CN100347334C - 具有射频电源供应单元的双频式真空沉积设备 - Google Patents
具有射频电源供应单元的双频式真空沉积设备 Download PDFInfo
- Publication number
- CN100347334C CN100347334C CNB031497179A CN03149717A CN100347334C CN 100347334 C CN100347334 C CN 100347334C CN B031497179 A CNB031497179 A CN B031497179A CN 03149717 A CN03149717 A CN 03149717A CN 100347334 C CN100347334 C CN 100347334C
- Authority
- CN
- China
- Prior art keywords
- power supply
- radio
- frequency power
- feeding unit
- lower electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/40—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal all coatings being metal coatings
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/02—Local etching
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/30—Aspects of methods for coating glass not covered above
- C03C2218/32—After-treatment
- C03C2218/328—Partly or completely removing a coating
- C03C2218/33—Partly or completely removing a coating by etching
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
- G02F1/13629—Multilayer wirings
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Liquid Crystal (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Electrodes Of Semiconductors (AREA)
- Thin Film Transistor (AREA)
Abstract
Description
Claims (6)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020020049192A KR100685953B1 (ko) | 2002-08-20 | 2002-08-20 | 액정표시장치용 배선의 형성방법 |
KR1020020049203 | 2002-08-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1480556A CN1480556A (zh) | 2004-03-10 |
CN100347334C true CN100347334C (zh) | 2007-11-07 |
Family
ID=31884921
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB031496245A Expired - Fee Related CN1238755C (zh) | 2002-08-20 | 2003-08-01 | 形成液晶显示器件的金属线的方法 |
CNB031497179A Expired - Fee Related CN100347334C (zh) | 2002-08-20 | 2003-08-06 | 具有射频电源供应单元的双频式真空沉积设备 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB031496245A Expired - Fee Related CN1238755C (zh) | 2002-08-20 | 2003-08-01 | 形成液晶显示器件的金属线的方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US6930749B2 (zh) |
KR (1) | KR100685953B1 (zh) |
CN (2) | CN1238755C (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103021934A (zh) * | 2012-12-20 | 2013-04-03 | 中微半导体设备(上海)有限公司 | 一种通孔或接触孔的形成方法 |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4181853B2 (ja) * | 2002-11-15 | 2008-11-19 | Nec液晶テクノロジー株式会社 | 積層膜の複合ウェットエッチング方法 |
JP4729661B2 (ja) * | 2003-07-11 | 2011-07-20 | 奇美電子股▲ふん▼有限公司 | ヒロックが無いアルミニウム層及びその形成方法 |
JP4085094B2 (ja) * | 2004-02-19 | 2008-04-30 | シャープ株式会社 | 導電素子基板の製造方法、液晶表示装置の製造方法 |
US20060024870A1 (en) * | 2004-07-27 | 2006-02-02 | Wen-Chun Wang | Manufacturing method for low temperature polycrystalline silicon cell |
KR101122228B1 (ko) * | 2004-10-26 | 2012-03-19 | 삼성전자주식회사 | 박막 트랜지스터 표시판 및 그 제조 방법 |
TW200710471A (en) * | 2005-07-20 | 2007-03-16 | Samsung Electronics Co Ltd | Array substrate for display device |
KR101373735B1 (ko) | 2007-02-22 | 2014-03-14 | 삼성디스플레이 주식회사 | 신호선의 제조 방법, 박막 트랜지스터 표시판 및 그의 제조방법 |
JP2009076867A (ja) * | 2007-08-30 | 2009-04-09 | Sumitomo Electric Ind Ltd | 半導体素子の製造方法 |
JP2011095451A (ja) * | 2009-10-29 | 2011-05-12 | Sony Corp | 横電界方式の液晶表示装置 |
JP5732832B2 (ja) * | 2010-01-19 | 2015-06-10 | セントラル硝子株式会社 | 車両用窓ガラスの製造方法 |
TWI614532B (zh) * | 2013-05-22 | 2018-02-11 | 聖元電子有限公司 | 具有立體影像顯示功能的顯示器及其製作方法 |
CN109103140B (zh) * | 2018-08-03 | 2020-10-16 | 深圳市华星光电半导体显示技术有限公司 | 一种阵列基板的制作方法 |
CN114774922B (zh) * | 2022-04-01 | 2022-11-15 | 肇庆微纳芯材料科技有限公司 | 一种钼铝金属蚀刻液及其制备方法与蚀刻方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01231322A (ja) * | 1988-03-11 | 1989-09-14 | Sumitomo Metal Ind Ltd | プラズマプロセス装置 |
US5772858A (en) * | 1995-07-24 | 1998-06-30 | Applied Materials, Inc. | Method and apparatus for cleaning a target in a sputtering source |
JPH11297676A (ja) * | 1998-04-06 | 1999-10-29 | Kokusai Electric Co Ltd | 電子部品製造装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5177404A (zh) * | 1974-12-26 | 1976-07-05 | Fuji Photo Film Co Ltd | |
US5162933A (en) * | 1990-05-16 | 1992-11-10 | Nippon Telegraph And Telephone Corporation | Active matrix structure for liquid crystal display elements wherein each of the gate/data lines includes at least a molybdenum-base alloy layer containing 0.5 to 10 wt. % of chromium |
US5547896A (en) * | 1995-02-13 | 1996-08-20 | Harris Corporation | Direct etch for thin film resistor using a hard mask |
KR100219480B1 (ko) * | 1995-11-29 | 1999-09-01 | 윤종용 | 박막트랜지스터 액정표시장치 및 그 제조방법 |
KR200205996Y1 (ko) * | 1996-08-23 | 2000-12-01 | 이구택 | 산화방지제 자동투입장치 |
US6081308A (en) * | 1996-11-21 | 2000-06-27 | Samsung Electronics Co., Ltd. | Method for manufacturing liquid crystal display |
TW418539B (en) * | 1998-05-29 | 2001-01-11 | Samsung Electronics Co Ltd | A method for forming TFT in liquid crystal display |
KR20000028599A (ko) * | 1998-10-28 | 2000-05-25 | 윤종용 | 반도체장치의포토마스크및그제조방법 |
KR100315648B1 (ko) * | 2000-01-21 | 2001-11-29 | 정지완 | 액정표시장치의 게이트 전극용 식각액 |
-
2002
- 2002-08-20 KR KR1020020049192A patent/KR100685953B1/ko not_active IP Right Cessation
-
2003
- 2003-07-02 US US10/610,760 patent/US6930749B2/en not_active Expired - Lifetime
- 2003-08-01 CN CNB031496245A patent/CN1238755C/zh not_active Expired - Fee Related
- 2003-08-06 CN CNB031497179A patent/CN100347334C/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01231322A (ja) * | 1988-03-11 | 1989-09-14 | Sumitomo Metal Ind Ltd | プラズマプロセス装置 |
US5772858A (en) * | 1995-07-24 | 1998-06-30 | Applied Materials, Inc. | Method and apparatus for cleaning a target in a sputtering source |
JPH11297676A (ja) * | 1998-04-06 | 1999-10-29 | Kokusai Electric Co Ltd | 電子部品製造装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103021934A (zh) * | 2012-12-20 | 2013-04-03 | 中微半导体设备(上海)有限公司 | 一种通孔或接触孔的形成方法 |
CN103021934B (zh) * | 2012-12-20 | 2015-10-21 | 中微半导体设备(上海)有限公司 | 一种通孔或接触孔的形成方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20040017078A (ko) | 2004-02-26 |
US20040036835A1 (en) | 2004-02-26 |
KR100685953B1 (ko) | 2007-02-23 |
CN1480779A (zh) | 2004-03-10 |
CN1238755C (zh) | 2006-01-25 |
CN1480556A (zh) | 2004-03-10 |
US6930749B2 (en) | 2005-08-16 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: WEIHAI DIANMEISHI OPTO-MECHATRONICS CO., LTD. Effective date: 20140227 |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20140227 Address after: Gyeonggi Do Lingtong paldal Gu Dong 1009-1 fan dust Tian Tian Bldg.8 layer Patentee after: Kinescope Manufacturing Service Co., Ltd. Patentee after: Weihai dianmei Shiguang electromechanical Co Ltd Address before: Gyeonggi Do, South Korea Patentee before: Kinescope Manufacturing Service Co., Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20071107 Termination date: 20190806 |