICLES OR EQUIPMENT THEREFOR
- B64G1/00—Cosmonautic vehicles
- B64G1/22—Parts of, or equipment specially adapted for fitting in or to, cosmonautic vehicles
- B64G1/40—Arrangements or adaptations of propulsion systems
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/0009—Special features
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Remote Sensing (AREA)
- Aviation & Aerospace Engineering (AREA)
- Reciprocating Pumps (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202010044191.7A CN111255667B (zh) | 2020-01-15 | 2020-01-15 | 一种低轨卫星微流控系统的压电致动微驱动器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202010044191.7A CN111255667B (zh) | 2020-01-15 | 2020-01-15 | 一种低轨卫星微流控系统的压电致动微驱动器 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN111255667A true CN111255667A (zh) | 2020-06-09 |
CN111255667B CN111255667B (zh) | 2021-11-02 |
Family
ID=70923621
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN202010044191.7A Active CN111255667B (zh) | 2020-01-15 | 2020-01-15 | 一种低轨卫星微流控系统的压电致动微驱动器 |
Country Status (1)
Country | Link |
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CN (1) | CN111255667B (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112420916A (zh) * | 2020-11-23 | 2021-02-26 | 东方红卫星移动通信有限公司 | 集成于pcb上的压电致动微驱动器的制备方法 |
CN113266541A (zh) * | 2021-05-19 | 2021-08-17 | 上海芯物科技有限公司 | 一种热驱动微型气体泵送器件及泵送器件加工方法 |
WO2022200189A1 (en) * | 2021-03-22 | 2022-09-29 | Tomorrow's Motion GmbH | Fluid pump and force generator arrangement with such a fluid pump |
Citations (16)
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CN2193443Y (zh) * | 1994-06-21 | 1995-03-29 | 胡忠民 | 超微型多用泵 |
JPH07151060A (ja) * | 1993-11-29 | 1995-06-13 | Tosoh Corp | 圧電ポンプ |
EP1020911A2 (en) * | 1999-01-13 | 2000-07-19 | Samsung Electronics Co. Ltd. | Cooling apparatus for electronic device |
CN100510400C (zh) * | 2003-08-04 | 2009-07-08 | 日本电气株式会社 | 隔膜泵和具有隔膜泵的冷却系统 |
JP2009250028A (ja) * | 2008-04-01 | 2009-10-29 | Alps Electric Co Ltd | ドライバ内蔵4バルブ圧電ポンプ |
CN103660573A (zh) * | 2012-09-08 | 2014-03-26 | 珠海纳思达电子科技有限公司 | 一种液体喷墨头 |
CN104136777A (zh) * | 2012-02-10 | 2014-11-05 | 凯希特许有限公司 | 用于调节盘泵系统的温度的系统和方法 |
US20150098846A1 (en) * | 2005-07-13 | 2015-04-09 | Fresenius Medical Care Holdings, Inc. | Diaphragm Pumps and Pumping Systems |
CN105977370A (zh) * | 2016-06-17 | 2016-09-28 | 电子科技大学 | 一种基于压电微泵的嵌入式制冷器件及其制备方法 |
CN106246516A (zh) * | 2016-10-10 | 2016-12-21 | 青岛农业大学 | 漏斗形无阀压电泵 |
CN207184929U (zh) * | 2017-09-15 | 2018-04-03 | 金明必 | 胰岛素泵用控制电路板 |
CN108204355A (zh) * | 2018-01-12 | 2018-06-26 | 长春工业大学 | 一种三点固支薄膜阀压电泵 |
CN109162904A (zh) * | 2018-09-20 | 2019-01-08 | 长春工业大学 | 一种斜倾式双主动阀压电泵 |
CN109281899A (zh) * | 2017-07-19 | 2019-01-29 | 波音公司 | 声腔定制的合成射流 |
CN109798239A (zh) * | 2019-04-11 | 2019-05-24 | 长春工业大学 | 一种腔内多种阻流体的无阀压电泵 |
CN208996922U (zh) * | 2018-09-20 | 2019-06-18 | 长春工业大学 | 一种斜倾式双主动阀压电泵 |
-
2020
- 2020-01-15 CN CN202010044191.7A patent/CN111255667B/zh active Active
Patent Citations (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07151060A (ja) * | 1993-11-29 | 1995-06-13 | Tosoh Corp | 圧電ポンプ |
CN2193443Y (zh) * | 1994-06-21 | 1995-03-29 | 胡忠民 | 超微型多用泵 |
EP1020911A2 (en) * | 1999-01-13 | 2000-07-19 | Samsung Electronics Co. Ltd. | Cooling apparatus for electronic device |
CN100510400C (zh) * | 2003-08-04 | 2009-07-08 | 日本电气株式会社 | 隔膜泵和具有隔膜泵的冷却系统 |
US20150098846A1 (en) * | 2005-07-13 | 2015-04-09 | Fresenius Medical Care Holdings, Inc. | Diaphragm Pumps and Pumping Systems |
JP2009250028A (ja) * | 2008-04-01 | 2009-10-29 | Alps Electric Co Ltd | ドライバ内蔵4バルブ圧電ポンプ |
CN104136777A (zh) * | 2012-02-10 | 2014-11-05 | 凯希特许有限公司 | 用于调节盘泵系统的温度的系统和方法 |
CN103660573A (zh) * | 2012-09-08 | 2014-03-26 | 珠海纳思达电子科技有限公司 | 一种液体喷墨头 |
CN105977370A (zh) * | 2016-06-17 | 2016-09-28 | 电子科技大学 | 一种基于压电微泵的嵌入式制冷器件及其制备方法 |
CN106246516A (zh) * | 2016-10-10 | 2016-12-21 | 青岛农业大学 | 漏斗形无阀压电泵 |
CN109281899A (zh) * | 2017-07-19 | 2019-01-29 | 波音公司 | 声腔定制的合成射流 |
CN207184929U (zh) * | 2017-09-15 | 2018-04-03 | 金明必 | 胰岛素泵用控制电路板 |
CN108204355A (zh) * | 2018-01-12 | 2018-06-26 | 长春工业大学 | 一种三点固支薄膜阀压电泵 |
CN109162904A (zh) * | 2018-09-20 | 2019-01-08 | 长春工业大学 | 一种斜倾式双主动阀压电泵 |
CN208996922U (zh) * | 2018-09-20 | 2019-06-18 | 长春工业大学 | 一种斜倾式双主动阀压电泵 |
CN109798239A (zh) * | 2019-04-11 | 2019-05-24 | 长春工业大学 | 一种腔内多种阻流体的无阀压电泵 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112420916A (zh) * | 2020-11-23 | 2021-02-26 | 东方红卫星移动通信有限公司 | 集成于pcb上的压电致动微驱动器的制备方法 |
CN112420916B (zh) * | 2020-11-23 | 2022-07-08 | 东方红卫星移动通信有限公司 | 集成于pcb上的压电致动微驱动器的制备方法 |
WO2022200189A1 (en) * | 2021-03-22 | 2022-09-29 | Tomorrow's Motion GmbH | Fluid pump and force generator arrangement with such a fluid pump |
CN113266541A (zh) * | 2021-05-19 | 2021-08-17 | 上海芯物科技有限公司 | 一种热驱动微型气体泵送器件及泵送器件加工方法 |
CN113266541B (zh) * | 2021-05-19 | 2022-05-31 | 上海芯物科技有限公司 | 一种热驱动微型气体泵送器件及泵送器件加工方法 |
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Publication number | Publication date |
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CN111255667B (zh) | 2021-11-02 |
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CB03 | Change of inventor or designer information | ||
CB03 | Change of inventor or designer information |
Inventor after: Tang Liankai Inventor after: Wang Ling Inventor after: Wang Wenbin Inventor after: Zou Guangnan Inventor before: Tang Liankai |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 401120 39-1, Building 1, No. 64, Middle Huangshan Avenue, Yubei District, Chongqing Patentee after: China Star Network Application Co.,Ltd. Address before: 401135 No. 618 Liangjiang Avenue, Longxing Town, Yubei District, Chongqing Patentee before: Dongfanghong Satellite Mobile Communication Co.,Ltd. |