CH666057A5 - Verfahren zum loesen von metallen unter verwendung eines furanderivats. - Google Patents

Verfahren zum loesen von metallen unter verwendung eines furanderivats. Download PDF

Info

Publication number
CH666057A5
CH666057A5 CH3920/84A CH392084A CH666057A5 CH 666057 A5 CH666057 A5 CH 666057A5 CH 3920/84 A CH3920/84 A CH 3920/84A CH 392084 A CH392084 A CH 392084A CH 666057 A5 CH666057 A5 CH 666057A5
Authority
CH
Switzerland
Prior art keywords
hydrogen peroxide
liter
etching
gramol
copper
Prior art date
Application number
CH3920/84A
Other languages
German (de)
English (en)
Inventor
Kwee Chang Wong
Original Assignee
Dart Ind Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dart Ind Inc filed Critical Dart Ind Inc
Publication of CH666057A5 publication Critical patent/CH666057A5/de

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/10Etching compositions
    • C23F1/14Aqueous compositions
    • C23F1/16Acidic compositions
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
    • C23C16/488Protection of windows for introduction of radiation into the coating chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
CH3920/84A 1983-08-22 1984-08-15 Verfahren zum loesen von metallen unter verwendung eines furanderivats. CH666057A5 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/525,080 US4437932A (en) 1983-08-22 1983-08-22 Dissolution of metals utilizing a furan derivative

Publications (1)

Publication Number Publication Date
CH666057A5 true CH666057A5 (de) 1988-06-30

Family

ID=24091833

Family Applications (1)

Application Number Title Priority Date Filing Date
CH3920/84A CH666057A5 (de) 1983-08-22 1984-08-15 Verfahren zum loesen von metallen unter verwendung eines furanderivats.

Country Status (11)

Country Link
US (1) US4437932A (enExample)
JP (1) JPS6050186A (enExample)
KR (1) KR920006354B1 (enExample)
CA (1) CA1194390A (enExample)
CH (1) CH666057A5 (enExample)
DE (1) DE3430342A1 (enExample)
FR (1) FR2555600B1 (enExample)
GB (1) GB2147546B (enExample)
IT (1) IT1176624B (enExample)
MX (1) MX161653A (enExample)
NL (1) NL8401752A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999010230A1 (en) 1997-08-22 1999-03-04 Kvaerner Oil & Gas Australia Pty. Ltd. Buoyant substructure for offshore platform
GB2346842B (en) 1999-02-19 2002-03-20 Kvaerner Oil & Gas Usa Inc Floating substructure with ballasting system
US7794531B2 (en) * 2007-01-08 2010-09-14 Enthone Inc. Organic solderability preservative comprising high boiling temperature alcohol
CN109972144A (zh) * 2019-04-10 2019-07-05 深圳市松柏实业发展有限公司 铜蚀刻液及其废液的再生利用方法和循环再生利用系统

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5118228A (ja) * 1974-08-05 1976-02-13 Mitsubishi Gas Chemical Co Kinzokuhyomenshorieki
US4174253A (en) * 1977-11-08 1979-11-13 Dart Industries Inc. Dissolution of metals utilizing a H2 O2 -H2 SO4 solution catalyzed with hydroxy substituted cycloparaffins
US4158593A (en) 1977-11-08 1979-06-19 Dart Industries Inc. Dissolution of metals utilizing a H2 O2 -sulfuric acid solution catalyzed with selenium compounds
US4141850A (en) * 1977-11-08 1979-02-27 Dart Industries Inc. Dissolution of metals

Also Published As

Publication number Publication date
FR2555600B1 (fr) 1990-11-02
KR850002836A (ko) 1985-05-20
MX161653A (es) 1990-12-03
GB8406797D0 (en) 1984-04-18
IT1176624B (it) 1987-08-18
DE3430342A1 (de) 1985-03-14
JPS6050186A (ja) 1985-03-19
GB2147546A (en) 1985-05-15
KR920006354B1 (ko) 1992-08-03
US4437932A (en) 1984-03-20
FR2555600A1 (fr) 1985-05-31
NL8401752A (nl) 1985-03-18
GB2147546B (en) 1987-01-28
IT8422381A0 (it) 1984-08-21
JPH0427304B2 (enExample) 1992-05-11
CA1194390A (en) 1985-10-01

Similar Documents

Publication Publication Date Title
DE2848453C2 (de) Verfahren zur Auflösung von Metallen, Zusammensetzungen dafür und Verwendung
DE2149196C2 (de) Verfahren und Lösung zum Ätzen von Kupfer oder Kupferlegierungen
CH666059A5 (de) Verfahren zum loesen von metallen unter verwendung eines glykolaethers.
DE1298383B (de) Verfahren und Mittel zum chemischen Aufloesen von Kupfer
DE2700265B2 (de) Saure Peroxid-Ätzlösung und deren Verwendung zum Ätzen von Metall, insbesondere von Kupfer
DE3115323C2 (enExample)
CH666056A5 (de) Verfahren zum loesen von metallen.
DE1521663A1 (de) AEtzmittel und Verfahren zur Aufloesung von Metallen
DE1253008B (de) Verfahren zum AEtzen von Kupferfolien fuer die Herstellung von gedruckten Schaltungen
DE1160271B (de) Verfahren zum Aufloesen von Kupfer
DE1255443B (de) Verfahren zum chemischen AEtzen von gedruckten Schaltungen
DE2848475C2 (enExample)
CH666055A5 (de) Verfahren zum loesen von metallen unter verwendung von epsilon-caprolactam.
DE3139757C2 (de) Verfahren zur Regenerierung von Palladium und Zinn enthaltenden wäßrigen Aktivatorlösungen
CH666057A5 (de) Verfahren zum loesen von metallen unter verwendung eines furanderivats.
CH666047A5 (de) Verfahren zum loesen von metallen unter verwendung eines pyrrolidons.
DE2412134A1 (de) Mittel und verfahren zum reinigen von zinn-blei-legierungen
EP0491020B1 (de) Ätzlösung
DE2557269A1 (de) Verfahren zum aetzen von kupfer oder kupferlegierungen
CH666058A5 (de) Verfahren zum loesen von metallen unter verwendung eines lactons.
DE1771064C3 (de) Verfahren zum Ätzen von metallischem Kupfer mittels Wasserstoffperoxidlösung
DE2136919A1 (de) Wäßrige Losung zum Atzen von Kupfer
DE1160270B (de) Verfahren zur Aufloesung von Kupfer
AT229664B (de) Verfahren zum bilmässigen Abtragen von auf Unterlagen befindlichen Kupferschichten
DE2800851A1 (de) Aetzmittel und dessen verwendung zum aetzen von metall

Legal Events

Date Code Title Description
PL Patent ceased
PL Patent ceased