CN100487917C - 场效应晶体管及其形成方法 - Google Patents

场效应晶体管及其形成方法 Download PDF

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Publication number
CN100487917C
CN100487917C CNB2006101484036A CN200610148403A CN100487917C CN 100487917 C CN100487917 C CN 100487917C CN B2006101484036 A CNB2006101484036 A CN B2006101484036A CN 200610148403 A CN200610148403 A CN 200610148403A CN 100487917 C CN100487917 C CN 100487917C
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China
Prior art keywords
dielectric layer
grid dielectric
grid
semiconductor body
gate
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CNB2006101484036A
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English (en)
Chinese (zh)
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CN1967874A (zh
Inventor
安德斯·布赖恩特
布伦特·A·安德森
艾德华·J·诺瓦克
杰弗里·B·约翰逊
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Core Usa Second LLC
GlobalFoundries Inc
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International Business Machines Corp
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Publication of CN1967874A publication Critical patent/CN1967874A/zh
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/024—Manufacture or treatment of FETs having insulated gates [IGFET] of fin field-effect transistors [FinFET]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/62—Fin field-effect transistors [FinFET]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
    • H10D30/673—Thin-film transistors [TFT] characterised by the electrodes characterised by the shapes, relative sizes or dispositions of the gate electrodes

Landscapes

  • Thin Film Transistor (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Electrodes Of Semiconductors (AREA)
CNB2006101484036A 2005-11-15 2006-11-14 场效应晶体管及其形成方法 Expired - Fee Related CN100487917C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/164,216 US7326976B2 (en) 2005-11-15 2005-11-15 Corner dominated trigate field effect transistor
US11/164,216 2005-11-15

Publications (2)

Publication Number Publication Date
CN1967874A CN1967874A (zh) 2007-05-23
CN100487917C true CN100487917C (zh) 2009-05-13

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CNB2006101484036A Expired - Fee Related CN100487917C (zh) 2005-11-15 2006-11-14 场效应晶体管及其形成方法

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US (2) US7326976B2 (enExample)
JP (1) JP5159096B2 (enExample)
CN (1) CN100487917C (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012088796A1 (zh) * 2010-12-31 2012-07-05 中国科学院微电子研究所 半导体器件的形成方法
US8247278B2 (en) 2010-12-31 2012-08-21 Institute of Microelectronics, Chinese Academy of Sciences Method for manufacturing semiconductor device

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CN101877317B (zh) * 2009-04-29 2013-03-27 台湾积体电路制造股份有限公司 非平坦晶体管及其制造方法
JP4794692B2 (ja) * 2009-06-24 2011-10-19 パナソニック株式会社 半導体装置の製造方法
US8362572B2 (en) 2010-02-09 2013-01-29 Taiwan Semiconductor Manufacturing Co., Ltd. Lower parasitic capacitance FinFET
US8174055B2 (en) * 2010-02-17 2012-05-08 Globalfoundries Inc. Formation of FinFET gate spacer
CN102931062B (zh) * 2011-08-09 2015-08-19 中芯国际集成电路制造(上海)有限公司 一种制作鳍式场效应管的翅片结构方法
CN102969248B (zh) * 2011-09-01 2015-06-17 中芯国际集成电路制造(上海)有限公司 一种鳍型场效应晶体管的制作方法
KR102018101B1 (ko) 2013-02-04 2019-11-14 삼성전자 주식회사 반도체 소자 및 이의 제조 방법
FR3002813B1 (fr) 2013-03-01 2016-08-05 St Microelectronics Sa Procede de fabrication d'un transistor mos a ailette
US8987793B2 (en) * 2013-04-23 2015-03-24 Broadcom Corporation Fin-based field-effect transistor with split-gate structure
CN104347415B (zh) * 2013-08-05 2018-03-30 中芯国际集成电路制造(上海)有限公司 鳍式场效应晶体管及其形成方法
US9048123B2 (en) 2013-09-19 2015-06-02 International Business Machines Corporation Interdigitated finFETs
US10084085B2 (en) 2015-06-11 2018-09-25 Taiwan Semiconductor Manufacturing Co., Ltd. Fin field effect transistor (FinFET) device structure with stop layer and method for forming the same
US9905467B2 (en) 2015-09-04 2018-02-27 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor device and manufacturing method thereof
CN107026084B (zh) * 2016-02-02 2020-03-31 中芯国际集成电路制造(上海)有限公司 半导体装置及其制造方法
US10233578B2 (en) 2016-03-17 2019-03-19 Card-Monroe Corp. Tufting machine and method of tufting
US10229919B2 (en) 2016-08-25 2019-03-12 International Business Machines Corporation Vertical field effect transistor including integrated antifuse
CN106356305B (zh) * 2016-11-18 2019-05-31 上海华力微电子有限公司 优化鳍式场效晶体管结构的方法以及鳍式场效晶体管

Citations (3)

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US6844238B2 (en) * 2003-03-26 2005-01-18 Taiwan Semiconductor Manufacturing Co., Ltd Multiple-gate transistors with improved gate control
US6855583B1 (en) * 2003-08-05 2005-02-15 Advanced Micro Devices, Inc. Method for forming tri-gate FinFET with mesa isolation
US6858478B2 (en) * 2002-08-23 2005-02-22 Intel Corporation Tri-gate devices and methods of fabrication

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JP3607431B2 (ja) * 1996-09-18 2005-01-05 株式会社東芝 半導体装置およびその製造方法
JP2882392B2 (ja) * 1996-12-25 1999-04-12 日本電気株式会社 不揮発性半導体記憶装置およびその製造方法
KR100261996B1 (ko) * 1997-11-13 2000-07-15 김영환 플래쉬 메모리 셀 및 그의 제조방법
JP3600072B2 (ja) 1998-07-14 2004-12-08 三洋電機株式会社 半導体装置
US8222680B2 (en) * 2002-10-22 2012-07-17 Advanced Micro Devices, Inc. Double and triple gate MOSFET devices and methods for making same
US7259425B2 (en) * 2003-01-23 2007-08-21 Advanced Micro Devices, Inc. Tri-gate and gate around MOSFET devices and methods for making same
US7045401B2 (en) * 2003-06-23 2006-05-16 Sharp Laboratories Of America, Inc. Strained silicon finFET device
US7005330B2 (en) * 2003-06-27 2006-02-28 Taiwan Semiconductor Manufacturing Company, Ltd. Structure and method for forming the gate electrode in a multiple-gate transistor
US7335934B2 (en) * 2003-07-22 2008-02-26 Innovative Silicon S.A. Integrated circuit device, and method of fabricating same
US7172943B2 (en) * 2003-08-13 2007-02-06 Taiwan Semiconductor Manufacturing Company, Ltd. Multiple-gate transistors formed on bulk substrates
JP2005142203A (ja) * 2003-11-04 2005-06-02 Elpida Memory Inc 半導体装置およびその製造方法
US7186599B2 (en) * 2004-01-12 2007-03-06 Advanced Micro Devices, Inc. Narrow-body damascene tri-gate FinFET
US6888181B1 (en) * 2004-03-18 2005-05-03 United Microelectronics Corp. Triple gate device having strained-silicon channel

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6858478B2 (en) * 2002-08-23 2005-02-22 Intel Corporation Tri-gate devices and methods of fabrication
US6844238B2 (en) * 2003-03-26 2005-01-18 Taiwan Semiconductor Manufacturing Co., Ltd Multiple-gate transistors with improved gate control
US6855583B1 (en) * 2003-08-05 2005-02-15 Advanced Micro Devices, Inc. Method for forming tri-gate FinFET with mesa isolation

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012088796A1 (zh) * 2010-12-31 2012-07-05 中国科学院微电子研究所 半导体器件的形成方法
US8247278B2 (en) 2010-12-31 2012-08-21 Institute of Microelectronics, Chinese Academy of Sciences Method for manufacturing semiconductor device

Also Published As

Publication number Publication date
US7473605B2 (en) 2009-01-06
US7326976B2 (en) 2008-02-05
JP5159096B2 (ja) 2013-03-06
CN1967874A (zh) 2007-05-23
US20070108537A1 (en) 2007-05-17
US20080090361A1 (en) 2008-04-17
JP2007142417A (ja) 2007-06-07

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Effective date of registration: 20171115

Address after: Grand Cayman, Cayman Islands

Patentee after: GLOBALFOUNDRIES INC.

Address before: American New York

Patentee before: Core USA second LLC

Effective date of registration: 20171115

Address after: American New York

Patentee after: Core USA second LLC

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Patentee before: International Business Machines Corp.

CF01 Termination of patent right due to non-payment of annual fee
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Granted publication date: 20090513

Termination date: 20181114