CL2011001756A1 - Metodo de fabricacion de peliculas delgadas para aplicaciones fotovoltaicas o electronicas, que comprende fabricar una capa precursora de nanocristal y selenizar la capa precursora en una atmosfera que contiene selenio; y metodo de fabricacion de una capa precursora de nanocristal. - Google Patents

Metodo de fabricacion de peliculas delgadas para aplicaciones fotovoltaicas o electronicas, que comprende fabricar una capa precursora de nanocristal y selenizar la capa precursora en una atmosfera que contiene selenio; y metodo de fabricacion de una capa precursora de nanocristal.

Info

Publication number
CL2011001756A1
CL2011001756A1 CL2011001756A CL2011001756A CL2011001756A1 CL 2011001756 A1 CL2011001756 A1 CL 2011001756A1 CL 2011001756 A CL2011001756 A CL 2011001756A CL 2011001756 A CL2011001756 A CL 2011001756A CL 2011001756 A1 CL2011001756 A1 CL 2011001756A1
Authority
CL
Chile
Prior art keywords
precursor layer
manufacturing
selenizing
photovoltaic
nanocrystalline
Prior art date
Application number
CL2011001756A
Other languages
English (en)
Inventor
Rakesh Agrawal
Hugh Hillhouse
Qijie Guo
Original Assignee
Purdue Research Foundation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Purdue Research Foundation filed Critical Purdue Research Foundation
Publication of CL2011001756A1 publication Critical patent/CL2011001756A1/es

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/186Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042PV modules or arrays of single PV cells
    • H01L31/0445PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02436Intermediate layers between substrates and deposited layers
    • H01L21/02439Materials
    • H01L21/02491Conductive materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02518Deposited layers
    • H01L21/02521Materials
    • H01L21/02568Chalcogenide semiconducting materials not being oxides, e.g. ternary compounds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02518Deposited layers
    • H01L21/02587Structure
    • H01L21/0259Microstructure
    • H01L21/02601Nanoparticles
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02612Formation types
    • H01L21/02614Transformation of metal, e.g. oxidation, nitridation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02612Formation types
    • H01L21/02617Deposition types
    • H01L21/02623Liquid deposition
    • H01L21/02628Liquid deposition using solutions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0256Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
    • H01L31/0264Inorganic materials
    • H01L31/032Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
    • H01L31/0322Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Sustainable Development (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Energy (AREA)
  • Photovoltaic Devices (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

Método de fabricación de películas delgadas para aplicaciones fotovoltaicas o electrónicas, que comprende fabricar una capa precursora de nanocristal y selenizar la capa precursora en una atmósfera que contiene selenio; y método de fabricación de una capa precursora de nanocristal.
CL2011001756A 2009-01-21 2011-07-20 Metodo de fabricacion de peliculas delgadas para aplicaciones fotovoltaicas o electronicas, que comprende fabricar una capa precursora de nanocristal y selenizar la capa precursora en una atmosfera que contiene selenio; y metodo de fabricacion de una capa precursora de nanocristal. CL2011001756A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14608409P 2009-01-21 2009-01-21

Publications (1)

Publication Number Publication Date
CL2011001756A1 true CL2011001756A1 (es) 2012-02-10

Family

ID=42356199

Family Applications (1)

Application Number Title Priority Date Filing Date
CL2011001756A CL2011001756A1 (es) 2009-01-21 2011-07-20 Metodo de fabricacion de peliculas delgadas para aplicaciones fotovoltaicas o electronicas, que comprende fabricar una capa precursora de nanocristal y selenizar la capa precursora en una atmosfera que contiene selenio; y metodo de fabricacion de una capa precursora de nanocristal.

Country Status (10)

Country Link
US (1) US8722447B2 (es)
EP (1) EP2379458A4 (es)
JP (1) JP2012515708A (es)
KR (1) KR20110108388A (es)
CN (1) CN102361830A (es)
AU (1) AU2010206814A1 (es)
BR (1) BRPI1006965A2 (es)
CL (1) CL2011001756A1 (es)
CO (1) CO6400212A2 (es)
WO (1) WO2010085553A1 (es)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5782672B2 (ja) * 2009-11-06 2015-09-24 凸版印刷株式会社 化合物半導体薄膜作製用インク、そのインクを用いて得た化合物半導体薄膜、その化合物半導体薄膜を備える太陽電池、及びその太陽電池の製造方法
JP2012114251A (ja) * 2010-11-25 2012-06-14 Kyocera Corp 光電変換装置の製造方法
JP2012114250A (ja) * 2010-11-25 2012-06-14 Kyocera Corp 光電変換装置の製造方法
KR101172050B1 (ko) 2011-02-11 2012-08-07 재단법인대구경북과학기술원 박막 태양전지의 흡수층 제조방법
KR101229310B1 (ko) 2011-02-14 2013-02-04 재단법인대구경북과학기술원 박막태양전지의 광흡수층 제조방법
KR20120131535A (ko) * 2011-05-25 2012-12-05 한국에너지기술연구원 CIGS/CIS 나노입자의 셀렌화에 의한 치밀한 CIGSe/CISe 박막 제조방법
WO2012163976A1 (en) * 2011-06-03 2012-12-06 Bayer Intellectual Property Gmbh Continuous process for the synthesis of ternary or quaternary semiconducting nanoparticles based on ib, iiia, via elements of the periodic classification
US8916457B2 (en) * 2012-05-22 2014-12-23 King Abdullah University Of Science And Technology In situ synthesis of nanoparticles on substrates by inkjet printing
US8859323B2 (en) * 2012-07-31 2014-10-14 Intermolecular, Inc. Method of chalcogenization to form high quality cigs for solar cell applications
KR101389832B1 (ko) * 2012-11-09 2014-04-30 한국과학기술연구원 구리인듐셀레늄(cigs) 또는 구리아연주석황(czts)계 박막형 태양전지 및 그의 제조방법
CN103911148B (zh) * 2013-01-07 2016-11-16 中国药科大学 基于壳聚糖的氨基化碳氮量子点的制备方法
EP2964566B1 (en) * 2013-03-04 2021-02-17 Nanoco Technologies Ltd Copper-indium-gallium-chalcogenide nanoparticle precursors for thin-film solar cells
JP2016510179A (ja) * 2013-03-15 2016-04-04 ナノコ テクノロジーズ リミテッド 粒子サイズ及びS:Se比が調整されたPVデバイス
US9105798B2 (en) 2013-05-14 2015-08-11 Sun Harmonics, Ltd Preparation of CIGS absorber layers using coated semiconductor nanoparticle and nanowire networks
CN103325886B (zh) * 2013-06-09 2017-07-18 徐东 一种具有能带梯度分布的铜铟铝硒(cias)薄膜的制备方法
JP2015020932A (ja) * 2013-07-19 2015-02-02 株式会社太陽電池総合研究所 カルコパイライトナノ粒子の製造方法
US9960314B2 (en) * 2013-09-13 2018-05-01 Nanoco Technologies Ltd. Inorganic salt-nanoparticle ink for thin film photovoltaic devices and related methods
US9893220B2 (en) * 2013-10-15 2018-02-13 Nanoco Technologies Ltd. CIGS nanoparticle ink formulation having a high crack-free limit
CN103881709B (zh) * 2014-04-10 2016-06-08 石家庄铁道大学 一种多级孔TiO2/量子点复合材料的制备方法

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3064701B2 (ja) * 1992-10-30 2000-07-12 松下電器産業株式会社 カルコパイライト型化合物薄膜の製造方法
JP3244408B2 (ja) 1995-09-13 2002-01-07 松下電器産業株式会社 薄膜太陽電池及びその製造方法
EP0837511B1 (en) * 1996-10-15 2005-09-14 Matsushita Electric Industrial Co., Ltd Solar cell and method for manufacturing the same
US5985691A (en) 1997-05-16 1999-11-16 International Solar Electric Technology, Inc. Method of making compound semiconductor films and making related electronic devices
US6127202A (en) 1998-07-02 2000-10-03 International Solar Electronic Technology, Inc. Oxide-based method of making compound semiconductor films and making related electronic devices
AU2249201A (en) 1999-11-16 2001-05-30 Midwest Research Institute A novel processing approach towards the formation of thin-film Cu(In,Ga)Se2
JP2002329877A (ja) 2001-04-27 2002-11-15 National Institute Of Advanced Industrial & Technology Cu(Ga及び(又は)In)Se2薄膜層、Cu(InGa)(S、Se)2薄膜層、太陽電池、Cu(Ga及び(又は)In)Se2薄膜層の形成方法
US20030106488A1 (en) 2001-12-10 2003-06-12 Wen-Chiang Huang Manufacturing method for semiconductor quantum particles
US8309163B2 (en) 2004-02-19 2012-11-13 Nanosolar, Inc. High-throughput printing of semiconductor precursor layer by use of chalcogen-containing vapor and inter-metallic material
US7604843B1 (en) * 2005-03-16 2009-10-20 Nanosolar, Inc. Metallic dispersion
US8048477B2 (en) 2004-02-19 2011-11-01 Nanosolar, Inc. Chalcogenide solar cells
US7605328B2 (en) 2004-02-19 2009-10-20 Nanosolar, Inc. Photovoltaic thin-film cell produced from metallic blend using high-temperature printing
US7306823B2 (en) 2004-09-18 2007-12-11 Nanosolar, Inc. Coated nanoparticles and quantum dots for solution-based fabrication of photovoltaic cells
US7663057B2 (en) 2004-02-19 2010-02-16 Nanosolar, Inc. Solution-based fabrication of photovoltaic cell
US7700464B2 (en) 2004-02-19 2010-04-20 Nanosolar, Inc. High-throughput printing of semiconductor precursor layer from nanoflake particles
US20070163639A1 (en) * 2004-02-19 2007-07-19 Nanosolar, Inc. High-throughput printing of semiconductor precursor layer from microflake particles
CH697007A5 (fr) 2004-05-03 2008-03-14 Solaronix Sa Procédé pour produire un composé chalcopyrite en couche mince.
JP2006186200A (ja) 2004-12-28 2006-07-13 Showa Shell Sekiyu Kk プリカーサ膜及びその製膜方法
WO2006101986A2 (en) * 2005-03-16 2006-09-28 Nanosolar, Inc. Mettalic dispersion and formation of compound film for photovoltaic device active layer
US20070111367A1 (en) * 2005-10-19 2007-05-17 Basol Bulent M Method and apparatus for converting precursor layers into photovoltaic absorbers
EP1997150A2 (en) * 2006-02-23 2008-12-03 Van Duren, Jeroen K.J. High-throughput printing of semiconductor precursor layer from inter-metallic nanoflake particles
JP5054326B2 (ja) * 2006-05-01 2012-10-24 昭和シェル石油株式会社 Cis系薄膜太陽電池モジュールの改良された耐久性試験方法
US7829059B2 (en) 2006-05-19 2010-11-09 Purdue Research Foundation Rapid synthesis of ternary, binary and multinary chalcogenide nanoparticles
ES2547566T3 (es) * 2006-05-24 2015-10-07 Atotech Deutschland Gmbh Compuesto de recubrimiento metálico y método para la deposición de cobre, zinc y estaño adecuado para la producción de una célula solar de película fina
WO2007146964A2 (en) 2006-06-12 2007-12-21 Robinson Matthew R Thin-film devices fromed from solid particles
WO2008057119A1 (en) 2006-11-09 2008-05-15 Midwest Research Institue Formation of copper-indium-selenide and/or copper-indium-gallium-selenide films from indium selenide and copper selenide precursors
US8563348B2 (en) * 2007-04-18 2013-10-22 Nanoco Technologies Ltd. Fabrication of electrically active films based on multiple layers
KR101497633B1 (ko) * 2007-04-18 2015-03-03 나노코 테크놀로지스 리미티드 멀티층을 기본으로 전기적인 활성 박막을 제조
JP2009033071A (ja) 2007-07-31 2009-02-12 National Institute Of Advanced Industrial & Technology CIGSSe太陽電池及びその作製方法
KR101030780B1 (ko) * 2007-11-14 2011-04-27 성균관대학교산학협력단 Ⅰ-ⅲ-ⅵ2 나노입자의 제조방법 및 다결정 광흡수층박막의 제조방법
EP3671865B1 (en) 2007-11-30 2023-07-19 Nanoco Technologies, Ltd. Preparation of nanoparticle material
CN101235471A (zh) * 2008-03-12 2008-08-06 安泰科技股份有限公司 高晶化温度铁基非晶态合金及其薄带
US20090260670A1 (en) * 2008-04-18 2009-10-22 Xiao-Chang Charles Li Precursor ink for producing IB-IIIA-VIA semiconductors

Also Published As

Publication number Publication date
US8722447B2 (en) 2014-05-13
EP2379458A4 (en) 2015-02-11
EP2379458A1 (en) 2011-10-26
US20120122268A1 (en) 2012-05-17
AU2010206814A1 (en) 2011-08-11
JP2012515708A (ja) 2012-07-12
KR20110108388A (ko) 2011-10-05
CO6400212A2 (es) 2012-03-15
WO2010085553A1 (en) 2010-07-29
CN102361830A (zh) 2012-02-22
BRPI1006965A2 (pt) 2016-04-12

Similar Documents

Publication Publication Date Title
CL2011001756A1 (es) Metodo de fabricacion de peliculas delgadas para aplicaciones fotovoltaicas o electronicas, que comprende fabricar una capa precursora de nanocristal y selenizar la capa precursora en una atmosfera que contiene selenio; y metodo de fabricacion de una capa precursora de nanocristal.
EP2420599A4 (en) SUBSTRATE, SUBSTRATE HAVING THIN FILM, SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
BR112015030581A2 (pt) dispositivos fotovoltáicos e método para fazer
TWI561490B (en) Oxide sintered compact and method of manufacturing the same, target, transparent conductive film obtained by using the same, and transparent conductive substrate
WO2011113008A3 (en) Multilayer film for photovoltaic applications
ZA201003879B (en) Transparent conductive oxide coating for thin film photovoltaic applications and methods of making the same
EP2579237A4 (en) Thin film transistor substrate and method for producing same
EP2249395A4 (en) THIN FILM SOLAR CELL AND METHOD OF MANUFACTURING THE SAME
IN2014CN03520A (es)
EP2337085A4 (en) INTEGRATED THIN FILM SOLAR CELL AND MANUFACTURING METHOD THEREFOR
TWI365812B (en) Transfer film, method of manufacturing the same, transfer method and object surface structure
EP2200074A4 (en) METHOD FOR MANUFACTURING SEMICONDUCTOR CHIP WITH ADHESIVE FILM, SEMICONDUCTOR ADHESIVE FILM USED IN THE METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
EP2200075A4 (en) METHOD FOR PRODUCING A SEMICONDUCTOR CHIP WITH A LONG-TERM FILM, A LONG-TERM FOR A SEMICONDUCTOR USED IN THE PROCESS, AND METHOD FOR PRODUCING A SEMICONDUCTOR CONSTRUCTION ELEMENT
DE602007000428D1 (de) Siliciumhaltige, folienbildende Zusammensetzung, siliciumhaltige Folie, siliciumhaltiges, folientragendes Substrat und Strukturierungsverfahren
SG11201509897WA (en) Conductive film coated substrate, multilayer reflectivefilm coated substrate, reflective mask blank, reflectivemask, and semiconductor device manufacturing method
TWI318458B (en) Thin film transistor substrate and manufacturing method thereof
EP2352174A4 (en) Silicon thin film solar cell and method for manufacturing same
TW200737589A (en) Electronic device and antenna structure thereof
TW201129974A (en) Near-field CD having plasmonic laser effect
WO2011028957A3 (en) Methods and devices for processing a precursor layer in a group via environment
SG10201708893XA (en) Sheet, tape, and semiconductor device manufacturing method
BR112016001343A8 (pt) etiqueta para um recipiente, e recipiente.
GB0724499D0 (en) Organic semiconductor film forming method, organic semiconductor film and organic thin film transistor
WO2010050773A3 (ko) 임베디드 커패시터 및 그 제조방법
EP2202787A4 (en) THIN FILM ACTIVE ELEMENT, ORGANIC ELECTROLUMINESCENT DEVICE, DISPLAY DEVICE, ELECTRONIC DEVICE, AND METHOD FOR MANUFACTURING THIN FILM ACTIVE ELEMENT